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2. 发明申请

WO1995034927A1 LASER GAS CONTROLLER AND CHARGING-DISCHARGING DEVICE FOR DISCHARGE-EXCITED LASER 审中-公开
标题翻译：用于放电激光的激光气体控制器和充电放电装置
公开(公告)号：WO1995034927A1
公开(公告)日：1995-12-21
申请号：PCT/JP1995001015
申请日：1995-05-26
申请人： KOMATSU LTD. , MIZOGUCHI, Hakaru , NISHISAKA, Toshihiro , KOMORI, Hiroshi
发明人： KOMATSU LTD.
IPC分类号： H01S03/03
CPC分类号： H01S3/036 , H01S3/134
摘要： The main purpose of this invention is to stabilize the output power of a laser. In order to accomplish this purpose, the amount of the laser gas supplied to a laser chamber (4) is controlled while the voltage of a power source (17) is maintained at a fixed value or within a fixed range so that the output power (E) of the laser beam (La) can be a target value when the output power (E) is detected deviating from the target value. The second purpose of this invention is to prevent the drop of the output power (E) by reducing the consumption of preionizing electrode. This purpose is accomplished as follows. A secondary capacitor (C2) is charged with a pulse current discharged from a primary capacitor (C1) and boosted through a pulse transformer (20). When the capacitor (C2) is charged, a magnetic switch (SR) connected to the capacitor (C2) is saturated and conductive, and the current passes through the preionizing electrode (6) connected in series with the switch (SR). When the transfer of electric charge to the capacitor (C2) is completed, a reverse discharge current tends to flow to the capacitor (C2), but the switch (SR) blocks the reverse current and stops the preionizing discharge. Simultaneously, the magnetic core of the transformer (20) is saturated, and transfer of electric charge to a peaking capacitor (C4) from the capacitor (C2) is started. As a result, the voltage across the capacitor (C4) rises to a discharge start voltage, resulting in laser oscillation.
摘要翻译：本发明的主要目的是稳定激光器的输出功率。为了实现这一目的，在电源（17）的电压保持在固定值或固定范围内的同时控制提供给激光室（4）的激光气体的量，使得输出功率当检测到输出功率（E）偏离目标值时，激光束（La）的E）可以是目标值。本发明的第二个目的是通过减少前置电极的消耗来防止输出功率（E）的下降。该目的的实现如下。次级电容器（C2）用从主电容器（C1）放电的脉冲电流充电并通过脉冲变压器（20）升压。当电容器C2被充电时，连接到电容器C2的磁开关饱和并导通，电流通过与开关（SR）串联连接的前置电极（6）。当电容器（C2）的电荷转移完成时，反向放电电流往往流向电容器（C2），而开关（SR）阻止反向电流并停止预放电放电。同时，变压器（20）的磁芯饱和，开始从电容器（C2）向峰值电容器（C4）的转移。结果，电容器（C4）两端的电压上升到放电开始电压，导致激光振荡。

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