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1. 发明申请

WO2013012616A2 ELECTRICAL INSPECTION OF ELECTRONIC DEVICES USING ELECTRON-BEAM INDUCED PLASMA PROBES 审中-公开
标题翻译：电子束诱导等离子体探针的电子器件电气检测
公开(公告)号：WO2013012616A2
公开(公告)日：2013-01-24
申请号：PCT/US2012/046100
申请日：2012-07-10
申请人： ORBOTECH LTD. , PHOTON DYNAMICS, INC. , KADYSHEVITCH, Alexander , KADAR, Ofer , GLAZER, Arie , LOEWINGER, Ronen , GROSS, Abraham , TOET, Daniel
发明人： KADYSHEVITCH, Alexander , KADAR, Ofer , GLAZER, Arie , LOEWINGER, Ronen , GROSS, Abraham , TOET, Daniel
IPC分类号： G01R31/28 , G01R31/26 , G01R31/02 , G01R1/07
CPC分类号： G01R1/072 , G01R31/305 , H01J33/00 , H01J2237/164
摘要： A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.
摘要翻译：非机械接触信号测量装置包括在被测结构上的第一导体和与第一导体接触的气体。至少一个电子束被引导到气体中，以便在电子束穿过气体的气体中感应出等离子体。第二导体与等离子体电接触。当等离子体被引导到第一导体上时，信号源通过第一导体，等离子体和第二导体耦合到电测量装置。电气测量设备对信号源做出响应。

2. 发明申请

WO2012021271A3 HIGH SPEED ACQUISITION VISION SYSTEM AND METHOD FOR SELECTIVELY VIEWING OBJECT FEATURES 审中-公开
标题翻译：高速采集视觉系统和用于选择性地查看对象特征的方法
公开(公告)号：WO2012021271A3
公开(公告)日：2012-04-26
申请号：PCT/US2011044690
申请日：2011-07-20
申请人： PHOTON DYNAMICS INC , BORDENYUK ANDREY
发明人： BORDENYUK ANDREY
IPC分类号： G01B11/24 , G01B9/04
CPC分类号： G01J1/0214 , G02B21/10 , G02B21/365 , G02B27/0018
摘要： System and method for selectively viewing features of objects, including features hidden under non-transparent materials. The system includes: illuminating light source producing illuminating light having controlled angular spectrum; homogenizing optics for spatial intensity modulation of illumination light; dephasing optics to reduce or suppress interference pattern in image due to the coherence of illumination light; infinity corrected objective directing the illuminating light on the object and collecting light from the object; illumination optical path delivering the illuminating light from the illuminating light source to infinity-corrected objective; relay optics for introducing necessary tilt angle for rays of the illuminating light entering the infinity corrected objective; adjustable iris vignetting free aperture of optical fiber; apodizing element within relay optics for spatial modulation of illumination intensity; image sensor for creating image of object; and imaging optical path for delivering light from object to image sensor, which includes tube lens, removable block and adjustable iris.
摘要翻译：用于选择性地查看对象的特征的系统和方法，包括隐藏在不透明材料下的特征。该系统包括：照明光源，产生具有受控角谱的照明光; 用于照明光的空间强度调制的均化光学器件; 由于照明光的相干性而使光学相移以减少或抑制图像中的干涉图案; 无穷远校正物镜，将照明光引导到物体上并从物体收集光; 将来自照明光源的照明光照射到无穷远校正物镜的照明光路; 中继光学器件，用于为进入无穷远校正物镜的照明光线引入必要的倾角; 光纤可调光圈渐晕光圈; 用于空间调制照明强度的中继光学器件中的变迹元件; 图像传感器，用于创建对象的图像; 以及用于将来自物体的光传送到图像传感器的成像光路，其包括管透镜，可移动块和可调虹膜。

3. 发明申请

WO2012021271A2 HIGH SPEED ACQUISITION VISION SYSTEM AND METHOD FOR SELECTIVELY VIEWING OBJECT FEATURES 审中-公开
标题翻译：高速获取视觉系统和选择对象特征的方法
公开(公告)号：WO2012021271A2
公开(公告)日：2012-02-16
申请号：PCT/US2011/044690
申请日：2011-07-20
申请人： PHOTON DYNAMICS, INC. , BORDENYUK, Andrey
发明人： BORDENYUK, Andrey
IPC分类号： G01B11/24 , G01B9/04
CPC分类号： G01J1/0214 , G02B21/10 , G02B21/365 , G02B27/0018
摘要： System and method for selectively viewing features of objects, including features hidden under non-transparent materials. The system includes: illuminating light source producing illuminating light having controlled angular spectrum; homogenizing optics for spatial intensity modulation of illumination light; dephasing optics to reduce or suppress interference pattern in image due to the coherence of illumination light; infinity corrected objective directing the illuminating light on the object and collecting light from the object; illumination optical path delivering the illuminating light from the illuminating light source to infinity-corrected objective; relay optics for introducing necessary tilt angle for rays of the illuminating light entering the infinity corrected objective; adjustable iris vignetting free aperture of optical fiber; apodizing element within relay optics for spatial modulation of illumination intensity; image sensor for creating image of object; and imaging optical path for delivering light from object to image sensor, which includes tube lens, removable block and adjustable iris.
摘要翻译：用于选择性地查看对象特征的系统和方法，包括隐藏在非透明材料下的特征。该系统包括：产生具有受控角谱的照明光的照明光源; 均匀化光学器件用于照明光的空间强度调制; 降低或抑制由于照明光的相干性而造成的图像中的干涉图案; 将照明光引导到物体上并从物体收集光的无穷远校正物镜; 照明光路将照明光源的照明光传递到无穷远校正物镜; 用于为进入无穷远校正物镜的照明光的射线引入必要的倾斜角的中继光学器件; 光纤可调光圈渐晕渐开孔; 用于空间调制照明强度的继电器光学元件中的变迹元件; 用于创建物体图像的图像传感器; 以及用于传送来自物体到图像传感器的光的成像光路，其包括管透镜，可移除块和可调节光圈。

4. 发明申请

WO2011085227A2 AUTOMATIC PROBE CONFIGURATION STATION AND METHOD THEREFOR 审中-公开
标题翻译：自动探针配置站及其方法
公开(公告)号：WO2011085227A2
公开(公告)日：2011-07-14
申请号：PCT/US2011/020553
申请日：2011-01-07
申请人： PHOTON DYNAMICS, INC. , NGUYEN, Kent , GANGAKHEDKAR, Kaushal , BALDWIN, David , LIGHT, Nile , AOCHI, Steve , WANG, Yan , ERSAHIN, Atila , TRAN, Hai , BAILEY, Thomas H. , JITENDRA, Kiran , CABLE, Alan , SMILEY, Dave , WISHARD, Thomas, E.
发明人： NGUYEN, Kent , GANGAKHEDKAR, Kaushal , BALDWIN, David , LIGHT, Nile , AOCHI, Steve , WANG, Yan , ERSAHIN, Atila , TRAN, Hai , BAILEY, Thomas H. , JITENDRA, Kiran , CABLE, Alan , SMILEY, Dave , WISHARD, Thomas, E.
IPC分类号： G01R1/02
CPC分类号： G01R31/2893
摘要： A probe system for facilitating the inspection of a device under test. System incorporates a storage rack; a probe bar gantry assembly; a probe assembly configured to electrically mate the device under test; and a robot system for picking the probe assembly from the storage rack and deliver the probe assembly to the probe bar gantry. The robot system is also enabled to pick a probe assembly from the probe bar gantry and deliver the probe assembly to the storage rack. The probe assembly includes a clamping assembly for attaching the probe assembly to the probe bar gantry or the storage rack. The probe assembly may include an array of contact pins configured to mate with conductive pads on the device under test when the probe assembly is installed on the probe bar gantry assembly.
摘要翻译：
便于检测被测设备的探测系统。系统包含一个存放架; 探杆台架组件; 探针组件，其被配置为电气配合待测设备; 以及机械手系统，用于从储存机架中拾取探针组件并将探针组件输送到探针杆机架。机器人系统还能够从探测杆台架上拾取探针组件并将探针组件传送到存储机架。探针组件包括用于将探针组件附接到探针台架或存储架的夹持组件。探针组件可以包括接触针阵列，该接触针被构造成当探针组件安装在探针杆台架组件上时与被测器件上的导电衬垫配合。

5. 发明申请

WO2006078893A3 TRACKING AUTO FOCUS SYSTEM 审中-公开
标题翻译：跟踪自动聚焦系统
公开(公告)号：WO2006078893A3
公开(公告)日：2007-05-03
申请号：PCT/US2006002023
申请日：2006-01-17
申请人： PHOTON DYNAMICS INC , WEISS ADAM
发明人： WEISS ADAM
IPC分类号： G02B27/40
CPC分类号： G02B21/245 , G02B7/282 , G02B7/285
摘要： A tracking auto-focus system maintains a microscope pointed at a TFT array continuously in focus so as to eliminate the auto-focusing time that would otherwise be required. The tracking auto-focus system includes, in part, a microscope Z actuator, an auto-focus sensor, an analog-to-digital converter (ADC), a signal conditioner, a digital proportional integrating and differentiating (PID) controller, and a digital-to-analog converter. The actuator adjusts the distance between the microscope's objective lens and the target and includes, in part, an amplifier, a linear motor, and a linear encoder which provides positional feedback. The auto-focus sensor together with the ADC and signal conditioner continuously monitor and detect the distance between the microscope's objective lens and the target and supply the measured distance to the amplifier. The PID controller together with the DAC stabilizes the distance separating the microscope's objective lens and the target to maintain the best focus.
摘要翻译：跟踪自动对焦系统将保持指向TFT阵列的显微镜连续聚焦，以消除否则将需要的自动对焦时间。跟踪自动对焦系统部分地包括显微镜Z致动器，自动对焦传感器，模数转换器（ADC），信号调节器，数字比例积分和微分（PID）控制器，以及数模转换器。致动器调节显微镜物镜与目标之间的距离，部分包括放大器，线性电机和提供位置反馈的线性编码器。自动对焦传感器与ADC和信号调节器一起连续监测和检测显微镜物镜与目标之间的距离，并将测量距离提供给放大器。 PID控制器与DAC一起稳定了分离显微镜物镜和目标的距离，以保持最佳对焦。

6. 发明申请

WO2004070693A3 METHOD AND APPARATUS FOR OPTICAL INSPECTION OF A DISPLAY 审中-公开
标题翻译：用于光学检查显示器的方法和装置
公开(公告)号：WO2004070693A3
公开(公告)日：2004-11-11
申请号：PCT/US2004003217
申请日：2004-02-03
申请人： PHOTON DYNAMICS INC , SAFAEE-RAD REZA , CRNATOVIC ALEKSANDER , HAWTHORNE JEFFREY , BUKAL BRANKO , LEERENTVELD RAY
发明人： SAFAEE-RAD REZA , CRNATOVIC ALEKSANDER , HAWTHORNE JEFFREY , BUKAL BRANKO , LEERENTVELD RAY
IPC分类号： G01N21/88 , G02F1/13 , G06K9/00 , G06T7/00 , G09G20060101 , H04N17/00 , H04N17/02 , H04N17/04
CPC分类号： G06T7/0004 , G06T2207/30108 , H04N17/02 , H04N17/04
摘要： A method and apparatus for optically inspecting a display employs sub-pixel accuracy for each primary color to take into account angle of rotation (520). The method includes capturing images of a display with R x S sensors, determining sets of sensor coordinates mapping to a pixel (540), determining multiple misalignment angles between the pixel on the display and the R x S sensors, determining multiple x scaling ratios, determining multiple weighting factor associates with RxS sensors in response the corresponding multiple misalignment angle and the corresponding multiple x and y scaling ratios, and inspection the scaled image to identify potential defects of the pixel on the display (580).
摘要翻译：用于光学检查显示器的方法和装置对于每个基色采用子像素精度以考虑旋转角（520）。该方法包括用R x S传感器捕获显示器的图像，确定映射到像素（540）的传感器坐标的集合，确定显示器上的像素与R x S传感器之间的多个不对准角度，确定多个x缩放比例，确定与RxS传感器相关联的多个加权因子，以响应于相应的多重不对准角和相应的多个x和y缩放比，并且检查缩放图像以识别显示器上的像素的潜在缺陷（580）。

7. 发明申请

WO1997026546A1 SUBSTRATE INSPECTION APPARATUS AND METHOD 审中-公开
标题翻译：基板检查装置和方法
公开(公告)号：WO1997026546A1
公开(公告)日：1997-07-24
申请号：PCT/US1997000573
申请日：1997-01-13
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , HAWTHORNE, Jeffrey , SETZER, Joseph
IPC分类号： G01R31/00
CPC分类号： G09G3/006 , G02F1/1309 , G06T7/0004 , G06T2207/30121 , H04N5/66 , H04N17/04 , Y10S345/904
摘要： A method for inspecting a substrate having a plurality of output pixels using an image sensing device having a plurality of input pixels includes the steps of capturing an input image of a plurality of groups of output pixels with a plurality of groups of input pixels (300), each group of input pixels capturing a group of output pixels, each input pixel in a group of input pixels having a position, inhibiting modulation contributions from input pixels in the input image (310), forming a plurality of images from the plurality of groups of input pixels in the input image, each image including input pixels from a similar position in each group of input pixels, detecting defects in each of the plurality of images, and determining defects in subpixels of the substrate in response to the defects detected in each of the plurality of images (340).
摘要翻译：使用具有多个输入像素的图像感测装置检查具有多个输出像素的基板的方法包括以多个输入像素组（300）捕获多组输出像素的输入图像的步骤，每组输入像素捕获一组输出像素，一组输入像素中的每个输入像素具有位置，禁止来自输入图像（310）中的输入像素的调制贡献，从多个组中形成多个图像每个图像包括来自每组输入像素中的相似位置的输入像素，检测多个图像中的每一个中的缺陷，以及响应于每个图像中检测到的缺陷来确定基板的子像素中的缺陷的多个图像（340）。

8. 发明申请

WO1993019453A1 FLAT PANEL DISPLAY INSPECTION SYSTEM 审中-公开
标题翻译：平板显示检测系统
公开(公告)号：WO1993019453A1
公开(公告)日：1993-09-30
申请号：PCT/US1993002060
申请日：1993-03-12
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , CUMMINS, Robert, E. , SCOTT, Daniel, H. , HAWTHORNE, Jeffrey, A.
IPC分类号： G09G03/36
CPC分类号： G09G3/006 , G06F11/2221 , G09G3/20 , G09G3/36 , G09G2320/0233 , G09G2320/0285 , G09G2320/0693
摘要： An improved testing system (10) and method for testing a flat-panel display is disclosed herein. A display (11) is positioned under a high resolution camera (15) for detection of, for example, brightness uniformity across the display (11). Errors in the detected image due to aliasing are avoided in the present invention by incrementally shifting the displayed image relative to the camera (15) and detecting the displayed image at various shifted positions. A resulting accurate display can then be reconstructed by identifying those detector pixels (52) generating a maximum signal. A single image may then be reconstructed using only those detected maximum pixel signals. The reconstructed image will be free of aliasing. The reconstructed image may then be analyzed electronically, and any anomalies in the pixels (50, 70) forming the display panel (11) can then be accurately detected. Anomalies due to uneven brightness across the display (11) can be corrected by programming a memory chip (66) for the particular display panel (11) to permanently compensate the display driver (40) signals for each display pixel (50, 70) to eliminate such anomalies in the display (11). Other tests for viewing angles and chromaticity may also be performed.
摘要翻译：本文公开了一种改进的测试系统（10）和用于测试平板显示器的方法。显示器（11）位于高分辨率相机（15）下方，用于检测例如显示器（11）的亮度均匀性。在本发明中，通过对显示的图像相对于照相机（15）进行递增移位并在各种偏移的位置检测显示的图像，从而避免了由于混叠引起的检测到的图像中的错误。然后可以通过识别生成最大信号的那些检测器像素（52）来重构所得到的精确显示。然后可以仅使用那些检测到的最大像素信号来重构单个图像。重建的图像将没有混叠。然后可以电子地分析重建的图像，然后可以精确地检测到形成显示面板（11）的像素（50,70）中的任何异常。可以通过编程用于特定显示面板（11）的存储芯片（66）来对每个显示像素（50,70）的显示驱动器（40）信号进行永久补偿，从而校正显示器（11）上的亮度不均匀导致的异常，消除显示中的这种异常（11）。也可以进行视角和色度的其它测试。

9. 发明申请

WO1991012534A1 VOLTAGE IMAGING SYSTEM USING ELECTRO-OPTICS 审中-公开
标题翻译：使用电光源的电压成像系统
公开(公告)号：WO1991012534A1
公开(公告)日：1991-08-22
申请号：PCT/US1991000916
申请日：1991-02-08
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , HENLEY, Francois, J.
IPC分类号： G01R19/00
CPC分类号： G01R31/309 , G01R31/308
摘要： A two dimensional image of the voltage distribution across a surface at a large plurality voltage test points of a panel under test (14, 16) is extracted by illuminating the surface with an input beam (24) of optical energy through an electro optic modulator (30, 31) wherein the modulator is disposed to allow longitudinal probing geometries such that a voltage on the surface of the panel under test (14, 16) causes a power modulation in the optical energy which can be observed through an area optical sensor (a camera (48)) for use to directly produce a two-dimensional spatially-dependent power modulation image directly representative of the spatially corresponding voltage state on the surface of the panel under test (14). Surface cross-talk is minimized by placing the face of the modulator (30, 31) closer to the panel under test (14) than the spacing of the voltage sites in the panel under test (14). The device may operate in a pass-through mode or in a reflective mode.
摘要翻译：通过光电调制器（14）的光能的输入光束（24）照射表面，提取在待测试的面板（14,16）的大的多个电压测试点的表面上的表面上的电压分布的二维图像 30,31），其中所述调制器被设置为允许纵向探测几何形状，使得被测试面板（14,16）的表面上的电压导致光能的功率调制，所述光能可以通过区域光学传感器（a 摄像机（48）），用于直接产生直接代表待测试板（14）的表面上的空间对应电压状态的二维空间相关功率调制图像。通过将调制器（30,31）的表面放置在比待测试板（14）处的电压位置的间隔更靠近被测试板（14）的位置来最小化表面串扰。该装置可以以直通模式或反射模式操作。

10. 发明申请

WO2007134300A3 DEPOSITION REPAIR APPARATUS AND METHODS 审中-公开
标题翻译：沉积修复装置和方法
公开(公告)号：WO2007134300A3
公开(公告)日：2008-11-06
申请号：PCT/US2007068902
申请日：2007-05-14
申请人： PHOTON DYNAMICS INC , US NAVY , BIRRELL STEVEN EDWARD , CABLE ALAN , VISSER JOEL , YOUNG LYDIA J , KWAK JUSTIN , ELDRING JOACHIM , BAILEY THOMAS H , PIQUE ALBERTO , AUYEUNG RAYMOND
发明人： BIRRELL STEVEN EDWARD , CABLE ALAN , VISSER JOEL , YOUNG LYDIA J , KWAK JUSTIN , ELDRING JOACHIM , BAILEY THOMAS H , PIQUE ALBERTO , AUYEUNG RAYMOND
IPC分类号： G06K9/00 , F21S4/00 , G02F1/15 , G02F1/153 , H05B39/04
CPC分类号： B23K26/046 , B23K26/048 , B23K26/0613 , B23K26/351 , G02F1/136259
摘要： An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition.
摘要翻译：一种装置包括综合审查，材料去除和材料沉积功能。该装置沿同一光轴执行复查，材料去除和材料沉积操作。该装置部分地包括相机，一对透镜和一个或多个激光器。第一透镜用于将照相机沿着光轴聚焦在形成在目标衬底上的结构上，正在进行审查。如果所检查的结构被识别为需要材料去除，则第一透镜还用于将激光束聚焦在结构上以去除存在于其上的材料。如果将经审查的结构识别为需要材料沉积，则第二透镜用于将激光束聚焦在色带上以将流变化合物从形成在色带中的凹槽转移到结构。

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