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1. 发明申请

WO2009078617A2 SURFACE SHAPE MEASURING SYSTEM AND SURFACE SHAPE MEASURING METHOD USING THE SAME 审中-公开
标题翻译：表面形状测量系统及其表面形状测量方法
公开(公告)号：WO2009078617A2
公开(公告)日：2009-06-25
申请号：PCT/KR2008007314
申请日：2008-12-10
申请人： INTEKPLUS CO LTD , LEE SANG-YUN , KANG MINGU , LIM SSANG-GUN
发明人： LEE SANG-YUN , KANG MINGU , LIM SSANG-GUN
IPC分类号： G01B11/24
CPC分类号： G01B11/2441
摘要： The surface shape measuring system includes an illumination unit including a main light source, a focusing lens, and a projection lens; a beam splitter to split illumination light emitted respectively irradiated onto a reference surface and a measurement surface; a light detecting element to capture an interference pattern; and a control computer to obtain surface shape data through white-light interference pattern analysis from an image captured and detect whether or not the measurement surface is defective from the obtained data, wherein a subsidiary light source to provide falling illumination to the target object; and two-dimensional data and three-dimensional data regarding the surface shape of the target object are obtained by selectively intermitting the turning-on of the main light source and the subsidiary light source and the irradiation of the illumination light onto the reference surface.
摘要翻译：该表面形状测量系统包括：包括主光源，聚焦透镜和投影透镜的照明单元; 分束器，将分别照射到参考表面和测量表面上的照射光分开; 光检测元件，用于捕获干涉图案; 以及控制计算机，用于通过从所拍摄的图像中的白光干涉图案分析来获得表面形状数据，并且从所获得的数据中检测测量表面是否有缺陷，其中，用于向目标对象提供下落照明的辅助光源; 并且通过选择性地中断主光源和辅助光源的开启以及照射光到基准表面上的照射来获得关于目标物体的表面形状的二维数据和三维数据。

2. 发明申请

WO2009078617A3 SURFACE SHAPE MEASURING SYSTEM AND SURFACE SHAPE MEASURING METHOD USING THE SAME 审中-公开
标题翻译：表面形状测量系统和表面形状测量方法
公开(公告)号：WO2009078617A3
公开(公告)日：2009-08-13
申请号：PCT/KR2008007314
申请日：2008-12-10
申请人： INTEKPLUS CO LTD , LEE SANG-YUN , KANG MINGU , LIM SSANG-GUN
发明人： LEE SANG-YUN , KANG MINGU , LIM SSANG-GUN
IPC分类号： G01B11/24
CPC分类号： G01B11/2441
摘要： The surface shape measuring system includes an illumination unit including a main light source, a focusing lens, and a projection lens; a beam splitter to split illumination light emitted respectively irradiated onto a reference surface and a measurement surface; a light detecting element to capture an interference pattern; and a control computer to obtain surface shape data through white-light interference pattern analysis from an image captured and detect whether or not the measurement surface is defective from the obtained data, wherein a subsidiary light source to provide falling illumination to the target object; and two-dimensional data and three-dimensional data regarding the surface shape of the target object are obtained by selectively intermitting the turning-on of the main light source and the subsidiary light source and the irradiation of the illumination light onto the reference surface.
摘要翻译：所述表面形状测量系统包括：包括主光源，聚焦透镜和投影透镜的照明单元; 分光器，用于将分别照射到参考表面和测量表面上的照射光分离; 用于捕获干涉图案的光检测元件; 以及控制计算机，通过从所拍摄的图像通过白光干涉图案分析获得表面形状数据，并从所获得的数据检测测量表面是否有缺陷，其中辅助光源向目标物体提供落下的照明; 并且通过选择性地将主光源和辅助光源的接通以及照射光照射到参考表面上来获得关于目标物体的表面形状的二维数据和三维数据。

3. 发明申请

WO2009078616A4 THREE-DIMENSIONAL SHAPE MEASURING APPARATUS 审中-公开
标题翻译：三维形状测量仪器
公开(公告)号：WO2009078616A4
公开(公告)日：2009-10-08
申请号：PCT/KR2008007313
申请日：2008-12-10
申请人： INTEKPLUS CO LTD , YOU JOON-HO , KANG MINGU , LIM SSANG-GUN
发明人： YOU JOON-HO , KANG MINGU , LIM SSANG-GUN
IPC分类号： G01B11/24
CPC分类号： G01B11/2441 , G01B9/02028 , G01B2290/35
摘要： The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.
摘要翻译：该三维形状测量装置包括光源; 分束器，用于分离来自光源的照明光; 要测量的目标物体，其在最高点和最低点之间具有高度差; 参考反射镜，其上照射从分束器发射的另一个光束; 光检测元件，用于检测由所述目标物体的表面反射的物体光束与由所述参考反射镜的表面反射的参考光束的干涉而产生的干涉图案; 以及控制计算机，用于处理由光检测元件检测到的图像，其中，在分束器和参考镜之间设置辅助参考光束产生单元，用于改变来自分束器的光束的光路以产生辅助参考光束。

4. 发明申请

WO2009078616A3 THREE-DIMENSIONAL SHAPE MEASURING APPARATUS 审中-公开
标题翻译：三维形状测量装置
公开(公告)号：WO2009078616A3
公开(公告)日：2009-08-13
申请号：PCT/KR2008007313
申请日：2008-12-10
申请人： INTEKPLUS CO LTD , YOU JOON-HO , KANG MINGU , LIM SSANG-GUN
发明人： YOU JOON-HO , KANG MINGU , LIM SSANG-GUN
IPC分类号： G01B11/24
CPC分类号： G01B11/2441 , G01B9/02028 , G01B2290/35
摘要： The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.
摘要翻译：三维形状测量装置包括光源; 分束器，用于分离来自光源的照明光; 要测量的目标对象，具有最高点和最低点之间的高度差; 参考镜，在其上照射从分束器发射的另一个光束; 光检测元件，用于检测由目标物体的表面反射的物体光束的干涉产生的干涉图案和由参考反射镜的表面反射的参考光束; 以及控制计算机，用于处理由光检测元件检测到的图像，其中，在分束器和参考镜之间设置有用于改变来自分束器的光束的光路以产生辅助参考光束的辅助参考光束产生单元。

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