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    • 1. 发明申请
    • EVAPORATOR AND VACUUM DEPOSITION APPARATUS HAVING THE SAME
    • 蒸发器和真空沉积装置
    • WO2009134041A3
    • 2010-02-04
    • PCT/KR2009002185
    • 2009-04-27
    • SUNIC SYSTEM LTDKIM JONG WOONLEE JAE SEUNGCHA DONG ILKIM SUN HYUKHWANG IN HO
    • KIM JONG WOONLEE JAE SEUNGCHA DONG ILKIM SUN HYUKHWANG IN HO
    • C23C14/24
    • C23C14/243
    • Provided are an evaporator for fabricating an organic light emitting device, and a vacuum deposition apparatus including the evaporator. The evaporator includes a pot storing organic matter, a pot cover covering an opening of the pot, and evaporation outlets spaced apart from each other to evaporate the organic matter. The evaporator further includes a shield plate disposed over the pot cover and preventing heat radiation, and a heating member preventing the clogging of the evaporation outlets between the pot cover and the shield plate. The evaporation outlets, evaporating organic matter, are different from each other in length to improve the uniformity of a deposited thin film and prevent the loss of the organic matter. The shield plate, preventing heat radiation to a substrate, protects the substrate or a thin film on the substrate from thermal damage.
    • 提供了一种用于制造有机发光器件的蒸发器和包括蒸发器的真空沉积设备。 蒸发器包括储存有机物的罐,覆盖锅的开口的锅盖和彼此间隔开的蒸发出口以蒸发有机物质。 蒸发器还包括设置在锅盖上并防止热辐射的屏蔽板,以及防止罐盖和屏蔽板之间的蒸发出口堵塞的加热构件。 蒸发出口,蒸发有机物质的长度彼此不同,以提高沉积薄膜的均匀性并防止有机物质的损失。 屏蔽板防止对衬底的热辐射,保护衬底或衬底上的薄膜免受热损伤。