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1. 发明申请

WO2012034587A1 A SYSTEM AND A METHOD FOR PROCESSING A FLEXIBLE SUBSTRATE 审中-公开
标题翻译：一种用于处理柔性基板的系统和方法
公开(公告)号：WO2012034587A1
公开(公告)日：2012-03-22
申请号：PCT/EP2010/063484
申请日：2010-09-14
申请人： APPLIED MATERIALS, INC. , HOFFMANN, Gerd , KLEMM, Günter , LOTZ, Hans-Georg , WOLFF, Alexander
发明人： HOFFMANN, Gerd , KLEMM, Günter , LOTZ, Hans-Georg , WOLFF, Alexander
IPC分类号： C23C14/08 , C23C14/20 , C23C14/56 , C23C16/54 , C23C14/50 , C23C16/458
CPC分类号： B05D3/068 , C23C14/081 , C23C14/20 , C23C14/50 , C23C14/562 , C23C16/458 , C23C16/545
摘要： A system (100) for processing a flexible substrate (110) is provided. The system includes: a vacuum chamber (120); a first roller (104) adapted for transporting the flexible substrate (110) and adapted for laterally stretching the flexible substrate (110); a processing drum (106) disposed in the vacuum chamber (120), the processing drum (106) being rotatable with respect to a longitudinal axis (112) of the processing drum (106), the processing drum (106) having a processing drum length along the longitudinal axis (112), and the processing drum (106) being adapted for receiving the stretched flexible substrate (110) at a first position (118) with respect to the vacuum chamber (120); and a charged particle beam device (108) adapted for charging at least a portion of the flexible substrate (110) on the processing drum (106) at a first area (114) with respect to the vacuum chamber (120). The ratio of the minimum distance between the first position (118) and the first area (114) along the surface of the processing drum in the direction of rotation of the processing drum (106) to the processing drum length is larger than 3: 100.
摘要翻译：提供了一种用于处理柔性基板（110）的系统（100）。该系统包括：真空室（120）; 第一辊（104）适于传送柔性基底（110）并适于侧向拉伸柔性基底（110）; 处理鼓（106），设置在所述真空室（120）中，所述处理鼓（106）可相对于所述处理鼓（106）的纵向轴线（112）旋转，所述处理鼓（106）具有处理鼓沿着纵向轴线（112）的长度，以及处理鼓（106）适于在相对于真空室（120）的第一位置（118）处接收拉伸的柔性基底（110）; 以及适于在相对于所述真空室（120）的第一区域（114）处对所述处理鼓（106）上的所述柔性基板（110）的至少一部分进行充电的带电粒子束装置（108）。沿着处理滚筒的表面处理滚筒（106）的旋转方向到处理滚筒长度的第一位置（118）和第一区域（114）之间的最小距离的比率大于3：100 。

2. 发明申请

WO1995022442A1 HYDRAULIC PAVING BREAKER 审中-公开
标题翻译：液压锤
公开(公告)号：WO1995022442A1
公开(公告)日：1995-08-24
申请号：PCT/EP1995000479
申请日：1995-02-10
申请人： KLEMM, Günter , WEBER, Emil
发明人： KLEMM, Günter
IPC分类号： B25D09/14
CPC分类号： B25D9/145
摘要： A paving breaker has a working piston (22) that strikes a striking surface (23). The hydraulically controlled working piston (22) is controlled back and forth by a controller (40, 41). The end portion (51) of the piston plunges into a rear chamber (50) arranged at the rear end of the working cylinder (21). A compressed gas accumulator (52) connected to the rear chamber (50) is loaded during each return stroke of the working piston and unloaded during the following working stroke.
摘要翻译：冲击锤具有一个活塞（22），所述笔画施加在击打面（23）。液压驱动工作活塞（22）由控制装置（40 41）往复地进行控制。在工作缸的后端（21）有一个后部空间（50），其中活塞（51）的方法是浸渍。在后部空间（50）被连接到其在在随后的工作冲程工作活塞和放电的每个返回行程加载的压缩气体存储（52）。

3. 发明申请

WO2016070940A1 APPARATUS AND METHOD FOR TREATMENT OF FLEXIBLE SUBSTRATES HAVING A LARGE WIDTH USING AN ELECTRON BEAM 审中-公开
标题翻译：用于处理使用电子束的大幅宽度的柔性基板的装置和方法
公开(公告)号：WO2016070940A1
公开(公告)日：2016-05-12
申请号：PCT/EP2014/074087
申请日：2014-11-07
申请人： APPLIED MATERIALS, INC. , KLEMM, Günter , HACKER, Volker , TRASSL, Roland
发明人： KLEMM, Günter , HACKER, Volker , TRASSL, Roland
IPC分类号： H01J3/02 , H01J37/077 , G21K5/10
CPC分类号： H01J3/025 , G21K5/04 , G21K5/10 , H01J37/077
摘要： According to the present disclosure, a charged particle device for treatment of a substrate and method for increasing the extraction efficiency of a charged particle device are provided. The charged particle device includes: a housing providing a first electrode, the housing having a back wall and a front wall; a slit opening in the housing; and a second electrode being arranged within the housing and having a first side facing the slit opening. The second electrode includes one or more beam shaping extension that protrude from the second electrode in a direction towards the front wall of the housing for guiding the charged particle beam through the slit opening.
摘要翻译：根据本公开，提供了一种用于处理基板的带电粒子装置和用于提高带电粒子装置的提取效率的方法。所述带电粒子装置包括：提供第一电极的壳体，所述壳体具有后壁和前壁; 壳体中的狭缝开口; 并且第二电极布置在壳体内并且具有面向狭缝开口的第一侧。第二电极包括一个或多个光束成形延伸部，其沿着朝向壳体的前壁的方向从第二电极突出，用于引导带电粒子束穿过狭缝开口。

4. 发明申请

WO2013004301A1 METHOD FOR PROCESSING A FLEXIBLE SUBSTRATE 审中-公开
标题翻译：处理柔性基板的方法
公开(公告)号：WO2013004301A1
公开(公告)日：2013-01-10
申请号：PCT/EP2011/061330
申请日：2011-07-05
申请人： APPLIED MATERIALS, INC. , HOFFMANN, Gerd , KLEMM, Günter , LOTZ, Hans-Georg , WOLFF, Alexander
发明人： HOFFMANN, Gerd , KLEMM, Günter , LOTZ, Hans-Georg , WOLFF, Alexander
IPC分类号： C08J3/28
CPC分类号： C08J3/28 , C08J2300/00 , C08J2323/00 , C08J2367/00 , C08J2377/00
摘要： A method of processing a flexible substrate includes providing a flexible substrate having a polymerized surface; emitting an electron beam; exposing the polymerized surface to the electron beam; modifying the polymerized surface by the exposure to the electron beam; and depositing a barrier layer on the modified surface.
摘要翻译：一种处理柔性基板的方法包括提供具有聚合表面的柔性基板; 发射电子束; 将聚合表面暴露于电子束; 通过暴露于电子束来修饰聚合表面; 以及在改性表面上沉积阻挡层。

5. 发明申请

WO1993008363A1 A PNEUMATIC HAMMER 审中-公开
标题翻译：气动锤子
公开(公告)号：WO1993008363A1
公开(公告)日：1993-04-29
申请号：PCT/EP1992002434
申请日：1992-10-23
申请人： ING. G. KLEMM BOHRTECHNIK GMBH , KLEMM, Günter, Willi
发明人： ING. G. KLEMM BOHRTECHNIK GMBH
IPC分类号： E21B04/14
CPC分类号： E21B4/14
摘要： A pneumatic hammer is provided with an adjusting means (37) dependent on the supply pressure, which adjusts the stroke length of the working piston (16). Thereby, the same pneumatic hammer may be operated both at low and high supply pressures. With high supply pressures, either the early ending of the acceleration phase or the early start of the compression phase or the shortening of the working cylinder shortens the stroke length. Thereby, the pneumatic hammer performs impacts with a substantially constant single-impact energy, regardless of the supply pressure. High supply pressures increase the impact frequency. This results in a considerably improved efficiency at a high drilling capacity, a reduced wear and a reduced risk of ruptures of the components of the hammer.
摘要翻译：气动锤设置有用于根据供应压力调节发动机活塞（16）的冲程长度的装置（37）。因此，相同的气锤可以在高或低进给压力下运行。当供应压力高时，加速阶段的提早结束，压缩阶段的早期开始或发动机气缸的缩短会缩短行程长度。因此，无论供应压力如何，所述气动锤都执行能量基本恒定的冲击。当供应压力高时，冲击频率增加，当钻孔能力高时，操作效率显着提高，减少磨损并降低故障风险。构成锤子的零件。

6. 发明申请

WO2016070939A1 APPARATUS AND METHOD FOR TREATMENT OF FLEXIBLE SUBSTRATES USING AN ELECTRON BEAM 审中-公开
标题翻译：使用电子束处理柔性基板的装置和方法
公开(公告)号：WO2016070939A1
公开(公告)日：2016-05-12
申请号：PCT/EP2014/074085
申请日：2014-11-07
申请人： APPLIED MATERIALS, INC. , KLEMM, Günter , HACKER, Volker , TRASSL, Roland
发明人： KLEMM, Günter , HACKER, Volker , TRASSL, Roland
IPC分类号： H01J37/077 , H01J37/304 , G21K5/10
CPC分类号： H01J37/077 , G21K5/04 , G21K5/10 , H01J37/304 , H01J2237/30455 , H01J2237/30483
摘要： According to the present disclosure, a charged particle device for treatment of a moveable substrate and a method for treatment of a moving substrate in a processing system are provided. The charged particle device includes a source for forming a beam of charged particles for treatment of the substrate moving along a transport direction and a beam displacement device for moving the beam of charged particles from a first beam trajectory to at least a second beam trajectory along the transport direction.
摘要翻译：根据本公开，提供了一种用于处理可移动基板的带电粒子装置和处理系统中的移动基板的处理方法。带电粒子装置包括用于形成用于处理沿输送方向移动的基底的带电粒子束的源和用于将带电粒子束从第一光束轨迹移动到至少第二光束轨迹的光束位移装置，运输方向。

7. 发明申请

WO1993008364A1 A PNEUMATIC HAMMER 审中-公开
标题翻译：气动锤子
公开(公告)号：WO1993008364A1
公开(公告)日：1993-04-29
申请号：PCT/EP1992002435
申请日：1992-10-23
申请人： ING. G. KLEMM BOHRTECHNIK GMBH , KLEMM, Günter, Willi
发明人： ING. G. KLEMM BOHRTECHNIK GMBH
IPC分类号： E21B04/14
CPC分类号： B25D9/26 , E21B4/14
摘要： A pneumatic hammer is provided with an adjusting means (37) dependent on the supply pressure, which adjusts the stroke length of the working piston (16). Thereby, the same pneumatic hammer may be operated both at low and high supply pressures. With high supply pressures, either the early ending of the acceleration phase or the early start of the compression phase or the shortening of the working cylinder shortens the stroke length. Thereby, the pneumatic hammer performs impacts with a substantially constant single-impact energy, regardless of the supply pressure. High supply pressures increase the impact frequency. This results in a considerably improved efficiency at a high drilling capacity, a reduced wear and a reduced risk of ruptures of the components of the hammer.

8. 发明申请

WO1992019837A2 EARTH BORER 审中-公开
标题翻译：地球轰炸机
公开(公告)号：WO1992019837A2
公开(公告)日：1992-11-12
申请号：PCT/EP1992000907
申请日：1992-04-24
申请人： ING. G. KLEMM BOHRTECHNIK GMBH , KLEMM, Günter, Willi
发明人： ING. G. KLEMM BOHRTECHNIK GMBH
IPC分类号： E21B19/08
CPC分类号： E21B19/086 , E21B7/20
摘要： The earth borer has an extended bearer (10) with a runway (11) to guide a main carriage (25). The drive device for the main carriage (25) consists of a piston-cylinder unit (27) extending beneath the runway (11) under the main carriage (25), the cylinder (28) of which is supported on the bearer (10) via a joint (29). The piston rod (30) engages with the front end of the main carriage (25). The piston-cylinder unit (27) projects beyond the rear end of the bearer only slightly or not at all.

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