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1. 发明申请

WO2006019565B1 METHOD AND SYSTEM FOR COATING INTERNAL SURFACES OF PREFABRICATED PROCESS PIPING IN THE FIELD 审中-公开
标题翻译：涂覆现场预制过程管道内表面的方法和系统
公开(公告)号：WO2006019565B1
公开(公告)日：2007-07-12
申请号：PCT/US2005023906
申请日：2005-07-06
申请人： SUB ONE TECHNOLOGY INC , BOARDMAN WILLIAM JOHN , TUDHOPE ANDREW WILLIAM , MERCADO RAUL DONATE
发明人： BOARDMAN WILLIAM JOHN , TUDHOPE ANDREW WILLIAM , MERCADO RAUL DONATE
IPC分类号： C23C16/00 , C23C14/34
CPC分类号： C23C16/045 , C23C16/26 , C23C16/4401 , C23C16/503 , C23C16/505
摘要： The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage (20 and 47) such that the workpiece functions as a cathode and by connecting an anode (22 and 24) at each opening of the workpiece. A source gas (16 and 18) is introduced at an entrance opening, while a vacuum source (32) is connected at an exit opening. Pressure within the workpiece is monitored (34) and the resulting pressure information is used for maintaining a condition that exhibits the hollow cathode effect. Optionally, a pre-cleaning (52) may be provided by introducing a hydrocarbon mixture and applying a negative bias to the workpiece, so as to sputter contaminants from the workpiece using argon gas (16). Argon gas may also be introduced during the coating processing to re-sputter the coating, thereby improving uniformity along the length of the workpiece. The coating may be a diamond-like carbon material having properties which are determined by controlling ion bombardment energy.
摘要翻译：工件内表面的涂层是通过连接一个偏置电压（20和47）来实现的，以使工件起到阴极的作用，并在工件的每个开口处连接一个阳极（22和24）。源气体（16和18）在入口处引入，而真空源（32）在出口处连接。监测工件内部的压力（34），并将所得到的压力信息用于维持表现空心阴极效应的条件。任选地，可通过引入碳氢化合物混合物并向工件施加负偏压来提供预清洁（52），以使用氩气（16）从工件溅射污染物。氩气也可以在涂层处理过程中引入以重新溅射涂层，从而改善沿着工件长度的均匀性。该涂层可以是具有通过控制离子轰击能量确定的特性的类金刚石碳材料。

2. 发明申请

WO2005116291B1 APPARATUS FOR DIRECTING PLASMA FLOW TO COAT INTERNAL PASSAGEWAYS 审中-公开
标题翻译：用于引导等离子体流向涂层内部通道的装置
公开(公告)号：WO2005116291B1
公开(公告)日：2007-02-22
申请号：PCT/US2005013619
申请日：2005-04-21
申请人： SUB ONE TECHNOLOGY INC , BOARDMAN WILLIAM JOHN , MERCADO RAUL DONATE , TUDHOPE ANDREW WILLIAM
发明人： BOARDMAN WILLIAM JOHN , MERCADO RAUL DONATE , TUDHOPE ANDREW WILLIAM
IPC分类号： C23C14/04 , C23C14/00 , C23C14/32 , C23C14/34 , C23C14/35 , C23C14/36 , C23C14/44 , C23C14/50 , C23C16/00 , C23C16/04 , C23C16/452 , C23C16/455 , C23C16/458 , C23C16/50 , C23C16/511 , C23C16/517
CPC分类号： C23C14/325 , C23C14/046 , C23C14/50 , H01J37/32357
摘要： An apparatus (10) for coating surfaces of a workpiece (40, 120 and 142) is configured to establish a pressure gradient within internal passageways (44, 46 and 48) through the workpiece, so that the coating within the internal passageways exhibits intended characteristics, such as those relating to smoothness or hardness. The coating apparatus may include any or all of a number of cooperative systems, including a plasma generation system (12), a manipulable workpiece support system (34, 90 and 122), an ionization excitation system (66 and 116) configured to increase ionization within or around the workpiece, a biasing system (52) for applying a selected voltage pattern to the workpiece, and a two-chamber system (96 and 98) that enables the plasma generation to take place at a first selected pressure and the deposition to occur at a second selected pressure.
摘要翻译：用于涂覆工件（40,120和142）的表面的设备（10）被配置成在穿过工件的内部通路（44,46和48）内建立压力梯度，使得内部通路内的涂层表现出预期的特性如与光滑度或硬度有关的那些。涂覆设备可以包括许多协作系统中的任何一个或全部，包括等离子体发生系统（12），可操纵工件支撑系统（34,90和122），配置成增加电离的电离激发系统（66和116）在工件的内部或周围设置用于将选定的电压图案施加到工件上的偏压系统（52）以及使得等离子体生成能够在第一选定压力下发生并且沉积到工件的双室系统（96和98）发生在第二选定压力下。

3. 发明申请

WO2006096659A3 METHOD AND SYSTEM FOR COATING SECTIONS OF INTERNAL SURFACES 审中-公开
公开(公告)号：WO2006096659A3
公开(公告)日：2006-09-14
申请号：PCT/US2006/007978
申请日：2006-03-06
申请人： SUB-ONE TECHNOLOGY, INC. , TUDHOPE, Andrew, William , BOARDMAN, William, John , MERCADO, Raul, Donate , CONTRERAS, Frederick
发明人： TUDHOPE, Andrew, William , BOARDMAN, William, John , MERCADO, Raul, Donate , CONTRERAS, Frederick
IPC分类号： C23C16/04 , B05D7/22 , F16L55/00 , F16L58/00
摘要： A method and system for coating the internal surfaces of a localized area or section of a workpiece (10) is presented. Conductive structures (12 and 14) are inserted into one or more openings of a workpiece to define the section to be coated. In some embodiments, a bias voltage (32) is connected to a workpiece section, which functions as a cathode. A gas source (18) and vacuum source (22) are coupled to each conductive structure through a flow control system (48 and 50). The flow control system enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust. Only the section encompassed by the conductive structures is coated. When the coating process is completed, a means for varying the conductive structures along the length is utilized to move onto the next section to be coated.

4. 发明申请

WO2006019565A2 METHOD AND SYSTEM FOR COATING INTERNAL SURFACES OF PREFABRICATED PROCESS PIPING IN THE FIELD 审中-公开
标题翻译：用于涂装现场预制工艺管道内部表面的方法和系统
公开(公告)号：WO2006019565A2
公开(公告)日：2006-02-23
申请号：PCT/US2005/023906
申请日：2005-07-06
申请人： SUB-ONE TECHNOLOGY, INC. , BOARDMAN, William, John , TUDHOPE, Andrew, William , MERCADO, Raul, Donate
发明人： BOARDMAN, William, John , TUDHOPE, Andrew, William , MERCADO, Raul, Donate
IPC分类号： C23C14/32 , C23C14/00
CPC分类号： C23C16/045 , C23C16/26 , C23C16/4401 , C23C16/503 , C23C16/505
摘要： The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage (20 and 47) such that the workpiece functions as a cathode and by connecting an anode (22 and 24) at each opening of the workpiece. A source gas (16 and 18) is introduced at an entrance opening, while a vacuum source (32) is connected at an exit opening. Pressure within the workpiece is monitored (34) and the resulting pressure information is used for maintaining a condition that exhibits the hollow cathode effect. Optionally, a pre-cleaning (52) may be provided by introducing a hydrocarbon mixture and applying a negative bias to the workpiece, so as to sputter contaminants from the workpiece using argon gas (16). Argon gas may also be introduced during the coating processing to re-sputter the coating, thereby improving uniformity along the length of the workpiece. The coating may be a diamond-like carbon material having properties which are determined by controlling ion bombardment energy.
摘要翻译：通过连接偏置电压（20和47）使得工件用作阴极并且通过在工件的每个开口处连接阳极（22和24）来实现工件的内表面的涂层。源气体（16和18）在入口处被引入，而真空源（32）在出口处连接。监测工件内的压力（34），并将所得的压力信息用于保持呈现空心阴极效应的状态。可选地，可以通过引入烃混合物并向工件施加负偏压来提供预清洁（52），以便使用氩气（16）从工件溅射污染物。也可以在涂覆处理期间引入氩气以重新溅射涂层，从而提高沿工件长度的均匀性。涂层可以是具有通过控制离子轰击能确定的性质的类金刚石碳材料。

5. 发明申请

WO2005116291A2 APPARATUS FOR DIRECTING PLASMA FLOW TO COAT INTERNAL PASSAGEWAYS 审中-公开
标题翻译：用于指导等离子体流到外套内窥镜的装置
公开(公告)号：WO2005116291A2
公开(公告)日：2005-12-08
申请号：PCT/US2005/013619
申请日：2005-04-21
申请人： SUB-ONE TECHNOLOGY, INC. , BOARDMAN, William, John , MERCADO, Raul, Donate , TUDHOPE, Andrew, William
发明人： BOARDMAN, William, John , MERCADO, Raul, Donate , TUDHOPE, Andrew, William
IPC分类号： C23C16/00
CPC分类号： C23C14/325 , C23C14/046 , C23C14/50 , H01J37/32357
摘要： An apparatus (10) for coating surfaces of a workpiece (40, 120 and 142) is configured to establish a pressure gradient within internal passageways (44, 46 and 48) through the workpiece, so that the coating within the internal passageways exhibits intended characteristics, such as those relating to smoothness or hardness. The coating apparatus may include any or all of a number of cooperative systems, including a plasma generation system (12), a manipulable workpiece support system (34, 90 and 122), an ionization excitation system (66 and 116) configured to increase ionization within or around the workpiece, a biasing system (52) for applying a selected voltage pattern to the workpiece, and a two-chamber system (96 and 98) that enables the plasma generation to take place at a first selected pressure and the deposition to occur at a second selected pressure.
摘要翻译：用于涂覆工件（40,120和142）的表面的装置（10）被构造成在通过工件的内部通道（44,46和48）内建立压力梯度，使得内部通道内的涂层具有预期的特性，例如与平滑度或硬度相关的那些。涂覆装置可以包括多个协作系统中的任何一个或全部，包括等离子体产生系统（12），可操纵的工件支撑系统（34,90和122），电离激发系统（66和116）在工件内或周围，用于将所选择的电压图案施加到工件的偏压系统（52）以及使得能够在第一选定压力下进行等离子体产生的二室系统（96和98）发生在第二选定的压力下。

6. 发明申请

WO2008011552A3 SYSTEM AND METHOD FOR TREATING SURFACES OF COMPONENTS 审中-公开
公开(公告)号：WO2008011552A3
公开(公告)日：2008-01-24
申请号：PCT/US2007/073952
申请日：2007-07-20
申请人： SUB-ONE TECHNOLOGY, INC. , BOARDMAN, William John , TUDHOPE, Andrew William , MERCADO, Raul Donate , CASSERLY, Thomas Bryan , CONTRERAS, Frederick
发明人： BOARDMAN, William John , TUDHOPE, Andrew William , MERCADO, Raul Donate , CASSERLY, Thomas Bryan , CONTRERAS, Frederick
IPC分类号： B05B5/025
摘要： A system (10) for coating surfaces of a workpiece (12) comprises a biasing system (242) for connection to said workpiece (12) and an anode (76) such as to negatively bias the workpiece relative to the anode and a vacuum source (42, 44) for evacuating an interior of the workpiece (12). A gas supply (224, 226, 228) is employed for introducing a gas containing a treatment material to said workpiece and a control system (244) controls the biasing system (242), the vacuum source (42, 44) and the gas supply (224, 226, 228) so as to establish a hollow cathode effect within the workpiece (12). A pair of coupling heads (16, 18) are supported on articulated arms (22, 24, 26) movable in one or more of three axes and include removable shields (78) to protect the heads (16, 18) and an anode mount (74) for receiving an anode (76). The articulated arms allow the system to accommodate a plurality of different shaped and different sized workpieces while the shields protect the coupling heads during a deposition process.

7. 发明申请

WO2008011552A2 SYSTEM AND METHOD FOR TREATING SURFACES OF COMPONENTS 审中-公开
标题翻译：用于处理组件表面的系统和方法
公开(公告)号：WO2008011552A2
公开(公告)日：2008-01-24
申请号：PCT/US2007073952
申请日：2007-07-20
申请人： SUB ONE TECHNOLOGY INC , BOARDMAN WILLIAM JOHN , TUDHOPE ANDREW WILLIAM , MERCADO RAUL DONATE , CASSERLY THOMAS BRYAN , CONTRERAS FREDERICK
发明人： BOARDMAN WILLIAM JOHN , TUDHOPE ANDREW WILLIAM , MERCADO RAUL DONATE , CASSERLY THOMAS BRYAN , CONTRERAS FREDERICK
IPC分类号： B23K9/00
CPC分类号： C23C8/36 , C23C16/045 , H01J37/32495 , H01J37/32706
摘要： A system (10) for coating surfaces of a workpiece (12) comprises a biasing system (242) for connection to said workpiece (12) and an anode (76) such as to negatively bias the workpiece relative to the anode and a vacuum source (42, 44) for evacuating an interior of the workpiece (12). A gas supply (224, 226, 228) is employed for introducing a gas containing a treatment material to said workpiece and a control system (244) controls the biasing system (242), the vacuum source (42, 44) and the gas supply (224, 226, 228) so as to establish a hollow cathode effect within the workpiece (12). A pair of coupling heads (16, 18) are supported on articulated arms (22, 24, 26) movable in one or more of three axes and include removable shields (78) to protect the heads (16, 18) and an anode mount (74) for receiving an anode (76). The articulated arms allow the system to accommodate a plurality of different shaped and different sized workpieces while the shields protect the coupling heads during a deposition process.
摘要翻译：用于涂覆工件（12）的表面的系统（10）包括用于连接到所述工件（12）的偏压系统（242）和用于相对于阳极负偏压工件的阳极（76），以及真空源（42,44），用于排空工件（12）的内部。采用气体供应装置（224,226,228）将含有处理材料的气体引入所述工件，并且控制系统（244）控制偏压系统（242），真空源（42,44）和气体供应装置（224,226,228），以便在工件（12）内建立空心阴极效应。一对耦合头（16,18）支撑在可在三个轴中的一个或多个轴上移动的铰接臂（22,24,26）上，并且包括可移除的屏蔽件（78）以保护头部（16,18）和阳极支架（74），用于接收阳极（76）。铰接臂允许系统容纳多个不同形状和不同尺寸的工件，而屏蔽件在沉积过程中保护联接头。

8. 发明申请

WO2007134020A1 ELECTRODE SYSTEMS AND METHODS OF USING ELECTRODES 审中-公开
标题翻译：电极系统及使用电极的方法
公开(公告)号：WO2007134020A1
公开(公告)日：2007-11-22
申请号：PCT/US2007/068426
申请日：2007-05-08
申请人： SUB-ONE TECHNOLOGY, INC. , BOARDMAN, William John , TUDHOPE, Andrew William , MERCADO, Raul Donate , CASSERLY, Thomas Bryan
发明人： BOARDMAN, William John , TUDHOPE, Andrew William , MERCADO, Raul Donate , CASSERLY, Thomas Bryan
IPC分类号： H01J37/32
CPC分类号： H01J37/32541
摘要： An electrode assembly comprises a coil of electrode material surrounded by a shield having one or more outlets and a supply of shielding gas directed along an axis X-X of said coil before exiting from said shield.
摘要翻译：电极组件包括由具有一个或多个出口的屏蔽物围绕的电极材料的线圈，并且在从所述屏蔽件退出之前沿着所述线圈的轴线X-X指向的保护气体的供应。

9. 发明申请

WO2006019565A3 METHOD AND SYSTEM FOR COATING INTERNAL SURFACES OF PREFABRICATED PROCESS PIPING IN THE FIELD 审中-公开
标题翻译：用于涂装现场预制工艺管道内表面的方法和系统
公开(公告)号：WO2006019565A3
公开(公告)日：2007-04-26
申请号：PCT/US2005023906
申请日：2005-07-06
申请人： SUB ONE TECHNOLOGY INC , BOARDMAN WILLIAM JOHN , TUDHOPE ANDREW WILLIAM , MERCADO RAUL DONATE
发明人： BOARDMAN WILLIAM JOHN , TUDHOPE ANDREW WILLIAM , MERCADO RAUL DONATE
IPC分类号： C23C16/00 , C23C14/34
CPC分类号： C23C16/045 , C23C16/26 , C23C16/4401 , C23C16/503 , C23C16/505
摘要： The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage (20 and 47) such that the workpiece functions as a cathode and by connecting an anode (22 and 24) at each opening of the workpiece. A source gas (16 and 18) is introduced at an entrance opening, while a vacuum source (32) is connected at an exit opening. Pressure within the workpiece is monitored (34) and the resulting pressure information is used for maintaining a condition that exhibits the hollow cathode effect. Optionally, a pre-cleaning (52) may be provided by introducing a hydrocarbon mixture and applying a negative bias to the workpiece, so as to sputter contaminants from the workpiece using argon gas (16). Argon gas may also be introduced during the coating processing to re-sputter the coating, thereby improving uniformity along the length of the workpiece. The coating may be a diamond-like carbon material having properties which are determined by controlling ion bombardment energy.
摘要翻译：通过连接偏置电压（20和47）使得工件用作阴极并且通过在工件的每个开口处连接阳极（22和24）来实现工件的内表面的涂层。源气体（16和18）在入口处被引入，而真空源（32）在出口处连接。监测工件内的压力（34），并将所得的压力信息用于保持呈现空心阴极效应的状态。可选地，可以通过引入烃混合物并向工件施加负偏压来提供预清洁（52），以便使用氩气（16）从工件溅射污染物。也可以在涂覆处理期间引入氩气以重新溅射涂层，从而提高沿工件长度的均匀性。涂层可以是具有通过控制离子轰击能确定的性质的类金刚石碳材料。

10. 发明申请

WO2006096659B1 METHOD AND SYSTEM FOR COATING SECTIONS OF INTERNAL SURFACES 审中-公开
标题翻译：内表面涂层方法和系统
公开(公告)号：WO2006096659B1
公开(公告)日：2007-04-19
申请号：PCT/US2006007978
申请日：2006-03-06
申请人： SUB ONE TECHNOLOGY INC , TUDHOPE ANDREW WILLIAM , BOARDMAN WILLIAM JOHN , MERCADO RAUL DONATE , CONTRERAS FREDERICK
发明人： TUDHOPE ANDREW WILLIAM , BOARDMAN WILLIAM JOHN , MERCADO RAUL DONATE , CONTRERAS FREDERICK
IPC分类号： C23C16/04 , B05D7/22 , F16L55/00 , F16L58/00
CPC分类号： F16L58/02 , C23C16/0272 , C23C16/045 , C23C16/26 , C23C16/455 , C23C16/503 , F16L55/1645 , F16L58/04 , F16L58/1009 , F16L58/18
摘要： A method and system for coating the internal surfaces of a localized area or section of a workpiece (10) is presented. Conductive structures (12 and 14) are inserted into one or more openings of a workpiece to define the section to be coated. In some embodiments, a bias voltage (32) is connected to a workpiece section, which functions as a cathode. A gas source (18) and vacuum source (22) are coupled to each conductive structure through a flow control system (48 and 50). The flow control system enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust. Only the section encompassed by the conductive structures is coated. When the coating process is completed, a means for varying the conductive structures along the length is utilized to move onto the next section to be coated.
摘要翻译：提出了一种用于涂覆工件（10）的局部区域或部分的内表面的方法和系统。导电结构（12和14）插入到工件的一个或多个开口中以限定待涂覆的部分。在一些实施例中，偏置电压（32）连接到用作阴极的工件部分。气体源（18）和真空源（22）通过流量控制系统（48和50）耦合到每个导电结构。流量控制系统使得第一开口能够用作气体入口和用作真空排气的第二开口。仅导电结构所包围的部分被涂覆。当涂覆过程完成时，利用沿着长度改变导电结构的装置移动到待涂覆的下一个部分上。

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