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1. 发明申请

WO2011050204A3 NUCLEATION AND GROWTH OF TIN PARTICLES INTO THREE DIMENSIONAL COMPOSITE ACTIVE ANODE FOR LITHIUM HIGH CAPACITY ENERGY STORAGE DEVICE 审中-公开
标题翻译：用于锂高容量储能装置的三维复合活性阳极中的细颗粒的生成和生长
公开(公告)号：WO2011050204A3
公开(公告)日：2011-09-09
申请号：PCT/US2010053613
申请日：2010-10-21
申请人： APPLIED MATERIALS INC , LOPATIN SERGEY D , BREVNOV DMITRI A , WANG CONNIE P , BACHRACH ROBERT Z
发明人： LOPATIN SERGEY D , BREVNOV DMITRI A , WANG CONNIE P , BACHRACH ROBERT Z
IPC分类号： H01M4/04 , B82B3/00 , C23C2/00 , H01M4/38 , H01M10/0525
CPC分类号： H01M4/80 , C25D3/32 , C25D5/10 , C25D7/0614 , C25D17/28 , H01M4/13 , H01M4/139 , H01M4/364 , H01M4/661 , H01M4/666 , H01M4/667 , H01M4/70 , H01M10/0525 , H01M10/0566
摘要： Embodiments of the present invention generally relate to lithium-ion batteries, and more specifically, to a system and method for fabricating such batteries using thin-film processes that form three-dimensional structures. In one embodiment, an anodic structure used to form an energy storage device is provided. The anodic structure comprises a flexible conductive substrate, a plurality of conductive microstructures formed on the conductive substrate, comprising a plurality of columnar projections and dendritic structures formed over the plurality of columnar projections and a plurality of tin particles formed on the plurality of conductive microstructures. In another embodiment, the anodic structure further comprises a tin nucleation layer comprising tin particles formed on the flexible conductive substrate between the flexible conductive substrate and the plurality of conductive microstructures.
摘要翻译：本发明的实施方案一般涉及锂离子电池，更具体地，涉及使用形成三维结构的薄膜工艺制造这种电池的系统和方法。在一个实施例中，提供了用于形成能量存储装置的阳极结构。阳极结构包括柔性导电基板，形成在导电基板上的多个导电微结构，包括形成在多个柱状突起上的多个柱状突起和树枝状结构以及形成在多个导电微结构上的多个锡颗粒。在另一个实施方案中，阳极结构还包括锡成核层，其包含形成在柔性导电基底上的锡颗粒在柔性导电基底和多个导电微结构之间。

2. 发明申请

WO2011087588A3 GRADED ELECTRODE TECHNOLOGIES FOR HIGH ENERGY LITHIUM-ION BATTERIES 审中-公开
公开(公告)号：WO2011087588A3
公开(公告)日：2011-07-21
申请号：PCT/US2010/058215
申请日：2010-11-29
申请人： APPLIED MATERIALS, INC. , WANG, Connie P. , LOPATIN, Sergey D. , BACHRACH, Robert Z. , SIKHA, Godfrey
发明人： WANG, Connie P. , LOPATIN, Sergey D. , BACHRACH, Robert Z. , SIKHA, Godfrey
IPC分类号： H01M4/02 , H01M10/0525 , H01M4/48 , H01M4/64
摘要： Embodiments described herein provide methods and systems for manufacturing faster charging, higher capacity energy storage devices that are smaller, lighter, and can be more cost effectively manufactured at a higher production rate. In one embodiment, a graded cathode structure is provided. The graded cathode structure comprises a conductive substrate, a first porous layer comprising a first cathodically active material having a first porosity formed on the conductive substrate, and a second porous layer comprising a second cathodically active material having a second porosity formed on the first porous layer. In certain embodiments, the first porosity is greater than the second porosity. In certain embodiments, the first porosity is less than the second porosity.

3. 发明申请

WO2010098977A3 THIN FILM ELECTROCHEMICAL ENERGY STORAGE DEVICE WITH THREE-DIMENSIONAL ANODIC STRUCTURE 审中-公开
标题翻译：具有三维阳极结构的薄膜电化学能量储存装置
公开(公告)号：WO2010098977A3
公开(公告)日：2011-01-20
申请号：PCT/US2010023640
申请日：2010-02-09
申请人： APPLIED MATERIALS INC , LOPATIN SERGEY D , BREVNOV DMITRI A , BACHRACH ROBERT Z
发明人： LOPATIN SERGEY D , BREVNOV DMITRI A , BACHRACH ROBERT Z
IPC分类号： H01M4/133 , H01M2/16 , H01M4/04 , H01M4/66 , H01M10/0525
CPC分类号： H01M10/0585 , C25D1/00 , C25D1/006 , H01M2/1653 , H01M2/1686 , H01M4/0428 , H01M4/133 , H01M4/1393 , H01M4/364 , H01M4/587 , H01M4/667 , H01M4/70 , H01M6/40 , H01M10/0525 , H01M10/0565 , H01M10/0566 , H01M10/058
摘要： A method for forming a battery from via thin-film deposition processes is disclosed. A mesoporous carbon material is deposited onto a surface of a conductive substrate that has high surface area, conductive micro-structures formed thereon. A porous, dielectric separator layer is then deposited on the layer of mesoporous carbon material to form a half cell of an energy storage device. The mesoporous carbon material is made up of CVD-deposited carbon fullerene "onions" and carbon nano-tubes, and has a high porosity capable of retaining lithium ions in concentrations useful for storing significant quantities of electrical energy. Embodiments of the invention further provide for the formation of an electrode having a high surface area conductive region that is useful in a battery structure. In one configuration the electrode has a high surface area conductive region comprising a porous dendritic structure that can be formed by electroplating, physical vapor deposition, chemical vapor deposition, thermal spraying, and/or electroless plating techniques.
摘要翻译：公开了一种通过薄膜沉积工艺形成电池的方法。在其上形成有高表面积的导电微结构的导电性基板的表面上沉积介孔碳材料。然后将多孔介电分离器层沉积在介孔碳材料层上以形成储能装置的半电池。中孔碳材料由CVD沉积的碳富勒烯“洋葱”和碳纳米管组成，并且具有能够将锂离子保留在用于储存大量电能的浓度的高孔隙率。本发明的实施例还提供了一种用于电池结构的具有高表面积导电区域的电极的形成。在一种配置中，电极具有高的表面积导电区域，其包括通过电镀，物理气相沉积，化学气相沉积，热喷涂和/或化学镀技术形成的多孔树枝状结构。

4. 发明申请

WO2010120813A3 COMPOSITE MATERIALS CONTAINING METALLIZED CARBON NANOTUBES AND NANOFIBERS 审中-公开
标题翻译：包含金属化碳纳米管和纳米纤维的复合材料
公开(公告)号：WO2010120813A3
公开(公告)日：2011-01-13
申请号：PCT/US2010030933
申请日：2010-04-13
申请人： APPLIED MATERIALS INC , LOPATIN SERGEY D , BACHRACH ROBERT Z , CHEN LIANG-YUH
发明人： LOPATIN SERGEY D , BACHRACH ROBERT Z , CHEN LIANG-YUH
IPC分类号： H01M4/02 , B82B3/00 , H01G9/042 , H01M4/64 , H01M10/0525
CPC分类号： H01M4/66 , H01M4/133 , H01M4/366 , H01M4/587 , H01M4/626 , H01M4/661 , H01M4/667 , H01M10/0525 , Y10T29/49115
摘要： A method and apparatus are provided for the cost effective formation of a composite material which includes metallized carbon nanotubes and/or nanofibers that can be used to form portions of an energy storage device, such as a lithium ion battery. In one embodiment, carbon nanotubes are formed on a host substrate using a catalytic chemical vapor deposition process. An initiation-adhesion layer is formed over the carbon nanotubes and a metallic layer is then deposited on the initiation-adhesion layer and each layer is formed using a wet deposition process. In one embodiment, portions of the host substrate are used to form an electrochemical storage device that may be integrated with other formed electrochemical storage devices to create an interconnected battery array. The battery array may be formed as a woven sheet, panel, or other flexible structure depending upon the type of host substrate material. In one case, the host substrate material may be a flexible fibrous material that has multiple layers formed thereon to form a fiber battery, such as a lithium ion battery.
摘要翻译：提供了一种用于成本有效地形成复合材料的方法和装置，所述复合材料包括可用于形成诸如锂离子电池的能量存储装置的部分的金属化碳纳米管和/或纳米纤维。在一个实施方案中，使用催化化学气相沉积工艺在主体衬底上形成碳纳米管。在碳纳米管上形成起始粘合层，然后在起始粘合层上沉积金属层，并且使用湿沉积工艺形成每个层。在一个实施例中，主机衬底的部分用于形成电化学存储器件，其可以与其它形成的电化学存储器件集成以产生互连的电池阵列。取决于主机基板材料的类型，电池阵列可以形成为编织片，面板或其它柔性结构。在一种情况下，主体衬底材料可以是其上形成有多层以形成诸如锂离子电池的纤维电池的柔性纤维材料。

5. 发明申请

WO2010120816A2 METALLIZED FIBERS FOR ELECTROCHEMICAL ENERGY STORAGE 审中-公开
标题翻译：用于电化学能量储存的金属化纤维
公开(公告)号：WO2010120816A2
公开(公告)日：2010-10-21
申请号：PCT/US2010/030936
申请日：2010-04-13
申请人： APPLIED MATERIALS, INC. , LOPATIN, Sergey D. , BACHRACH, Robert Z. , CHEN, Liang-Yuh
发明人： LOPATIN, Sergey D. , BACHRACH, Robert Z. , CHEN, Liang-Yuh
IPC分类号： H01M4/02 , H01M4/64 , H01G9/042 , H01M8/02 , H01M10/0525
CPC分类号： H01M4/66 , H01M4/133 , H01M4/366 , H01M4/587 , H01M4/626 , H01M4/661 , H01M4/667 , H01M10/0525 , Y10T29/49115
摘要： A cost effective method and apparatus are provided for forming metallized fibers and depositing multilayer films thereon to form thin film electrochemical energy storage devices. In one embodiment, a fibrous substrate is formed using a fiber spinning process and the fibrous substrate is plated with a copper layer using wet deposition. Multiple material layers are then deposited onto the copper layer to form a lithium-ion battery fiber.
摘要翻译：提供了一种成本有效的方法和装置，用于形成金属化纤维并在其上沉积多层膜以形成薄膜电化学能量存储装置。在一个实施例中，使用纤维纺丝工艺形成纤维基材，并且使用湿沉积将纤维基材镀铜层。然后将多个材料层沉积到铜层上以形成锂离子电池纤维。

6. 发明申请

WO2010098977A2 THIN FILM ELECTROCHEMICAL ENERGY STORAGE DEVICE WITH THREE-DIMENSIONAL ANODIC STRUCTURE 审中-公开
标题翻译：具有三维阳极结构的薄膜电化学能量储存装置
公开(公告)号：WO2010098977A2
公开(公告)日：2010-09-02
申请号：PCT/US2010/023640
申请日：2010-02-09
申请人： APPLIED MATERIALS, INC. , LOPATIN, Sergey D. , BREVNOV, Dmitri, A. , BACHRACH, Robert Z.
发明人： LOPATIN, Sergey D. , BREVNOV, Dmitri, A. , BACHRACH, Robert Z.
CPC分类号： H01M10/0585 , C25D1/00 , C25D1/006 , H01M2/1653 , H01M2/1686 , H01M4/0428 , H01M4/133 , H01M4/1393 , H01M4/364 , H01M4/587 , H01M4/667 , H01M4/70 , H01M6/40 , H01M10/0525 , H01M10/0565 , H01M10/0566 , H01M10/058
摘要： A method for forming a battery from via thin-film deposition processes is disclosed. A mesoporous carbon material is deposited onto a surface of a conductive substrate that has high surface area, conductive micro-structures formed thereon. A porous, dielectric separator layer is then deposited on the layer of mesoporous carbon material to form a half cell of an energy storage device. The mesoporous carbon material is made up of CVD-deposited carbon fullerene "onions" and carbon nano-tubes, and has a high porosity capable of retaining lithium ions in concentrations useful for storing significant quantities of electrical energy. Embodiments of the invention further provide for the formation of an electrode having a high surface area conductive region that is useful in a battery structure. In one configuration the electrode has a high surface area conductive region comprising a porous dendritic structure that can be formed by electroplating, physical vapor deposition, chemical vapor deposition, thermal spraying, and/or electroless plating techniques.
摘要翻译：公开了一种通过薄膜沉积工艺形成电池的方法。在其上形成有高表面积的导电微结构的导电性基板的表面上沉积介孔碳材料。然后将多孔介电分离器层沉积在介孔碳材料层上以形成储能装置的半电池。中孔碳材料由CVD沉积的碳富勒烯“洋葱”和碳纳米管组成，并且具有能够将锂离子保留在用于储存大量电能的浓度的高孔隙率。本发明的实施例还提供了一种用于电池结构的具有高表面积导电区域的电极的形成。在一种配置中，电极具有高的表面积导电区域，其包括通过电镀，物理气相沉积，化学气相沉积，热喷涂和/或化学镀技术形成的多孔树枝状结构。

7. 发明申请

WO2010091352A2 MESOPOROUS CARBON MATERIAL FOR ENERGY STORAGE 审中-公开
标题翻译：用于能源储存的多孔碳材料
公开(公告)号：WO2010091352A2
公开(公告)日：2010-08-12
申请号：PCT/US2010/023484
申请日：2010-02-08
申请人： APPLIED MATERIALS, INC. , LOPATIN, Sergey , BACHRACH, Robert Z. , BREVNOV, Dmitri A. , LAZIK, Christopher S. , JIN, Miao , URITSKY, Yuri
发明人： LOPATIN, Sergey , BACHRACH, Robert Z. , BREVNOV, Dmitri A. , LAZIK, Christopher S. , JIN, Miao , URITSKY, Yuri
IPC分类号： C23C16/26 , C01B31/02 , H01G9/042 , H01M4/96
CPC分类号： H01G11/50 , B82Y30/00 , B82Y40/00 , C01B32/15 , C23C16/26 , H01G11/36 , H01M4/587 , Y02E60/13
摘要： A mesoporous carbon material formed on an electrode surface in an energy storage device, and a method of forming the same are disclosed. The mesoporous carbon material acts as a high surface area ion intercalation medium for the energy storage device, and is made up of CVD-deposited carbon fullerene "onions" and carbon nanotubes (CNTs) that are interconnected in a fullerene/CNT hybrid matrix. The fullerene/CNT hybrid matrix is a high porosity material that is capable of retaining lithium ions in concentrations useful for storing significant quantities of electrical energy. The method, according to one embodiment, includes vaporizing a high molecular weight hydrocarbon precursor and directing the vapor onto a conductive substrate to form a mesoporous carbon material thereon.
摘要翻译：公开了一种在能量储存装置的电极表面上形成的介孔碳材料及其形成方法。中孔碳材料作为能量储存装置的高表面积离子插层介质，由CVD沉积的碳富勒烯“洋葱”和在富勒烯/ CNT混合基质中相互连接的碳纳米管（CNTs）构成。富勒烯/ CNT混合基质是一种高孔隙率材料，其能够将锂离子保留在用于储存大量电能的浓度中。根据一个实施方案，该方法包括蒸发高分子量烃前体并将蒸气引导到导电基材上以在其上形成介孔碳材料。

8. 发明申请

WO2009032021A2 ELECTROPLATING ON ROLL-TO-ROLL FLEXIBLE SOLAR CELL SUBSTRATES 审中-公开
标题翻译：在滚动到滚动的柔性太阳能电池基板上进行电镀
公开(公告)号：WO2009032021A2
公开(公告)日：2009-03-12
申请号：PCT/US2007/085959
申请日：2007-11-29
申请人： APPLIED MATERIALS, INC. , LOPATIN, Sergey , EAGLESHAM, David , GAY, Charles
发明人： LOPATIN, Sergey , EAGLESHAM, David , GAY, Charles
IPC分类号： C23C14/00 , H01L31/042
CPC分类号： C25D5/022 , C25D5/18 , C25D7/08 , C25D17/00 , C25D17/001 , H01L31/022425 , H01L31/02245 , H01L31/022466 , H01L31/03926 , H01L31/0465 , H01L31/0508 , H01L31/0512 , H01L31/0516 , H01L31/188 , Y02E10/50
摘要： Embodiments of the invention contemplate the formation of a low cost flexible solar cell using a novel electroplating method and apparatus to form a metal contact structure. The apparatus and methods described herein remove the need to perform one or more high temperature screen printing processes to form conductive features on the surface of a solar cell substrate. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. Solar cell substrates that may benefit from the invention include flexible substrates may have an active region that contains organic material, single crystal silicon, multi-crystalline silicon, polycrystalline silicon, germanium, and gallium arsenide, cadmium telluride, cadmium sulfide, copper indium gallium selenide, copper indium selenide, gallilium indium phosphide, as well as heterojunction cells that are used to convert sunlight to electrical power. The flexible substrates may have a flexible base that is adapted to support the active region of the solar cell device.
摘要翻译：本发明的实施例考虑使用新颖的电镀方法和装置形成金属接触结构来形成低成本的柔性太阳能电池。本文所述的装置和方法消除了执行一个或多个高温丝网印刷工艺以在太阳能电池基板的表面上形成导电特征的需要。在太阳能电池器件中形成的互连的电阻极大地影响太阳能电池的效率。可以受益于本发明的太阳能电池基板包括柔性基板可以具有含有有机材料，单晶硅，多晶硅，多晶硅，锗和砷化镓，碲化镉，硫化镉，铜铟镓硒的有源区，硒化铜铟锡，磷化铟镓，以及用于将阳光转换成电力的异质结电池。柔性基板可以具有适于支撑太阳能电池装置的有源区域的柔性基座。

9. 发明申请

WO2008070568A2 APPARATUS AND METHOD FOR ELECTROPLATING ON A SOLAR CELL SUBSTRATE 审中-公开
标题翻译：用于在太阳能电池基板上电镀的装置和方法
公开(公告)号：WO2008070568A2
公开(公告)日：2008-06-12
申请号：PCT/US2007/086145
申请日：2007-11-30
申请人： APPLIED MATERIALS, INC. , LOPATIN, Sergey , KOVARSKY, Nicolay Y. , EAGLESHAM, David , DUKOVIC, John O. , GAY, Charles
发明人： LOPATIN, Sergey , KOVARSKY, Nicolay Y. , EAGLESHAM, David , DUKOVIC, John O. , GAY, Charles
IPC分类号： C25D5/10 , C25D5/12 , H01L31/00
CPC分类号： H01L31/022425 , C23C28/021 , C23C28/023 , C23C28/025 , C23C28/028 , C23C28/321 , C23C28/322 , C23C28/3225 , C23C28/34 , C23C28/36 , C25D5/022 , C25D5/08 , C25D5/50 , C25D17/00 , C25D17/001 , C25D17/02 , C25D17/06 , Y02E10/50
摘要： Embodiments of the invention contemplate the formation of a low cost solar cell using a novel method and apparatus to form a metal contact structure having selectively formed metal lines using an electrochemical plating process. The apparatus and methods described herein remove the need to perform one or more high temperature screen printing processes to form conductive features on the surface of a solar cell substrate. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. It is thus desirable to form a solar cell device that has a low resistance connection that is reliable and cost effective. Therefore, one or more embodiments of the invention described herein are adapted to form a low cost and reliable interconnecting layer using an electrochemical plating process containing a common metal, such as copper.
摘要翻译：本发明的实施例考虑使用新颖的方法和设备形成使用电化学电镀工艺形成具有选择性形成的金属线的金属接触结构的低成本太阳能电池。本文描述的设备和方法消除了执行一个或多个高温丝网印刷工艺以在太阳能电池基板的表面上形成导电特征的需要。在太阳能电池器件中形成的互连的电阻极大地影响了太阳能电池的效率。因此期望形成具有可靠且成本有效的低电阻连接的太阳能电池装置。因此，这里描述的本发明的一个或多个实施例适于使用包含诸如铜的常见金属的电化学电镀工艺形成低成本且可靠的互连层。

10. 发明申请

WO2007100933A3 ETCH SELECTIVITY ENHANCEMENT, DEPOSITION QUALITY EVALUATION, STRUCTURAL MODIFICATION AND THREE-DIMENSIONAL IMAGING USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH 审中-公开
标题翻译： ETCH选择性增强，沉积质量评估，结构改性和使用电子束激活化学蚀刻的三维成像
公开(公告)号：WO2007100933A3
公开(公告)日：2008-04-10
申请号：PCT/US2007060503
申请日：2007-01-12
申请人： KLA TENCOR TECH CORP , NASSER-GHODSI MEHRAN , GOTKIS YEHIEL , LOPATIN SERGEY , PICKARD GARRETT , GARCIA RUDY F , YU MING LUN , KRZECZOWSKI KENNETH , LENT MATTHEW , HUANG CHRIS , MACDONALD NILES K , BOROWICZ STANISLAW MAREK , CHUANG TZU-CHIN
发明人： NASSER-GHODSI MEHRAN , GOTKIS YEHIEL , LOPATIN SERGEY , PICKARD GARRETT , GARCIA RUDY F , YU MING LUN , KRZECZOWSKI KENNETH , LENT MATTHEW , HUANG CHRIS , MACDONALD NILES K , BOROWICZ STANISLAW MAREK , CHUANG TZU-CHIN
IPC分类号： C23F1/00 , A61N5/00 , B44C1/22 , G21K7/00
CPC分类号： G03F7/2043 , H01J2237/31732 , H01J2237/3174 , H01J2237/31744 , H01L21/02057 , H01L21/3065 , H01L21/31116 , H01L21/32136
摘要： Etch selectivity enhancement during electron beam activated chemical etch (EBACE), methods and apparatus for evaluating the quality of structures on an integrated circuit wafer using EBACE, a method for modifying a surface of a substrate (or a portion there of), methods and apparatus for imaging a structure and an associated processor-readable medium are disclosed. A target or portion thereof may be exposed to a gas composition of a type that etches the target when the gas composition and/or target are exposed to an electron beam. By directing an electron beam toward the target in the vicinity of the gas composition, an interaction between the electron beam and the gas composition etches a portion of the target exposed to both the gas composition and the electron beam.
摘要翻译：电子束激活化学蚀刻（EBACE）中的蚀刻选择性增强，用于使用EBACE评估集成电路晶片上的结构质量的方法和装置，用于改变衬底（或其部分）的表面的方法，方法和装置用于对结构进行成像和相关联的处理器可读介质。当气体组合物和/或靶暴露于电子束时，靶或其部分可暴露于蚀刻靶的类型的气体组合物。通过在气体组合物附近引导电子束朝向靶，电子束和气体组成之间的相互作用会蚀刻暴露于气体组成和电子束两者的靶的一部分。

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