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    • 1. 发明申请
    • DEVICE INCLUDING A CONTACT DETECTOR
    • 包括接触检测器的设备
    • WO2008110174A1
    • 2008-09-18
    • PCT/DK2008/000100
    • 2008-03-12
    • CAPRES A/SPETERSEN, Dirch, HjorthLIN, Rong
    • PETERSEN, Dirch, HjorthLIN, Rong
    • G01R1/067
    • G01R1/06794
    • The present invention relates to a probe for determining an electrical property of an area of a surface of a test sample, the probe is intended to be in a specific orientation relative to the test sample. The probe may comprise a supporting body defining a first surface. A plurality of cantilever arms (12) may extend from the supporting body in co-planar relationship with the first surface. The plurality of cantilever arms (12) may extend substantially parallel to each other and each of the plurality of cantilever arms (12) may include an electrical conductive tip for contacting the area of the test sample by movement of the probe relative to the surface of the test sample into the specific orientation. The probe may further comprise a contact detector (14) extending from the supporting body arranged so as to contact the surface of the test sample prior to any one of the plurality of cantilever arms (12) contacting the surface of the test sample when performing the movement.
    • 本发明涉及一种用于确定测试样品表面区域的电性能的探针,所述探针旨在相对于测试样品处于特定取向。 探针可以包括限定第一表面的支撑体。 多个悬臂(12)可以从支撑体以与第一表面共平面的关系延伸。 多个悬臂(12)可以基本上彼此平行地延伸,并且多个悬臂(12)中的每一个可以包括导电末端,用于通过探针相对于 测试样品进入特定方向。 所述探针还可以包括接触检测器(14),所述接触检测器(14)从所述支撑体延伸,所述接触检测器(14)在所述多个悬臂(12)中的任何一个悬臂臂(12)接触所述测试样品的表面之前布置成接触所述测试样品的表面, 运动。
    • 2. 发明申请
    • SINGLE-POSITION HALL EFFECT MEASUREMENTS
    • 单一位置效应测量
    • WO2012083955A1
    • 2012-06-28
    • PCT/DK2011/000156
    • 2011-12-21
    • CAPRES A/SWEI, FeiPETERSEN, Dirch HjorthHANSEN, Ole
    • WEI, FeiPETERSEN, Dirch HjorthHANSEN, Ole
    • G01N27/04G01R31/26H01L21/66G01R31/28H01L23/544
    • G01B7/14G01R31/2648G01R31/2831H01L22/14H01L22/34
    • A method for determining a distance (Y) between a first position on and an electrical boundary (34) of a test sample by a multi -point probe comprising four contact elements, comprising: contacting the test sample with the four contact elements (20,22,24,26) at the first position, applying a magnetic field at the first position, performing a first and a second four-point measurement and deriving a first and a second resistance value, calculating a first resistance difference from the first and second resistance values, performing a third and a fourth four-point measurement and deriving a third and a fourth resistance value, calculating a second resistance difference from the third and fourth resistance values, defining a first relation including parameters representing the first resistance difference, the second resistance difference, and the distance between the first position and the electrical boundary, determining the distance by using the first and the second resistance differences in the first relation.
    • 一种用于通过包括四个接触元件的多点探针确定测试样品的第一位置和电气边界(34)之间的距离(Y)的方法,包括:使测试样品与四个接触元件(20, 22,24,26),在第一位置施加磁场,执行第一和第二四点测量并导出第一和第二电阻值,从第一和第二位置计算第一电阻差 电阻值,执行第三和第四四点测量并导出第三和第四电阻值,从第三和第四电阻值计算第二电阻差,定义包括表示第一电阻差的参数的第一关系,第二电阻值 电阻差和第一位置与电气边界之间的距离,通过使用第一和第二电阻差确定距离 在第一关系。
    • 3. 发明申请
    • A METHOD OF DETERMINING AN ELECTRICAL PROPERTY OF A TEST SAMPLE
    • 一种测定样品电气性能的方法
    • WO2009030230A1
    • 2009-03-12
    • PCT/DK2008/000315
    • 2008-09-03
    • CAPRES A/SPETERSEN, Dirch, HjorthHANSEN, Ole
    • PETERSEN, Dirch, HjorthHANSEN, Ole
    • G01R31/26H01L21/66
    • H01L22/14G01R31/2648H01L2924/0002H01L2924/00
    • A method of obtaining an electrical property of a test sample, comprising a non-conductive area and a conductive or semi-conductive test area, byperforming multiple measurements using a multi-point probe. The method comprising the steps of providing a magnetic field having field lines passing perpendicularly through the test area, bringing the probe into a first position on the test area, the conductive tips of the probe being in contact with the test area, determining a position for each tip relative to the boundary between the non- conductive area and the test area, determining distances between each tip, selecting one tip to be a current source positioned between conductive tips being used for determining a voltage in the test sample, performing a first measurement, moving the probe and performing a second measurement, calculating on the basis of the first and second measurement the electrical property of the test area.
    • 通过使用多点探针执行多次测量,获得测试样品的电性能的方法,其包括非导电区域和导电或半导体测试区域。 该方法包括以下步骤:提供具有垂直通过测试区域的场线的磁场,使探针进入测试区域的第一位置,探头的导电尖端与测试区域接触,确定位置 每个尖端相对于非导电区域和测试区域之间的边界,确定每个尖端之间的距离,选择位于用于确定测试样品中的电压的导电尖端之间的电流源的一个尖端,执行第一测量 移动探头并执行第二测量,基于第一次和第二次测量来测量测试区域的电性能。