发明申请
WO2016070940A1 APPARATUS AND METHOD FOR TREATMENT OF FLEXIBLE SUBSTRATES HAVING A LARGE WIDTH USING AN ELECTRON BEAM
审中-公开
基本信息:
- 专利标题： APPARATUS AND METHOD FOR TREATMENT OF FLEXIBLE SUBSTRATES HAVING A LARGE WIDTH USING AN ELECTRON BEAM
- 专利标题（中）：用于处理使用电子束的大幅宽度的柔性基板的装置和方法
- 申请号：PCT/EP2014/074087 申请日：2014-11-07
- 公开(公告)号：WO2016070940A1 公开(公告)日：2016-05-12
- 发明人： KLEMM, Günter , HACKER, Volker , TRASSL, Roland
- 申请人： APPLIED MATERIALS, INC. , KLEMM, Günter , HACKER, Volker , TRASSL, Roland
- 申请人地址： 3050 Bowers Avenue Santa Clara, California 95054 US
- 专利权人： APPLIED MATERIALS, INC.,KLEMM, Günter,HACKER, Volker,TRASSL, Roland
- 当前专利权人： APPLIED MATERIALS, INC.,KLEMM, Günter,HACKER, Volker,TRASSL, Roland
- 当前专利权人地址： 3050 Bowers Avenue Santa Clara, California 95054 US
- 代理机构： ZIMMERMANN & PARTNER
- 主分类号： H01J3/02
- IPC分类号： H01J3/02 ; H01J37/077 ; G21K5/10
摘要：
According to the present disclosure, a charged particle device for treatment of a substrate and method for increasing the extraction efficiency of a charged particle device are provided. The charged particle device includes: a housing providing a first electrode, the housing having a back wall and a front wall; a slit opening in the housing; and a second electrode being arranged within the housing and having a first side facing the slit opening. The second electrode includes one or more beam shaping extension that protrude from the second electrode in a direction towards the front wall of the housing for guiding the charged particle beam through the slit opening.
摘要（中）：
根据本公开，提供了一种用于处理基板的带电粒子装置和用于提高带电粒子装置的提取效率的方法。 所述带电粒子装置包括：提供第一电极的壳体，所述壳体具有后壁和前壁; 壳体中的狭缝开口; 并且第二电极布置在壳体内并且具有面向狭缝开口的第一侧。 第二电极包括一个或多个光束成形延伸部，其沿着朝向壳体的前壁的方向从第二电极突出，用于引导带电粒子束穿过狭缝开口。