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    • 3. 发明申请
    • SUBSTRATE FOR HIGH FREQUENCY INTEGRATED CIRCUIT
    • 高频集成电路基板
    • WO2009034362A1
    • 2009-03-19
    • PCT/GB2008/003131
    • 2008-09-15
    • ISIS INNOVATION LIMITEDWILSHAW, Peter, RichardMALLIK, KanadFALSTER, Robert, James
    • WILSHAW, Peter, RichardMALLIK, KanadFALSTER, Robert, James
    • H01L21/22H01L21/762H01L29/167
    • H01L21/221H01L21/76251H01L29/167
    • A substrate for a high frequency integrated circuit is described, comprising: a silicon wafer comprising impurities of a type that form one or more deep energy levels within the band gap of the silicon forming the silicon wafer, wherein at least one of said deep energy levels is positioned at least 0.3 eV away from the conduction band if the level is a donor level or at least 0.3 eV away from the valence band if the level is an acceptor level; and an electrically insulating silicon oxide layer, formed on a surface of the silicon wafer and providing an outer surface on which a device layer may be formed, said silicon oxide layer having the property of preventing diffusion of said impurities through it. Alternative arrangements may use a different diffusion barrier layer between the silicon wafer and device layer with an additional diffusion barrier layer encapsulating the silicon wafer layer and/or device layer. Associated methods of manufacture are described.
    • 描述了一种用于高频集成电路的衬底,包括:硅晶片,其包括在形成硅晶片的硅的带隙内形成一个或多个深能级的类型的杂质,其中所述深能级中的至少一个 如果电平是施主电平或离电荷带至少0.3eV远离导带至少0.3eV,如果电平是受体电平; 以及电绝缘性氧化硅层,其形成在所述硅晶片的表面上并且提供可在其上形成器件层的外表面,所述氧化硅层具有防止所述杂质通过其扩散的性质。 可选择的布置可以在硅晶片和器件层之间使用不同的扩散阻挡层,其中附加的扩散阻挡层封装硅晶片层和/或器件层。 描述了相关的制造方法。