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1. 发明申请

WO2008120882A1 APPARATUS FOR INSPECTION OF THREE-DIMENSIONAL SHAPE AND METHOD FOR INSPECTION USING THE SAME 审中-公开
标题翻译：用于检查三维形状的装置和使用其进行检查的方法
公开(公告)号：WO2008120882A1
公开(公告)日：2008-10-09
申请号：PCT/KR2008/001635
申请日：2008-03-24
申请人： INTEKPLUS CO., LTD , LIM, Ssang-gun , LEE, Sang-yun , KANG, Mingu
发明人： LIM, Ssang-gun , LEE, Sang-yun , KANG, Mingu
IPC分类号： G01B11/24
CPC分类号： G01B11/25
摘要： An apparatus for inspection of a three-dimensional shape, capable of selectively adjusting reflectivity or visibility of the surface of an inspection object, and a method for inspection using the same are disclosed. The apparatus includes a light source, a grid pattern generating unit which generates a grid pattern on a surface of an inspection object by transforming light generated from the light source, and an imaging unit which captures an image reflected from the surface of the inspection object, wherein the three-dimensional shape of the inspection object is measured from the image captured by the imaging unit to determine whether there is a defect of the inspection object based on measurement results, and wherein the grid pattern generating unit includes a pixel-based display control unit which controls brightness of each pixel according to surface reflectivity of the inspection object to generate a certain grid pattern.
摘要翻译：公开了一种用于检查能够选择性地调节检查对象的表面的反射率或可视性的三维形状的装置以及使用其的检查方法。该装置包括光源，网格图案生成单元，其通过转换从光源产生的光来在检查对象的表面上产生网格图案;以及摄像单元，其拍摄从检查对象的表面反射的图像，其特征在于，所述检查对象的三维形状是根据由所述摄像部拍摄到的图像来测量的，以基于测量结果确定是否存在所述检查对象的缺陷，并且所述网格图案生成单元包括基于像素的显示控制单元，其根据检查对象的表面反射率来控制每个像素的亮度，以产生特定的网格图案。

2. 发明申请

WO2009078617A4 SURFACE SHAPE MEASURING SYSTEM AND SURFACE SHAPE MEASURING METHOD USING THE SAME 审中-公开
公开(公告)号：WO2009078617A4
公开(公告)日：2009-06-25
申请号：PCT/KR2008/007314
申请日：2008-12-10
申请人： INTEKPLUS CO., LTD , LEE, Sang-yun , KANG, MinGu , LIM, Ssang-gun
发明人： LEE, Sang-yun , KANG, MinGu , LIM, Ssang-gun
IPC分类号： G01B11/24
摘要： The surface shape measuring system includes an illumination unit including a main light source, a focusing lens, and a projection lens; a beam splitter to split illumination light emitted respectively irradiated onto a reference surface and a measurement surface; a light detecting element to capture an interference pattern; and a control computer to obtain surface shape data through white-light interference pattern analysis from an image captured and detect whether or not the measurement surface is defective from the obtained data, wherein a subsidiary light source to provide falling illumination to the target object; and two-dimensional data and three-dimensional data regarding the surface shape of the target object are obtained by selectively intermitting the turning-on of the main light source and the subsidiary light source and the irradiation of the illumination light onto the reference surface.

3. 发明申请

WO2009078617A2 SURFACE SHAPE MEASURING SYSTEM AND SURFACE SHAPE MEASURING METHOD USING THE SAME 审中-公开
标题翻译：表面形状测量系统及其表面形状测量方法
公开(公告)号：WO2009078617A2
公开(公告)日：2009-06-25
申请号：PCT/KR2008007314
申请日：2008-12-10
申请人： INTEKPLUS CO LTD , LEE SANG-YUN , KANG MINGU , LIM SSANG-GUN
发明人： LEE SANG-YUN , KANG MINGU , LIM SSANG-GUN
IPC分类号： G01B11/24
CPC分类号： G01B11/2441
摘要： The surface shape measuring system includes an illumination unit including a main light source, a focusing lens, and a projection lens; a beam splitter to split illumination light emitted respectively irradiated onto a reference surface and a measurement surface; a light detecting element to capture an interference pattern; and a control computer to obtain surface shape data through white-light interference pattern analysis from an image captured and detect whether or not the measurement surface is defective from the obtained data, wherein a subsidiary light source to provide falling illumination to the target object; and two-dimensional data and three-dimensional data regarding the surface shape of the target object are obtained by selectively intermitting the turning-on of the main light source and the subsidiary light source and the irradiation of the illumination light onto the reference surface.
摘要翻译：该表面形状测量系统包括：包括主光源，聚焦透镜和投影透镜的照明单元; 分束器，将分别照射到参考表面和测量表面上的照射光分开; 光检测元件，用于捕获干涉图案; 以及控制计算机，用于通过从所拍摄的图像中的白光干涉图案分析来获得表面形状数据，并且从所获得的数据中检测测量表面是否有缺陷，其中，用于向目标对象提供下落照明的辅助光源; 并且通过选择性地中断主光源和辅助光源的开启以及照射光到基准表面上的照射来获得关于目标物体的表面形状的二维数据和三维数据。

4. 发明申请

WO2009078616A4 THREE-DIMENSIONAL SHAPE MEASURING APPARATUS 审中-公开
标题翻译：三维形状测量仪器
公开(公告)号：WO2009078616A4
公开(公告)日：2009-10-08
申请号：PCT/KR2008007313
申请日：2008-12-10
申请人： INTEKPLUS CO LTD , YOU JOON-HO , KANG MINGU , LIM SSANG-GUN
发明人： YOU JOON-HO , KANG MINGU , LIM SSANG-GUN
IPC分类号： G01B11/24
CPC分类号： G01B11/2441 , G01B9/02028 , G01B2290/35
摘要： The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.
摘要翻译：该三维形状测量装置包括光源; 分束器，用于分离来自光源的照明光; 要测量的目标物体，其在最高点和最低点之间具有高度差; 参考反射镜，其上照射从分束器发射的另一个光束; 光检测元件，用于检测由所述目标物体的表面反射的物体光束与由所述参考反射镜的表面反射的参考光束的干涉而产生的干涉图案; 以及控制计算机，用于处理由光检测元件检测到的图像，其中，在分束器和参考镜之间设置辅助参考光束产生单元，用于改变来自分束器的光束的光路以产生辅助参考光束。

5. 发明申请

WO2009078616A2 THREE-DIMENSIONAL SHAPE MEASURING APPARATUS 审中-公开
标题翻译：三维形状测量仪器
公开(公告)号：WO2009078616A2
公开(公告)日：2009-06-25
申请号：PCT/KR2008/007313
申请日：2008-12-10
申请人： INTEKPLUS CO., LTD , YOU, Joon-Ho , KANG, MinGu , LIM, Ssang-gun
发明人： YOU, Joon-Ho , KANG, MinGu , LIM, Ssang-gun
IPC分类号： G01B11/24
CPC分类号： G01B11/2441 , G01B9/02028 , G01B2290/35
摘要： The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.
摘要翻译：该三维形状测量装置包括光源; 分束器，用于分离来自光源的照明光; 要测量的目标物体，其在最高点和最低点之间具有高度差; 参考反射镜，其上照射从分束器发射的另一个光束; 光检测元件，用于检测由所述目标物体的表面反射的物体光束与由所述参考反射镜的表面反射的参考光束的干涉而产生的干涉图案; 以及控制计算机，用于处理由光检测元件检测到的图像，其中，在分束器和参考镜之间设置辅助参考光束产生单元，用于改变来自分束器的光束的光路以产生辅助参考光束

6. 发明申请

WO2009038242A1 OPTICAL TEST METHOD 审中-公开
标题翻译：光学测试方法
公开(公告)号：WO2009038242A1
公开(公告)日：2009-03-26
申请号：PCT/KR2007/004483
申请日：2007-09-18
申请人： INTEKPLUS CO., LTD. , IM, Ssang-geun , LEE, Sang-Yun , KANG, Mingu , JANG, Seok-Joon
发明人： IM, Ssang-geun , LEE, Sang-Yun , KANG, Mingu , JANG, Seok-Joon
IPC分类号： G01B11/24
CPC分类号： G01B11/24 , G01N21/25 , G01N21/8806 , G01N21/95684
摘要： An optical test method captures an external appearance image of a target object, analyzes the captured image, and determines the presence or absence of a defect in the target object according to the analyzed result. The optical test method mounts different BPFs to several white lights, illuminates an illumination light signal on the test surface to acquire a wavelength band on which a lattice image is clearly shown, divides the acquired color image into several wavelengths, calculates individual phases of the divided images at the wavelengths, adds the calculated phases, calculates the added result as a single phase, analyzes the calculated single phase, and determines the presence or absence of a defect.
摘要翻译：光学测试方法捕获目标对象的外观图像，分析捕获的图像，并根据分析结果确定目标对象中缺陷的存在或不存在。光学测试方法将不同的BPF安装到几个白光，照亮测试表面上的照明光信号，以获得清楚显示晶格图像的波长带，将获取的彩色图像分成几个波长，计算分割的各个相位波长上的图像，加上计算的相位，将相加的结果计算为单相，分析计算的单相，并确定缺陷的存在或不存在。

7. 发明申请

WO2009078617A3 SURFACE SHAPE MEASURING SYSTEM AND SURFACE SHAPE MEASURING METHOD USING THE SAME 审中-公开
标题翻译：表面形状测量系统和表面形状测量方法
公开(公告)号：WO2009078617A3
公开(公告)日：2009-08-13
申请号：PCT/KR2008007314
申请日：2008-12-10
申请人： INTEKPLUS CO LTD , LEE SANG-YUN , KANG MINGU , LIM SSANG-GUN
发明人： LEE SANG-YUN , KANG MINGU , LIM SSANG-GUN
IPC分类号： G01B11/24
CPC分类号： G01B11/2441
摘要： The surface shape measuring system includes an illumination unit including a main light source, a focusing lens, and a projection lens; a beam splitter to split illumination light emitted respectively irradiated onto a reference surface and a measurement surface; a light detecting element to capture an interference pattern; and a control computer to obtain surface shape data through white-light interference pattern analysis from an image captured and detect whether or not the measurement surface is defective from the obtained data, wherein a subsidiary light source to provide falling illumination to the target object; and two-dimensional data and three-dimensional data regarding the surface shape of the target object are obtained by selectively intermitting the turning-on of the main light source and the subsidiary light source and the irradiation of the illumination light onto the reference surface.
摘要翻译：所述表面形状测量系统包括：包括主光源，聚焦透镜和投影透镜的照明单元; 分光器，用于将分别照射到参考表面和测量表面上的照射光分离; 用于捕获干涉图案的光检测元件; 以及控制计算机，通过从所拍摄的图像通过白光干涉图案分析获得表面形状数据，并从所获得的数据检测测量表面是否有缺陷，其中辅助光源向目标物体提供落下的照明; 并且通过选择性地将主光源和辅助光源的接通以及照射光照射到参考表面上来获得关于目标物体的表面形状的二维数据和三维数据。

8. 发明申请

WO2009078616A3 THREE-DIMENSIONAL SHAPE MEASURING APPARATUS 审中-公开
标题翻译：三维形状测量装置
公开(公告)号：WO2009078616A3
公开(公告)日：2009-08-13
申请号：PCT/KR2008007313
申请日：2008-12-10
申请人： INTEKPLUS CO LTD , YOU JOON-HO , KANG MINGU , LIM SSANG-GUN
发明人： YOU JOON-HO , KANG MINGU , LIM SSANG-GUN
IPC分类号： G01B11/24
CPC分类号： G01B11/2441 , G01B9/02028 , G01B2290/35
摘要： The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.
摘要翻译：三维形状测量装置包括光源; 分束器，用于分离来自光源的照明光; 要测量的目标对象，具有最高点和最低点之间的高度差; 参考镜，在其上照射从分束器发射的另一个光束; 光检测元件，用于检测由目标物体的表面反射的物体光束的干涉产生的干涉图案和由参考反射镜的表面反射的参考光束; 以及控制计算机，用于处理由光检测元件检测到的图像，其中，在分束器和参考镜之间设置有用于改变来自分束器的光束的光路以产生辅助参考光束的辅助参考光束产生单元。

9. 发明申请

WO2009044944A1 OPTICAL TEST METHOD 审中-公开
标题翻译：光学测试方法
公开(公告)号：WO2009044944A1
公开(公告)日：2009-04-09
申请号：PCT/KR2007/004807
申请日：2007-10-02
申请人： INTEKPLUS CO., LTD. , IM, Ssang-geun , LEE, Sang-yun , KANG, Mingu , JANG, Seok-joon
发明人： IM, Ssang-geun , LEE, Sang-yun , KANG, Mingu , JANG, Seok-joon
IPC分类号： G01B11/24
CPC分类号： G01B11/2513
摘要： An optical test method acquires not only an image having a low regular reflection rate on a regular reflection surface, but also a peripheral image on which a peripheral lattice plane in the vicinity of a regular reflection surface is clearly seen, employs the acquired images, and improves the accuracy of a target image to be measured. The optical test method projects a lattice pattern on a target object on which a 3D image is formed, compares an optical signal modified by the shape of the target object with a reference pattern, and determines the presence or absence of a defect in the target object according to the comparison result.
摘要翻译：光学测试方法不仅可以获得在正反射面上具有低正常反射率的图像，而且可以清楚地看到在正反射面附近的外围晶格面的外围图像，采用所获取的图像，以及提高要测量的目标图像的精度。光学测试方法在其上形成3D图像的目标对象上投射格子图案，将由目标对象的形状修改的光学信号与参考图案进行比较，并且确定目标对象中存在或不存在缺陷根据比较结果。

10. 发明申请

WO2012061666A1 STABLE SRAM BITCELL DESIGN UTILIZING INDEPENDENT GATE FINFET 审中-公开
标题翻译： STABLE SRAM BITCELL设计利用独立的栅极FINFET
公开(公告)号：WO2012061666A1
公开(公告)日：2012-05-10
申请号：PCT/US2011/059247
申请日：2011-11-04
申请人： QUALCOMM INCORPORATED , JUNG, Seong-Ook , KANG, Mingu , PARK, Hyunkook , SONG, Seung-Chul , ABU-RAHAMA, Mohamed , HAN, Beom-Mo , GE, Lixin , WANG, Zhongze
发明人： JUNG, Seong-Ook , KANG, Mingu , PARK, Hyunkook , SONG, Seung-Chul , ABU-RAHAMA, Mohamed , HAN, Beom-Mo , GE, Lixin , WANG, Zhongze
IPC分类号： G11C11/412 , H01L21/8244 , H01L27/11
CPC分类号： G11C11/4125 , H01L27/1104 , Y10T29/49117
摘要： Stable SRAM cells utilizing Independent Gate FinFET architectures provide improvements over conventional SRAM cells in device parameters such as Read Static Noise Margin (RSNM) and Write Noise Margin (WNM). Exemplary SRAM cells comprise a pair of storage nodes, a pair of bit lines, a pair of pull-up devices, a pair of pull-down devices and a pair of pass-gate devices. A first control signal and a second control signal are configured to adjust drive strengths of the pass-gate devices, and a third control signal is configured to adjust drive strengths of the pull-up devices, wherein the first control signal is routed orthogonal to a bit line direction, and the second and third control signals are routed in a direction same as the bit line direction. RSNM and WNM are improved by adjusting drive strengths of the pull-up and pass-gate devices during read and write operations.
摘要翻译：利用独立栅极FinFET架构的稳定SRAM单元提供了诸如读静态噪声余量（RSNM）和写噪声余量（WNM）的器件参数中的常规SRAM单元的改进。示例性SRAM单元包括一对存储节点，一对位线，一对上拉器件，一对下拉器件和一对通栅器件。第一控制信号和第二控制信号被配置为调整传递门装置的驱动强度，并且第三控制信号被配置为调节上拉装置的驱动强度，其中第一控制信号被正交地传送到位线方向，并且第二和第三控制信号沿与位线方向相同的方向路由。通过在读写操作期间调整上拉和通过栅极器件的驱动强度，RSNM和WNM得到了改进。

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