会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明申请
    • SENSOR
    • WO02082096A3
    • 2003-05-08
    • PCT/DE0200621
    • 2002-02-20
    • BOSCH GMBH ROBERTFRANZ JOCHENKOHN OLIVERHENNING FRANKMAUTE MATTHIAS
    • FRANZ JOCHENKOHN OLIVERHENNING FRANKMAUTE MATTHIAS
    • G01P15/02B81B3/00G01P15/08G01P15/125H01L29/84B81B7/00
    • B81B3/0051B81B2201/0235B81B2203/051G01P15/08G01P15/125G01P2015/0817G01P2015/0831
    • The invention relates to a sensor whose sensor structure is realized in a micromechanical component and which has parts that can move in relation to the stationary substrate of the component. The sensor comprises at the least the following: a self-supporting seismic mass (1); a spring arrangement with at least one spring (2), whereby the seismic mass (1) is joined to the substrate via the spring arrangement; an overload protection for limiting the displacement of the spring arrangement or of the seismic mass (1) in at least one direction, and; means for detecting the displacements of the spring arrangement or of the seismic mass (1). According to the invention, constructive measures with which the striking forces can be reduced in order to prevent shell blowouts and thus resulting pre-damages to the sensor structure as well as to prevent a formation of particles. To this end, the overload protection is provided in the form of at least one flat stop (3) for at least one moving part of the sensor structure. Alternatively or complementary thereto, the overload protection is provided in the form of at least one elastic stop (7) for at least one moving part of the sensor structure.
    • 用于传感器,其传感器结构在微机械部件和相对部件的固定基板包括移动部件,并且还包括至少实现:自支撑振动质量(1),具有至少一个弹簧(2)弹簧装置,其中,所述地震 是质量(1)通过连接到衬底,用于限制所述弹簧装置的偏转和震动块(1)的过载的保护,在至少一个方向和弹簧组件用于感测所述弹簧装置的偏转和振动质量的(1) 利用该止动力可以减小,从而防止贻贝暴发提出的结构措施引起了传感器结构的初始损伤和颗粒形成。 为了这个目的,作为一个过载保护根据至少在传感器结构中的至少一个可移动部分的平面止动件(3)提供了本发明。 或者或另外,作为过载保护根据至少一个弹性止动件(7),用于至少在传感器结构的可移动部分提供了本发明。