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    • 4. 发明申请
    • GROOVE ON COVER PLATE OR SUBSTRATE
    • 盖在盖板或底板上
    • WO2010002496A2
    • 2010-01-07
    • PCT/US2009043194
    • 2009-05-07
    • QUALCOMM MEMS TECHNOLOGIESL INLIN PENG CHENG
    • LIN PENG CHENG
    • B81C1/00
    • G02B26/001B81C1/00333B81C1/00873
    • An improved substrate or cover plate design with a groove for effective singulation of individual display apparatus. In one embodiment, the display apparatus comprises a prefabricated groove on an inside face of a substrate or cover plate to facilitate separation of a MEMS device from a plurality of MEMS devices formed a substrate. In some embodiments, the prefabricated grooves make breaking at pseudo scribe lines simple by thinning and weakening the substrate or cover plate at a scribe zone and act as an improved guide for breaking. Scribe cut relief preserves components, structural integrity, and produces a clean break without inducing excessive or unwanted stresses into the MEMS core and ensures no damage at the panel ledge for subsequent interconnect assembly.
    • 改进的基板或盖板设计,具有用于单独显示装置的有效分割的凹槽。 在一个实施例中,显示装置包括在基板或盖板的内表面上的预制凹槽,以便于将MEMS装置与形成基板的多个MEMS装置分离。 在一些实施例中,预制凹槽通过在划刻区处减薄和削弱基板或盖板而简化了伪划线,并且作为改进的断裂指导。 Scribe切割浮雕保留部件,结构完整性,并产生干净的断裂,而不会在MEMS芯中引起过大或不必要的应力,并确保在面板凸缘处不会对随后的互连组件造成损坏。