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    • 9. 发明申请
    • PRE-GROOVING FOR WAFER APPLIED UNDERFILL FILM
    • 用于适用于未完成的膜的预浸料
    • WO2012135243A1
    • 2012-10-04
    • PCT/US2012/030783
    • 2012-03-28
    • HENKEL CORPORATIONKIM, YounSangHOANG, GinaGUINO, Rose
    • KIM, YounSangHOANG, GinaGUINO, Rose
    • H01L21/78H01L21/301
    • H01L21/78
    • A method for preparing a silicon wafer into individual semiconductor dies, in which the silicon wafer has preapplied underfill disposed over its active circuitry, comprises (a) providing a silicon wafer with active circuitry on one face; (b) making grooves between the active circuitry in those locations on the wafer face surface where later dicing into individual semiconductor dies will occur; (c) applying an underfill encapsulant over the active circuitry and grooves on the silicon wafer face; and (d) cutting into and through the underfill encapsulant, the grooves in the active circuitry, and the silicon wafer, to separate the wafer into individual semiconductor dies.
    • 一种用于将硅晶片制备成单个半导体管芯的方法,其中硅晶片预先施加在其有源电路上设置的底部填充物包括(a)在一个面上提供具有有源电路的硅晶片; (b)在晶片表面上的那些位置中的有源电路之间形成凹槽,随后将切割成单独的半导体管芯; (c)将底部填充密封剂施加在硅晶片表面上的有源电路和沟槽上; 和(d)切入并穿过底部填充密封剂,有源电路中的凹槽和硅晶片,以将晶片分离成单独的半导体管芯。