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1. 发明申请

WO2011049427A1 METHOD OF FABRICATING INTEGRATED REFERENCE ELECTRODE 审中-公开
标题翻译：制备集成参考电极的方法
公开(公告)号：WO2011049427A1
公开(公告)日：2011-04-28
申请号：PCT/MY2009/000189
申请日：2009-11-11
申请人： MIMOS BERHAD , LEE, Hing, Wah , MOHD, Ismahadi, Syono
发明人： LEE, Hing, Wah , MOHD, Ismahadi, Syono
IPC分类号： G01N27/30 , H01L21/28 , G01N27/26
CPC分类号： G01N27/301
摘要： The proposed invention proposes an improved method of fabricating reference electrode. Part of the reference electrode is fabricated, comprising: patterning and etching a first side of a glass wafer (20) to create a pair of cavities (22); characterized in that; patterning and etching a side of glass wafer to create a channel (24) to link the cavities; and depositing a layer of glass frit (26) on the second side of the glass wafer. The novelty of the invention lays in the channel (24) between two cavities and a layer of grass frit (26) the cavities. The glass frit used is preferably a relatively high porosity glass frit. Hence, an integrated reference electrode is characterized in that; the wafer is shaped to form a channel (24) that connects both cavities and a membrane of glass frit (26A) is placed between the test solution cavity and the channel.
摘要翻译：所提出的发明提出了一种制造参比电极的改进方法。制造参考电极的一部分，包括：图案化和蚀刻玻璃晶片（20）的第一侧以形成一对空腔（22）; 其特征在于：图案化和蚀刻玻璃晶片的一侧以形成连接空腔的通道（24）; 以及在玻璃晶片的第二侧上沉积一层玻璃料（26）。本发明的新颖性在于两个空腔之间的通道（24）和一层草料（26）的空腔。所使用的玻璃料优选为较高孔隙率的玻璃料。因此，集成参考电极的特征在于：晶片被成形为形成连接两个空腔的通道（24），并且将玻璃料（26A）的膜放置在测试溶液腔和通道之间。

2. 发明申请

WO2012050420A1 MULTILAYER MICROFLUIDIC FILTER AND THE METHOD OF FABRICATING THEREOF 审中-公开
标题翻译：多层微流控滤波器及其制造方法
公开(公告)号：WO2012050420A1
公开(公告)日：2012-04-19
申请号：PCT/MY2010/000274
申请日：2010-11-12
申请人： MIMOS BHD. , DANIEL, Bien, Chia, Sheng , LEE, Hing, Wah , MOHD, Ismahadi, Syono , ALI, Zaini, Abdullah , MOHD, Rofei, Mat, Hussin
发明人： DANIEL, Bien, Chia, Sheng , LEE, Hing, Wah , MOHD, Ismahadi, Syono , ALI, Zaini, Abdullah , MOHD, Rofei, Mat, Hussin
IPC分类号： B01D35/00 , B01D46/00
CPC分类号： B01L3/502753 , B01D2275/10 , B01L3/502715 , B01L2200/027 , B01L2200/141 , B01L2300/0681
摘要： A multilayer microfluidic filter (100) for filtering unwanted particles in sample molecules or fluid, comprising a substrate (110), such as a silicon wafer having a layer of boron (120) doped on the uppermost portion of said substrate (110), a plurality of funnel-shaped pores (130), each randomly disposed on the substrate (110) with different arrangement of sizes and positions, an adhesive layer (140), such as an adhesion, resist, or wax coated onto the sidewall of each of the plurality of pores (130), and additional layer of thin film (150) coated onto the bottom surface of the substrate (110) to improve the filtering capability.
摘要翻译：一种用于过滤样品分子或流体中的不需要的颗粒的多层微流体过滤器（100），包括衬底（110），例如具有掺杂在所述衬底（110）的最上部分上的硼（120）层的硅晶片，多个漏斗形孔（130），每个随机地设置在基板（110）上，具有不同尺寸和位置的布置;粘合层（140），例如涂覆在每个的侧壁上的粘合层，抗蚀剂或蜡多个孔（130）和涂覆在基底（110）的底表面上的附加层薄膜（150）以提高过滤能力。

3. 发明申请

WO2013028058A1 APPARATUS FOR SORTING PARTICLES BY DIELECTROPHORESIS 审中-公开
标题翻译：用于通过电化学分离颗粒的装置
公开(公告)号：WO2013028058A1
公开(公告)日：2013-02-28
申请号：PCT/MY2012/000168
申请日：2012-06-29
申请人： MIMOS BERHAD , LEE, Hing Wah , MOHD, Ismahadi Syono , AZHAR, Bin Sulaiman
发明人： LEE, Hing Wah , MOHD, Ismahadi Syono , AZHAR, Bin Sulaiman
IPC分类号： B03C5/02
CPC分类号： B03C5/026 , B03C2201/26
摘要： The present invention relates to an apparatus for sorting particles by dielectrophoresis. The apparatus comprises of a primary microchannel (110), at least one side microchannel (120), and at least three electrically coupled electrodes (131, 132, 133). The electrodes (131, 132, 133) are arranged in the primary microchannel (110) and are positioned near the proximal end of the side microchannel (120). A first electrode (131) is a planar electrode forming a part of the bottom inner surface of the primary microchannel (110). A second electrode (132) is a planar electrode forming a part of the top inner surface of the primary microchannel (110). A third electrode (133) is a comb-like electrode suspended in the middle of the primary microchannel (110) and planarly inclined towards the side microchannel (120).
摘要翻译：本发明涉及一种通过介电电泳分选颗粒的装置。该装置包括初级微通道（110），至少一个侧面微通道（120）和至少三个电耦合电极（131,132,133）。电极（131,132,133）布置在初级微通道（110）中并且位于侧面微通道（120）的近端附近。第一电极（131）是形成初级微通道（110）的底部内表面的一部分的平面电极。第二电极（132）是形成初级微通道（110）的顶部内表面的一部分的平面电极。第三电极（133）是悬挂在初级微通道（110）的中间并朝向侧面微通道（120）平面倾斜的梳状电极。

4. 发明申请

WO2012078025A1 A METHOD OF FABRICATING A SEMICONDUCTOR DEVICE 审中-公开
标题翻译：一种制造半导体器件的方法
公开(公告)号：WO2012078025A1
公开(公告)日：2012-06-14
申请号：PCT/MY2011/000112
申请日：2011-06-20
申请人： MIMOS BERHAD , LEE, Hing, Wah , DANIEL, Bien, Chia, Sheng , MOHD, Ismahadi, Syono , ROZINA, Binti, Abdul, Rani
发明人： LEE, Hing, Wah , DANIEL, Bien, Chia, Sheng , MOHD, Ismahadi, Syono , ROZINA, Binti, Abdul, Rani
IPC分类号： H01L21/20 , H01L21/311
CPC分类号： H01L21/0272 , B81C1/00373
摘要： The present invention relates to a method for fabricating a semiconductor device using a lift-off method. The method comprises the steps of depositing and patterning a sacrificial layer (22) onto a substrate (21), wherein at least one portion of the substrate surface (21a) is covered by the sacrificial layer (22) and at least one portion of the substrate surface (21b) is exposed; depositing and patterning a chemical resist (23) onto the sacrificial layer (22) and the exposed substrate surface (21b); removing the sacrificial layer (22); depositing a semiconductor film (24) onto the substrate (21) and the chemical resist (23); and removing the chemical resist (23) and the semiconductor film (24) deposited on the chemical resist (23).
摘要翻译：本发明涉及使用剥离方法制造半导体器件的方法。该方法包括以下步骤：将牺牲层（22）沉积并图案化到衬底（21）上，其中衬底表面（21a）的至少一部分被牺牲层（22）覆盖，并且至少一部分衬底表面（21b）暴露; 在所述牺牲层（22）和所述暴露的基板表面（21b）上沉积和图案化化学抗蚀剂（23）; 去除牺牲层（22）; 在衬底（21）和化学抗蚀剂（23）上沉积半导体膜（24）; 并除去沉积在化学抗蚀剂（23）上的化学抗蚀剂（23）和半导体膜（24）。

5. 发明申请

WO2012005566A1 APPARATUS FOR ISFET GATE CHARACTERIZATION 审中-公开
标题翻译：用于ISFET栅极特性的装置
公开(公告)号：WO2012005566A1
公开(公告)日：2012-01-12
申请号：PCT/MY2011/000062
申请日：2011-06-02
申请人： MIMOS BERHAD , ALI, Zaini Abdullah , ROZINA, Abdul, Rani , MOHD, Ismahadi, Syono
发明人： ALI, Zaini Abdullah , ROZINA, Abdul, Rani , MOHD, Ismahadi, Syono
IPC分类号： G01N27/414
CPC分类号： G01N27/414
摘要： The present invention provides an apparatus [18] capable of characterizing the ISFET membrane at an earlier stage of ISFET manufacturing process flow and thereby providing an improved ion concentration sensitivity of ISFET. A solution storage part [20] with an opening [21], said opening is to be in contact with ISFET membrane. Two electrodes [22, 24] are dipped into the solution storage part [20]. A capacitor is connected in series with one of the electrode. A capacitance-voltage characteristic between the electrodes in contact with the solution of known pH and another electrode at the back surface of the semiconductor is monitored. The shift of the capacitance-voltage characteristic is represented in voltage-pH graph and thereby sensitivity of ISFET is determined.
摘要翻译：本发明提供了一种能够在ISFET制造工艺流程的较早阶段表征ISFET膜并因此提供ISFET的改进的离子浓度灵敏度的装置[18]。具有开口[21]的溶液存储部分[20]，所述开口与ISFET膜接触。将两个电极[22,24]浸入溶液储存部分[20]中。电容器与电极之一串联连接。监测与已知pH溶液接触的电极与半导体后表面的另一电极之间的电容 - 电压特性。在电压 - pH图中表示电容 - 电压特性的偏移，从而确定ISFET的灵敏度。

6. 发明申请

WO2013015671A1 A PIEZORESISTIVE ACCELEROMETER 审中-公开
标题翻译： PIEZORESISTIVE ACCELEROMETER
公开(公告)号：WO2013015671A1
公开(公告)日：2013-01-31
申请号：PCT/MY2012/000140
申请日：2012-06-21
申请人： MIMOS BERHAD , AZHAR, Sulaiman , MOHD, Ismahadi, Syono
发明人： AZHAR, Sulaiman , MOHD, Ismahadi, Syono
IPC分类号： G01P15/08 , G01P15/12 , B81C1/00
CPC分类号： G01P15/123 , G01P15/0802
摘要： Disclosed is a force-balanced piezoresistive 3-axis accelerometer. An exemplary accelerometer (100) comprises a proof mass (104) which is coupled to a plurality of meanders (103), which further couple to a plurality of anchor pads (102) that extends out from each meander (103). The proof mass (104), meanders (103) and anchor pads (102) are integrally fabricated multilayer construct which comprises a base silicon layer (201), insulator 1 (202), insulator 2 (204), metal 1 (203) and metal 2 (205) arranged in an intermittent fashion and fabricated through CMOS compatible fabrication process. Piezoresistive sensing means is used in detecting acceleration in three degree of freedoms or directions in which piezoresistors (206) embedded within the multilayer construct are used to sense the movement of proof mass (104) and meanders (103) upon external force which exerted on the proof mass (104). Electrical signals upon the sensing are then generated and processed by electrical circuitry to provide DC biasing on respective anchor pads (102) to produce x-, y- and z-direction acceleration data in terms of magnitude and direction. The accelerometer is also designed with self- test capability in which the meanders (103) perform self-test by bending at least one meander while keeping other meanders stationary and measuring z-displacement. The resulting accelerometer has the potential for low power consumption due to DC biasing, low cost and high-accuracy operation over wide temperature range due to additional Wheatstone bridge circuit embedded within the multilayer construct.
摘要翻译：公开了一种力平衡压阻式3轴加速度计。示例性加速度计（100）包括耦合到多个蜿蜒（103）的检验质量块（104），其进一步耦合到从每个蜿蜒（103）延伸出的多个锚定垫（102）。检测质量（104），蜿蜒（103）和锚固垫（102）是整体制造的多层结构，其包括基底硅层（201），绝缘体1（202），绝缘体2（204），金属1（203）和金属2（205）以间歇方式布置并通过CMOS兼容的制造工艺制造。压阻感测装置用于检测三个自由度或方向上的加速度，其中嵌入多层结构体内的压电电阻器（206）用于在外力作用下感测证明质量块（104）和曲折（103）的运动，（104）。然后，由感应电路产生并处理感测后的电信号，以在相应的锚定垫（102）上提供直流偏置，从而在幅度和方向上产生x，y和z方向的加速度数据。加速度计还设计有自检能力，其中蜿蜒（103）通过弯曲至少一个曲折进行自我测试，同时保持其他蜿蜒静止并测量z-位移。由于直流偏置，低成本和宽温度范围内的高精度工作，所产生的加速度计具有低功耗的潜力，这是由于嵌入多层结构内的另外的惠斯通电桥电路。

7. 发明申请

WO2011122932A1 PLANAR MICROPUMP WITH INTEGRATED PASSIVE MICROMIXERS 审中-公开
标题翻译：具有集成无源微处理器的平面麦克风
公开(公告)号：WO2011122932A1
公开(公告)日：2011-10-06
申请号：PCT/MY2010/000253
申请日：2010-11-08
申请人： MIMOS BERHAD , LEE, Hing, Wah , DANIEL, Bien, Chia, Sheng , MOHD., Ismahadi, Syono , MUHD., Ramdzan, Buyong
发明人： LEE, Hing, Wah , DANIEL, Bien, Chia, Sheng , MOHD., Ismahadi, Syono , MUHD., Ramdzan, Buyong
IPC分类号： B01F5/12 , B01F15/02 , F04B43/00 , B81B7/00
CPC分类号： B01F13/0059 , B01F5/12 , F04B13/02 , F04B43/043
摘要： The present invention relates generally to a planar micropump with integrated passive micromixers (10) which enhances the mixing of two or more differing fluids thereby allowing an efficient and effective mixing action to be achieved thereby resulting in a more homogeneous mixture for a reliable chemical analysis.
摘要翻译：本发明一般涉及具有集成的无源微混合器（10）的平面微型泵，其增强了两种或更多种不同流体的混合，从而实现有效和有效的混合作用，从而得到更均匀的混合物用于可靠的化学分析。

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