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1. 发明申请

WO2001059807A1 IN-SITU PROBE FOR OPTIMIZING ELECTRON BEAM INSPECTION AND METROLOGY BASED ON SURFACE POTENTIAL 审中-公开
标题翻译：基于表面电位优化电子束检测和计量的现场探测
公开(公告)号：WO2001059807A1
公开(公告)日：2001-08-16
申请号：PCT/US2001/004041
申请日：2001-02-07
申请人： KLA-TENCOR CORPORATION , MCCORD, Mark, A. , LAUBER, Jan , PEI, Jun , FERNANDEZ, Jorge, P.
发明人： MCCORD, Mark, A. , LAUBER, Jan , PEI, Jun , FERNANDEZ, Jorge, P.
IPC分类号： H01J37/304
CPC分类号： H01J37/28 , H01J2237/004 , H01J2237/2594 , H01J2237/2814 , H01J2237/2817
摘要： Disclosed is a method and apparatus for generating an image from a sample using a charged particle beam. The apparatus further includes a measurement device (228) arranged to measure a characteristic of the sample portion to obtain a surface voltage value of the sample portion that is exposed to the charged particle beam. For example, the measurement device is an electrostatic voltmeter positioned to obtain a surface voltage value of the exposed sample portion. A charged particle beam is directed substantially towards a portion of the sample under a first set of operating conditions. A surface charge value of the sample portion is obtained under the first set of operating conditions. It is then determined whether an optimum set of operating conditions associated with a predetermined surface charge value have been found. When the optimum conditions have not been found, the operating conditions are adjusted and the charged particle beam is directed substantially towards the sample portion. When the optimum conditions have been found, the charged particle beam is directed substantially towards the sample portion under the found optimum operating conditions.
摘要翻译：公开了一种使用带电粒子束从样品生成图像的方法和装置。该装置还包括测量装置（228），其被布置成测量样品部分的特性以获得暴露于带电粒子束的样品部分的表面电压值。例如，测量装置是定位成获得暴露的样品部分的表面电压值的静电电压表。在第一组操作条件下，带电粒子束基本上指向样品的一部分。在第一组操作条件下获得样品部分的表面电荷值。然后确定是否已经找到与预定表面电荷值相关联的最佳操作条件集合。当没有找到最佳条件时，调节操作条件，并且带电粒子束基本上指向样品部分。当已经找到最佳条件时，在找到的最佳操作条件下，带电粒子束基本上指向样品部分。

2. 发明申请

WO2007070475A3 SCANNING ELECTRON MICROSCOPE WITH CRT-TYPE ELECTRON OPTICS 审中-公开
公开(公告)号：WO2007070475A3
公开(公告)日：2007-06-21
申请号：PCT/US2006/047227
申请日：2006-12-11
申请人： KLA-TENCOR TECHNOLOGIES CORPORATION , ADLER, David L , LEVY, Ady , RICHARDSON, Neil , MCCORD, Mark A
发明人： ADLER, David L , LEVY, Ady , RICHARDSON, Neil , MCCORD, Mark A
IPC分类号： G01N23/00 , G21K7/00
摘要： One embodiment relates to an apparatus, including a CRT-type gun (for example, 102, or 302, or 510, or 1002, or 1113) and deflectors to generate and scan the electron beam, which utilizes the electron beam for inspection or metrology of a substrate. The apparatus may comprise a portable scanning electron microscope. Another embodiment relates to a method of inspecting a substrate or measuring an aspect of the substrate, where an electron beam is focused using electrostatic lenses formed by metal plates (704) supported by and separated by fused glass beads (706) or other insulating material. Another embodiment relates to a method of obtaining an electron beam image of a surface of a bulk specimen where a portable SEM device is moved to the bulk specimen. Other embodiments and features are also disclosed.

3. 发明申请

WO0159807A9 IN-SITU PROBE FOR OPTIMIZING ELECTRON BEAM INSPECTION AND METROLOGY BASED ON SURFACE POTENTIAL 审中-公开
标题翻译：基于表面电位优化电子束检测和计量的现场探测
公开(公告)号：WO0159807A9
公开(公告)日：2002-10-31
申请号：PCT/US0104041
申请日：2001-02-07
申请人： KLA TENCOR CORP , MCCORD MARK A , LAUBER JAN , PEI JUN , FERNANDEZ JORGE P
发明人： MCCORD MARK A , LAUBER JAN , PEI JUN , FERNANDEZ JORGE P
IPC分类号： G01Q40/02 , H01J37/28 , H01J37/304 , H01J37/02 , H01J37/26
CPC分类号： H01J37/28 , H01J2237/004 , H01J2237/2594 , H01J2237/2814 , H01J2237/2817
摘要： Disclosed is a method and apparatus for generating an image from a sample using a charged particle beam. The apparatus further includes a measurement device (228) arranged to measure a characteristic of the sample portion to obtain a surface voltage value of the sample portion that is exposed to the charged particle beam. For example, the measurement device is an electrostatic voltmeter positioned to obtain a surface voltage value of the exposed sample portion. A charged particle beam is directed substantially towards a portion of the sample under a first set of operating conditions. A surface charge value of the sample portion is obtained under the first set of operating conditions. It is then determined whether an optimum set of operating conditions associated with a predetermined surface charge value have been found. When the optimum conditions have not been found, the operating conditions are adjusted and the charged particle beam is directed substantially towards the sample portion. When the optimum conditions have been found, the charged particle beam is directed substantially towards the sample portion under the found optimum operating conditions.
摘要翻译：公开了一种使用带电粒子束从样品生成图像的方法和装置。该装置还包括测量装置（228），其被布置成测量样品部分的特性以获得暴露于带电粒子束的样品部分的表面电压值。例如，测量装置是定位成获得暴露的样品部分的表面电压值的静电电压表。在第一组操作条件下，带电粒子束基本上指向样品的一部分。在第一组操作条件下获得样品部分的表面电荷值。然后确定是否已经找到与预定表面电荷值相关联的最佳操作条件集合。当没有找到最佳条件时，调节操作条件，并且带电粒子束基本上指向样品部分。当已经找到最佳条件时，在找到的最佳操作条件下，带电粒子束基本上指向样品部分。

4. 发明申请

WO2007070475A2 SCANNING ELECTRON MICROSCOPE WITH CRT-TYPE ELECTRON OPTICS 审中-公开
标题翻译：扫描电子显微镜与CRT型电子光学
公开(公告)号：WO2007070475A2
公开(公告)日：2007-06-21
申请号：PCT/US2006047227
申请日：2006-12-11
申请人： KLA TENCOR TECH CORP , ADLER DAVID L , LEVY ADY , RICHARDSON NEIL , MCCORD MARK A
发明人： ADLER DAVID L , LEVY ADY , RICHARDSON NEIL , MCCORD MARK A
IPC分类号： G21K7/00
CPC分类号： H01J37/28 , H01J37/04 , H01J37/065 , H01J37/1475 , H01J37/18
摘要： One embodiment relates to an apparatus, including a CRT-type gun (for example, 102, or 302, or 510, or 1002, or 1113) and deflectors to generate and scan the electron beam, which utilizes the electron beam for inspection or metrology of a substrate. The apparatus may comprise a portable scanning electron microscope. Another embodiment relates to a method of inspecting a substrate or measuring an aspect of the substrate, where an electron beam is focused using electrostatic lenses formed by metal plates (704) supported by and separated by fused glass beads (706) or other insulating material. Another embodiment relates to a method of obtaining an electron beam image of a surface of a bulk specimen where a portable SEM device is moved to the bulk specimen. Other embodiments and features are also disclosed.
摘要翻译：一个实施例涉及一种包括CRT型枪（例如，102或302，或510，或1002或1113）和用于产生和扫描电子束的偏转器的装置，其利用电子束进行检查或计量的基底。该装置可以包括便携式扫描电子显微镜。另一实施例涉及一种检查衬底或测量衬底的方面的方法，其中电子束被使用由熔融玻璃珠（706）或其他绝缘材料支撑并由其分离的金属板（704）形成的静电透镜聚焦。另一实施例涉及一种获得便携式SEM装置移动到散装试样的散装试样的表面的电子束图像的方法。还公开了其它实施例和特征。

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