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    • 1. 发明申请
    • HIGH-RESOLUTION OPTICAL IMAGER
    • 高分辨率光学成像器
    • WO2007121175A3
    • 2008-09-25
    • PCT/US2007066326
    • 2007-04-10
    • LER TECHNOLOGIES INCYACOUBIAN ARAZ
    • YACOUBIAN ARAZ
    • H01L27/00
    • G01B9/02024G01B9/0203G01B9/02057G01B2290/35
    • An optical imager (100) comprises an interferometer, microscopic optics operative in combination with the interferometer to generate a reference image (107) and an object image (108), and an image capture device (1 10) configured to capture an interferometric image with a phase difference between the reference image and the object image. The optical imager further comprises a phase shifter operative to selectively control the phase difference and a controller operative to capture a plurality of interferometric images at a selected plurality of phase differences and combine the plurality of interferometric images into a processed image with in-plane resolution that is increased over optical wavelength and numerical aperture characteristics.
    • 光学成像仪(100)包括干涉仪,与干涉仪组合操作的微观光学器件,以产生参考图像(107)和物体图像(108);以及图像捕获装置(110),被配置为捕获干涉图像, 参考图像和对象图像之间的相位差。 光学成像器还包括移相器,其操作以选择性地控制相位差,并且控制器可操作地以所选择的多个相位差捕获多个干涉图像,并将多个干涉图像组合成具有平面内分辨率的经处理图像, 在光波长和数值孔径特性上增加。
    • 3. 发明申请
    • HIGH-RESOLUTION OPTICAL IMAGER
    • 高分辨率光学成像器
    • WO2007121175A2
    • 2007-10-25
    • PCT/US2007/066326
    • 2007-04-10
    • LER TECHNOLOGIES, INC.YACOUBIAN, Araz
    • YACOUBIAN, Araz
    • H01L27/00
    • G01B9/02024G01B9/0203G01B9/02057G01B2290/35
    • An optical imager comprises an interferometer, microscopic optics operative in combination with the interferometer to generate a reference image and an object image, and an image capture device configured to capture an interferometric image with a phase difference between the reference image and the object image. The optical imager further comprises a phase shifter operative to selectively control the phase difference and a controller operative to capture a plurality of interferometric images at a selected plurality of phase differences and combine the plurality of interferometric images into a processed image with in-plane resolution that is increased over optical wavelength and numerical aperture characteristics.
    • 光学成像仪包括干涉仪,与干涉仪组合操作的微观光学器件,以产生参考图像和物体图像,以及被配置为以参考图像和对象图像之间的相位差捕获干涉图像的图像捕获装置。 光学成像器还包括移相器,其操作以选择性地控制相位差,并且控制器可操作以在所选择的多个相位差处捕获多个干涉图像,并将多个干涉图像组合成具有平面内分辨率的经处理图像, 在光波长和数值孔径特性上增加。