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1. 发明申请

WO2013012616A3 ELECTRICAL INSPECTION OF ELECTRONIC DEVICES USING ELECTRON-BEAM INDUCED PLASMA PROBES 审中-公开
标题翻译：使用电子束诱导的等离子体探针对电子器件进行电气检查
公开(公告)号：WO2013012616A3
公开(公告)日：2013-04-11
申请号：PCT/US2012046100
申请日：2012-07-10
申请人： ORBOTECH LTD , PHOTON DYNAMICS INC , KADYSHEVITCH ALEXANDER , KADAR OFER , GLAZER ARIE , LOEWINGER RONEN , GROSS ABRAHAM , TOET DANIEL
发明人： KADYSHEVITCH ALEXANDER , KADAR OFER , GLAZER ARIE , LOEWINGER RONEN , GROSS ABRAHAM , TOET DANIEL
IPC分类号： G01R31/28 , G01R1/07 , G01R31/02 , G01R31/26
CPC分类号： G01R1/072 , G01R31/305 , H01J33/00 , H01J2237/164
摘要： A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.
摘要翻译：非机械接触信号测量装置包括被测结构上的第一导体和与第一导体接触的气体。至少一个电子束被引导到气体中，以便在电子束通过气体的气体中引入等离子体。第二导体与等离子体电接触。当等离子体被引导到第一导体上时，信号源通过第一导体，等离子体和第二导体耦合到电测量装置。电测量装置响应于信号源。

2. 发明申请

WO2013012616A2 ELECTRICAL INSPECTION OF ELECTRONIC DEVICES USING ELECTRON-BEAM INDUCED PLASMA PROBES 审中-公开
标题翻译：电子束诱导等离子体探针的电子器件电气检测
公开(公告)号：WO2013012616A2
公开(公告)日：2013-01-24
申请号：PCT/US2012/046100
申请日：2012-07-10
申请人： ORBOTECH LTD. , PHOTON DYNAMICS, INC. , KADYSHEVITCH, Alexander , KADAR, Ofer , GLAZER, Arie , LOEWINGER, Ronen , GROSS, Abraham , TOET, Daniel
发明人： KADYSHEVITCH, Alexander , KADAR, Ofer , GLAZER, Arie , LOEWINGER, Ronen , GROSS, Abraham , TOET, Daniel
IPC分类号： G01R31/28 , G01R31/26 , G01R31/02 , G01R1/07
CPC分类号： G01R1/072 , G01R31/305 , H01J33/00 , H01J2237/164
摘要： A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.
摘要翻译：非机械接触信号测量装置包括在被测结构上的第一导体和与第一导体接触的气体。至少一个电子束被引导到气体中，以便在电子束穿过气体的气体中感应出等离子体。第二导体与等离子体电接触。当等离子体被引导到第一导体上时，信号源通过第一导体，等离子体和第二导体耦合到电测量装置。电气测量设备对信号源做出响应。

3. 发明申请

WO2009143237A1 ENHANCEMENT OF DETECTION OF DEFECTS ON DISPLAY PANELS USING FRONT LIGHTING 审中-公开
标题翻译：使用前照灯检测显示面板缺陷的增强
公开(公告)号：WO2009143237A1
公开(公告)日：2009-11-26
申请号：PCT/US2009/044667
申请日：2009-05-20
申请人： PHOTON DYNAMICS INC. , TOET, Daniel , JONES, Lloyd , ERSAHIN, Atila , MYUNGCHUL, Jun , PHAM, Savier , JUNG, Sam Soo
发明人： TOET, Daniel , JONES, Lloyd , ERSAHIN, Atila , MYUNGCHUL, Jun , PHAM, Savier , JUNG, Sam Soo
IPC分类号： G01R31/308
CPC分类号： G01R31/308 , G09G3/006
摘要： Front-side illumination apparatus and methods are provided to enable, in general, detection of a-Si residue defects at the array test step well before the cell step. a-Si has high resistivity without exposure to light making it difficult to detect in conventional TFT-array test procedures. On the other hand, when the a-Si residue is illuminated with a light, its resistivity decreases, which, in turn, changes the electrical properties of the TFT array cell, which may be detected using the voltage imaging optical system (VIOS). In one implementation, the TFT array cell is exposed to illuminating light pulses, impacting the top side of the TFT panel during the testing performed using the VIOS. In one implementation, the front side illumination is traveling along the same path as the illumination used for voltage imaging in the VIOS. In another implementation, light source(s) for front side illumination are located in the close proximity to the VIOS modulator.
摘要翻译：提供了前侧照明装置和方法，以使得通常能够在阵列测试步骤之前，在电池步骤之前检测a-Si残留缺陷。 a-Si在不暴露于光的情况下具有高电阻，使得在常规TFT阵列测试程序中难以检测。另一方面，当用光照射a-Si残留物时，其电阻率降低，这反过来改变了可以使用电压成像光学系统（VIOS）检测的TFT阵列电池的电性能。在一个实现中，在使用VIOS进行的测试期间，TFT阵列单元暴露于照明光脉冲，从而影响TFT面板的顶侧。在一个实施方案中，前侧照明沿着与用于VIOS中的电压成像的照明相同的路径行进。在另一实施方式中，用于前侧照明的光源位于与VIOS调制器非常接近的位置。

4. 发明申请

WO2008051922A3 CONTINUOUS LINEAR SCANNING OF LARGE FLAT PANEL MEDIA 审中-公开
标题翻译：大平板介质的连续线性扫描
公开(公告)号：WO2008051922A3
公开(公告)日：2008-09-18
申请号：PCT/US2007082117
申请日：2007-10-22
申请人： PHOTON DYNAMICS INC , NGUYEN KENT , THOMPSON ERIC , TRAN HAI , GANGAKHEDKAR KAUSHAL , BARNETT ROBERT , TOET DANIEL , BALDWIN DAVID , AOCHI STEVE , NGUYEN NEIL
发明人： NGUYEN KENT , THOMPSON ERIC , TRAN HAI , GANGAKHEDKAR KAUSHAL , BARNETT ROBERT , TOET DANIEL , BALDWIN DAVID , AOCHI STEVE , NGUYEN NEIL
IPC分类号： G01R31/00
CPC分类号： G09G3/006 , G02F2001/136254
摘要： A system performs continuous full linear scan of a flat media having a plurality of pixels. The system includes, in part, a chuck, and at least first, second and third gantries. The chuck is adapted to support the flat media during the test. The first gantry includes at least one linear array of non-contacting sensors that spans the width of the flat media and is adapted to move across an entire length of the flat media. Each of the second and third gantries includes a probe head that spans the width of the flat media and each is adapted to apply an electrical signal to the flat media. Each probe head is further adapted to move along a direction substantially perpendicular to the surface of the flat media during the times when the first gantry is in motion and while test signals are being continuously applied.
摘要翻译：系统对具有多个像素的平面介质执行连续全线性扫描。该系统部分地包括卡盘以及至少第一，第二和第三门架。测试过程中，卡盘适合支撑扁平介质。第一台架包括至少一个非接触式传感器的线性阵列，所述非接触式传感器的线性阵列跨越扁平介质的宽度并适于在扁平介质的整个长度上移动。第二和第三门架中的每一个都包括探头，该探头跨越扁平介质的宽度并且每个适于将电信号施加到扁平介质。每个探头还适于在第一机架运动时和连续施加测试信号期间沿着基本上垂直于扁平介质表面的方向移动。

5. 发明申请

WO2008051922A9 CONTINUOUS LINEAR SCANNING OF LARGE FLAT PANEL MEDIA 审中-公开
标题翻译：大平面板介质的连续线性扫描
公开(公告)号：WO2008051922A9
公开(公告)日：2008-06-26
申请号：PCT/US2007082117
申请日：2007-10-22
申请人： PHOTON DYNAMICS INC , NGUYEN KENT , THOMPSON ERIC , TRAN HAI , GANGAKHEDKAR KAUSHAL , BARNETT ROBERT , TOET DANIEL , BALDWIN DAVID , AOCHI STEVE , NGUYEN NEIL
发明人： NGUYEN KENT , THOMPSON ERIC , TRAN HAI , GANGAKHEDKAR KAUSHAL , BARNETT ROBERT , TOET DANIEL , BALDWIN DAVID , AOCHI STEVE , NGUYEN NEIL
IPC分类号： G01R31/302
CPC分类号： G09G3/006 , G02F2001/136254
摘要： A system performs continuous full linear scan of a flat media having a plurality of pixels. The system includes, in part, a chuck, and at least first, second and third gantries. The chuck is adapted to support the flat media during the test. The first gantry includes at least one linear array of non-contacting sensors that spans the width of the flat media and is adapted to move across an entire length of the flat media. Each of the second and third gantries includes a probe head that spans the width of the flat media and each is adapted to apply an electrical signal to the flat media. Each probe head is further adapted to move along a direction substantially perpendicular to the surface of the flat media during the times when the first gantry is in motion and while test signals are being continuously applied.
摘要翻译：系统对具有多个像素的平面介质执行连续的全线性扫描。该系统部分地包括卡盘以及至少第一，第二和第三门架。在测试期间卡盘适于支撑平面介质。第一机架包括至少一个线性阵列的非接触式传感器，它们跨过平坦介质的宽度并且适于在平坦介质的整个长度上移动。第二和第三门架中的每一个包括跨越平坦介质的宽度的探头，并且每个都适于将电信号施加到平坦介质。每个探针头还适于在第一台架运动期间以及在连续施加测试信号的同时沿着基本上垂直于平坦介质的表面的方向移动。

6. 发明申请

WO2008051922A2 CONTINUOUS LINEAR SCANNING OF LARGE FLAT PANEL MEDIA 审中-公开
标题翻译：大平板介质的连续线性扫描
公开(公告)号：WO2008051922A2
公开(公告)日：2008-05-02
申请号：PCT/US2007/082117
申请日：2007-10-22
申请人： PHOTON DYNAMICS, INC. , NGUYEN, Kent , THOMPSON, Eric , TRAN, Hai , GANGAKHEDKAR, Kaushal , BARNETT, Robert , TOET, Daniel , BALDWIN, David , AOCHI, Steve , NGUYEN, Neil
发明人： NGUYEN, Kent , THOMPSON, Eric , TRAN, Hai , GANGAKHEDKAR, Kaushal , BARNETT, Robert , TOET, Daniel , BALDWIN, David , AOCHI, Steve , NGUYEN, Neil
IPC分类号： G01R31/302
CPC分类号： G09G3/006 , G02F2001/136254
摘要： A system performs continuous full linear scan of a flat media having a plurality of pixels. The system includes, in part, a chuck, and at least first, second and third gantries. The chuck is adapted to support the flat media during the test. The first gantry includes at least one linear array of non-contacting sensors that spans the width of the flat media and is adapted to move across an entire length of the flat media. Each of the second and third gantries includes a probe head that spans the width of the flat media and each is adapted to apply an electrical signal to the flat media. Each probe head is further adapted to move along a direction substantially perpendicular to the surface of the flat media during the times when the first gantry is in motion and while test signals are being continuously applied.
摘要翻译：系统对具有多个像素的平面介质执行连续全线性扫描。该系统部分地包括卡盘以及至少第一，第二和第三门架。测试过程中，卡盘适合支撑扁平介质。第一台架包括至少一个非接触式传感器的线性阵列，所述非接触式传感器的线性阵列跨越扁平介质的宽度并适于在扁平介质的整个长度上移动。第二和第三门架中的每一个都包括探头，该探头跨越扁平介质的宽度并且每个适于将电信号施加到扁平介质。每个探头还适于在第一机架运动的时间和连续施加测试信号的时间期间沿基本上垂直于扁平介质表面的方向移动。

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