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    • 4. 发明申请
    • A SYSTEM FOR PRODUCING PATTERNED SILICON CARBIDE STRUCTURES
    • 用于生产图案的碳化硅结构的系统
    • WO2011068884A2
    • 2011-06-09
    • PCT/US2010/058575
    • 2010-12-01
    • UNIVERSITY OF MASSACHUSETTSTHERRIEN, Joel, M.SCHMIDT, Daniel, F.
    • THERRIEN, Joel, M.SCHMIDT, Daniel, F.
    • G03F7/00G03F7/16
    • G03F7/405B82Y10/00B82Y40/00G03F7/0002G03F7/0047
    • The invention is directed to methods of forming ceramic pattern structures of silicon carbide film. In one method, an electron-beam resist or a photo-resist is deposited onto a substrate. A portion of the resist is selectively removed from the substrate to form a resist pattern on the substrate. A film of pre-ceramic polymer that includes silicon and carbon is deposited onto the substrate and resist pattern and the pre-ceramic polymer film is cured. A portion of the cured pre-ceramic polymer film on the resist pattern is removed, thereby forming a pre-ceramic polymer pattern on the substrate. Finally, the pre-ceramic polymer pattern is converted to a ceramic pattern. In another method, a mold comprising cavities having the shape of a desired structure is prepared and placed against a surface of a substrate on which the desired structure is to be formed. A pre-ceramic polymer is introduced into the mold and then cured, and the mold is removed from the substrate, thereby forming a pre-ceramic polymer pattern on the substrate. Finally, the pre-ceramic polymer pattern is converted to a ceramic pattern.
    • 本发明涉及形成碳化硅膜的陶瓷图案结构的方法。 在一种方法中,将电子束抗蚀剂或光致抗蚀剂沉积到基底上。 抗蚀剂的一部分从衬底选择性地去除以在衬底上形成抗蚀剂图案。 将包含硅和碳的预陶瓷聚合物膜沉积在基底上并且抗蚀图案,并且使预陶瓷聚合物膜固化。 除去抗蚀剂图案上固化的预陶瓷聚合物膜的一部分,从而在基材上形成预陶瓷聚合物图案。 最后,将预陶瓷聚合物图案转变为陶瓷图案。 在另一种方法中,制备包括具有所需结构形状的空腔的模具并将其放置在其上将形成所需结构的基板的表面上。 将预陶瓷聚合物引入模具中然后固化,并且将模具从基材上除去,从而在基材上形成预陶瓷聚合物图案。 最后,将预陶瓷聚合物图案转变为陶瓷图案。