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1. 发明申请

WO2012161342A3 METHOD TO LOCALLY INCREASE THE COERCIVITY OF PERMANENT MAGNETS IN A LINEAR MOTOR 审中-公开
标题翻译：线性电机中永久磁铁的定位方法
公开(公告)号：WO2012161342A3
公开(公告)日：2013-11-07
申请号：PCT/JP2012063828
申请日：2012-05-23
申请人： NIPPON KOGAKU KK , MORIMOTO SHIGERU
发明人： MORIMOTO SHIGERU
IPC分类号： H02K41/03 , H01F1/057 , H02K15/03
CPC分类号： H02K15/03 , H01F1/0575 , H01F7/021 , H02K1/02 , H02K41/031 , Y10T29/49009
摘要： Halbach array for a linear motor. In order to avoid irreversible demagnetisation of the NdFeB - permanent magnets at their edge regions caused by reverse fields at high temperature, dysprosium is added into the edge regions (ELB at fig.3c) of each magnet concerned The locations for adding dysprosium are obtained from magnetic field analysis of the motor. Result: Higher coercive force in the edge regions and still high remanence in the centre of these magnets.
摘要翻译：用于线性电机的Halbach阵列为了避免在高温反向场引起的NdFeB永磁体在其边缘区域的不可逆退磁，将镝添加到每个磁体的边缘区域（图3c的ELB）中。添加镝的位置是从电机磁场分析。结果：边缘区域的矫顽力越高，在这些磁体的中心仍然高剩磁。

2. 发明申请

WO2013090123A1 THERMAL PLATE FOR ENVIRONMENT AND TEMPERATURE CONTROL OF MOTORS USED TO MOVE STAGES IN LITHOGRAPHY TOOLS 审中-公开
标题翻译：电动工具用于移动电机的环境温度控制和温度控制
公开(公告)号：WO2013090123A1
公开(公告)日：2013-06-20
申请号：PCT/US2012/068294
申请日：2012-12-06
申请人： NIKON CORPORATION , BINNARD, Michael B. , PHARAND, Michel , MORIMOTO, Shigeru , POON, Alex Ka Tim , COON, Derek , KHO, Leonard Wai Fung , KESWANI, Gaurav
发明人： BINNARD, Michael B. , PHARAND, Michel , MORIMOTO, Shigeru , POON, Alex Ka Tim , COON, Derek , KHO, Leonard Wai Fung , KESWANI, Gaurav
IPC分类号： H02K9/22
CPC分类号： H02K9/22 , G03F7/70758 , G03F7/70858 , H02K41/031
摘要： A lithography tool having a stage for supporting and positioning a substrate, an array configured to move the stage, and a cover plate positioned between the stage and the array. In various embodiments, the array may be either a magnet or coil array. The cover plate acts as a thermal insulator that helps even out temperature variations across the array. Consequently, thermal disturbances to the array or other parts of the lithography tool are reduced, resulting in a minimization of positioning errors. In addition, the cover plate also protects the array and provides a smooth surface in the event of a "crash" of the substrate stage.
摘要翻译：一种光刻工具，具有用于支撑和定位基板的台架，配置成移动台架的阵列以及位于台架和阵列之间的盖板。在各种实施例中，阵列可以是磁体或线圈阵列。盖板用作有助于均匀排列阵列温度变化的绝热材料。因此，光刻工具的阵列或其他部分的热干扰减少，导致定位误差的最小化。此外，盖板还保护阵列，并且在衬底台的“碰撞”的情况下提供光滑的表面。

3. 发明申请

WO2012161342A8 MOTOR, DESIGN METHOD AND MANUFACTURING METHOD OF MOTOR, STAGE DEVICE, AND EXPOSURE APPARATUS 审中-公开
标题翻译：电动机，电动机设计方法及制造方法，舞台装置和曝光装置
公开(公告)号：WO2012161342A8
公开(公告)日：2013-02-14
申请号：PCT/JP2012063828
申请日：2012-05-23
申请人： NIPPON KOGAKU KK , MORIMOTO SHIGERU
发明人： MORIMOTO SHIGERU
CPC分类号： H02K15/03 , H01F1/0575 , H01F7/021 , H02K1/02 , H02K41/031 , Y10T29/49009
摘要： A distribution (ELB) of an element to improve coercivity for each magnet is decided, based on analysis results of magnetic fields within a plurality of magnets (M26 and the like), and by structuring each of the plurality of magnets based on the distribution, it becomes possible to realize a permanent magnet having strong magnetic force and high heat-resisting performance whose residual magnetic flux density and coercivity are both improved, using a small amount of an element which improves coercivity. And, by designing a magnet unit using the permanent magnet, and a motor using the magnet unit, it becomes possible to obtain a motor with high performance.
摘要翻译：基于多个磁体（M26等）中的磁场的分析结果，并且通过基于分布来构造多个磁体中的每一个来确定用于提高每个磁体的矫顽力的元件的分布（ELB）可以使用少量改善矫顽力的元件来实现具有强磁力和高耐热性能的永磁体，其残余磁通密度和矫顽力都得到改善。并且，通过设计使用永磁体的磁体单元和使用磁体单元的电动机，可以获得高性能的电动机。

4. 发明申请

WO2007064026A1 TRANSMISSION CIRCUIT AND COMMUNICATION APPARATUS EMPLOYING THE SAME 审中-公开
标题翻译：传输电路和通讯设备
公开(公告)号：WO2007064026A1
公开(公告)日：2007-06-07
申请号：PCT/JP2006/324388
申请日：2006-11-29
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. , MATSUURA, Toru , MORIMOTO, Shigeru
发明人： MATSUURA, Toru , MORIMOTO, Shigeru
IPC分类号： H04L27/36 , H04L27/20
CPC分类号： H04L27/366 , H04L27/361
摘要： A transmission circuit is provided which can output a stable transmission signal independently of the temperature characteristics of an amplitude modulating section (15). A signal generating section (11) generates an amplitude signal and a phase signal. A regulator (12) supplies a voltage which is controlled, depending on the amplitude signal, to the amplitude modulating section (15). An angle modulating section (13) subjects the phase signal to angle modulation to output an angle-modulated signal. A temperature detecting section (17) outputs temperature information of the amplitude modulating section (15). A gain control section (18) controls a gain of a variable gain amplifier (14) based on the temperature information of the amplitude modulating section (15). The variable gain amplifier (14) amplifies the angle-modulated signal using the gain controlled by the gain control section (18). The amplitude modulating section (15) subjects the angle-modulated signal to amplitude modulation using a voltage which is controlled, depending on the amplitude signal, to output an amplitude-modulated signal.
摘要翻译：提供一种传输电路，其能够独立于幅度调制部分（15）的温度特性输出稳定的传输信号。信号生成部（11）生成振幅信号和相位信号。调节器（12）将根据振幅信号被控制的电压提供给幅度调制部分（15）。角度调制部（13）使相位信号进行角度调制以输出角度调制信号。温度检测部（17）输出振幅调制部（15）的温度信息。增益控制部（18）根据振幅调制部（15）的温度信息来控制可变增益放大器（14）的增益。可变增益放大器（14）使用由增益控制部（18）控制的增益来放大角度调制信号。振幅调制部（15）根据振幅信号，使用被控制的电压对角度调制信号进行幅度调制，输出幅度调制信号。

5. 发明申请

WO2012161342A2 MOTOR, DESIGN METHOD AND MANUFACTURING METHOD OF MOTOR, STAGE DEVICE, AND EXPOSURE APPARATUS 审中-公开
标题翻译：电动机，电动机设计方法及制造方法，舞台装置和曝光装置
公开(公告)号：WO2012161342A2
公开(公告)日：2012-11-29
申请号：PCT/JP2012/063828
申请日：2012-05-23
申请人： NIKON CORPORATION , MORIMOTO, Shigeru
发明人： MORIMOTO, Shigeru
CPC分类号： H02K15/03 , H01F1/0575 , H01F7/021 , H02K1/02 , H02K41/031 , Y10T29/49009
摘要： A distribution (E?LB#191) of an element to improve coercivity for each magnet is decided, based on analysis results of magnetic fields within a plurality of magnets (M?26#191 and the like), and by structuring each of the plurality of magnets based on the distribution, it becomes possible to realize a permanent magnet having strong magnetic force and high heat-resisting performance whose residual magnetic flux density and coercivity are both improved, using a small amount of an element which improves coercivity. And, by designing a magnet unit using the permanent magnet, and a motor using the magnet unit, it becomes possible to obtain a motor with high performance.
摘要翻译：基于多个磁体（M≥26＃191等）内的磁场的分析结果，决定各磁体的矫顽力提高元件的分布（E？LB＃191），并且基于分布的多个磁体，可以使用少量改善矫顽力的元件来实现具有强磁力和高耐热性的永磁体，其残余磁通密度和矫顽力都得到改善。并且，通过设计使用永磁体的磁体单元和使用磁体单元的电动机，可以获得高性能的电动机。

6. 发明申请

WO2006118317A1 POLAR MODULATION TRANSMITTER CIRCUIT AND COMMUNICATIONS DEVICE 审中-公开
标题翻译：极性调制发射机电路和通信设备
公开(公告)号：WO2006118317A1
公开(公告)日：2006-11-09
申请号：PCT/JP2006/309196
申请日：2006-04-26
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. , MATSUURA, Toru , MORIMOTO, Shigeru
发明人： MATSUURA, Toru , MORIMOTO, Shigeru
IPC分类号： H04L27/36
CPC分类号： H03F1/3241 , H03F1/02 , H03F1/0205 , H03F3/191 , H03F3/24 , H03F2200/331 , H03G3/004 , H04L27/361 , H04L27/368
摘要： Provided is a transmitter circuit capable of operating with low distortion and high efficiency even in a modulation method using wide modulation bandwidth. In the transmitter circuit, a signal generation section (11) generates an amplitude signal and an angle-modulated signal. Based on a predetermined characteristic, a compensating filter (12) wave-shaping-processes the amplitude signal. A regulator (14) outputs a signal in accordance with a magnitude of the signal which has been wave-shaping-processed by the compensating filter (12). An amplitude modulator section (15) amplitude-modulates the angle-modulated signal by using the signal outputted from the regulator (14). A characteristic of the compensating filter (12) is an inverse of a transfer characteristic between an input at the regulator (14) and an output at the amplitude modulator section (15).
摘要翻译：提供了即使在使用宽调制带宽的调制方法中也能够以低失真和高效率工作的发送器电路。在发送电路中，信号生成部（11）生成振幅信号和角度调制信号。基于预定特性，波形整形处理振幅信号的补偿滤波器（12）。调节器（14）根据由补偿滤波器（12）进行波形整形处理的信号的大小输出信号。振幅调制器部分（15）通过使用从调节器（14）输出的信号来对角度调制信号进行幅度调制。补偿滤波器（12）的特性是调节器（14）的输入端与幅度调制器部分（15）的输出端之间的传输特性的逆。

7. 发明申请

WO2006073208A1 POLAR MODULATOR AND WIRELESS COMMUNICATION APPARATUS USING THE SAME 审中-公开
标题翻译：使用相同的极性调制器和无线通信装置
公开(公告)号：WO2006073208A1
公开(公告)日：2006-07-13
申请号：PCT/JP2006/300322
申请日：2006-01-06
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. , MORIMOTO, Shigeru , MATSUURA, Toru , ADACHI, Hisashi
发明人： MORIMOTO, Shigeru , MATSUURA, Toru , ADACHI, Hisashi
IPC分类号： H04L27/36
CPC分类号： H04L27/361 , H03C5/00 , H04L27/2623 , H04L27/367
摘要： A phase modulation section (101) generates a first modulated signal including phase information. An amplitude signal control section (103) generates a second modulated signal including amplitude information. A waveform shaping section (104), when an amplitude of the second modulated signal is larger than a regulated value, generates a waveform-shaped modulated signal. An amplitude modulated voltage supply section (105) amplifies the waveform-shaped modulated signal based on the supply voltage from a voltage control section (106) and supplies the amplified signal to a power amplification section (102). The power amplification section (102) amplifies the first modulated signal based on the amplitude modulated voltage, and outputs the resultant signal. The waveform shaping section (104) adjusts the regulated value in accordance with a factor for changing a distorted power generated by the power amplification section (102), such that an ACP generated by the power amplification section (102) becomes a first predetermined value or smaller.
摘要翻译：相位调制部（101）生成包含相位信息的第一调制信号。振幅信号控制部（103）生成包含振幅信息的第二调制信号。当第二调制信号的振幅大于调节值时，波形整形部（104）产生波形调制信号。振幅调制电压供给部（105）根据来自电压控制部（106）的电源电压对波形调制信号进行放大，并将放大后的信号供给功率放大部（102）。功率放大部（102）根据振幅调制电压对第一调制信号进行放大，输出合成信号。波形整形部（104）根据用于改变由功率放大部（102）产生的失真的功率的因子调整调节值，使得由功率放大部（102）生成的ACP变为第一预定值，或小。

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