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    • 3. 发明申请
    • A TAPE-MANUFACTURING SYSTEM HAVING EXTENDED OPERATIONAL CAPABILITIES
    • 具有扩展运行能力的胶带制造系统
    • WO2005045094A1
    • 2005-05-19
    • PCT/US2004/036667
    • 2004-11-03
    • SUPERPOWER, INC.SELVAMANICKAM, Venkat
    • SELVAMANICKAM, Venkat
    • C23C14/56
    • C23C14/562C23C14/087C23C14/22C23C14/30C23C14/54H01L39/2432
    • A tape-manufacturing system (10) for coating at least one tape substrate (28) such as, for example, for the manufacture of a high-temperature superconductor (HTS) conductor is disclosed. The tape-manufacturing system includes at least two electron beam (e-beam) deposition sources (12), at least one assist source (14) and, optionally, a controller (16). Each e-beam deposition source may be in-process repairable. Each e-beam deposition source (12) is capable of to communicating an evaporant material with at least a portion of at least one tape substrate (28) to deposit a coating thereon. The at least one assist source (14) is capable of communicating a beam of a species to the coating. The controller (16) communicates with the at least two e-beam deposition sources (12) and the at least one assist source (14).
    • 公开了用于涂覆例如用于制造高温超导体(HTS)导体)的至少一个带基板(28)的带制造系统(10)。 磁带制造系统包括至少两个电子束(e-beam)沉积源(12),至少一个辅助源(14)和任选的控制器(16)。 每个电子束沉积源可以在工艺中可修复。 每个电子束沉积源(12)能够将蒸发材料与至少一部分带基材(28)连通以在其上沉积涂层。 所述至少一个辅助源(14)能够将物料束传送到所述涂层。 控制器(16)与至少两个电子束沉积源(12)和至少一个辅助源(14)通信。