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1. 发明申请

WO2019105534A1 DEPOSITION APPARATUS, METHOD OF COATING A FLEXIBLE SUBSTRATE AND FLEXIBLE SUBSTRATE HAVING A COATING 审中-公开
公开(公告)号：WO2019105534A1
公开(公告)日：2019-06-06
申请号：PCT/EP2017/080694
申请日：2017-11-28
申请人： APPLIED MATERIALS, INC. , HABERKORN, Edgar , LORENZ, Stefan , HEIN, Stefan , MORRISON, Neil , KUKLA, Reiner , KURTHEN, Christof , DEPPISCH, Thomas
发明人： HABERKORN, Edgar , LORENZ, Stefan , HEIN, Stefan , MORRISON, Neil , KUKLA, Reiner , KURTHEN, Christof , DEPPISCH, Thomas
IPC分类号： C23C14/06 , C23C14/34 , C23C14/56 , C23C14/58
摘要： A deposition apparatus (100) for coating a flexible substrate (10) is described. The deposition apparatus includes a first spool chamber (110) housing a storage spool (112) for providing the flexible substrate (10), a deposition chamber (120) arranged downstream from the first spool chamber (110), and a second spool chamber (150) arranged downstream from the deposition chamber (120) and housing a wind-up spool (152) for winding the flexible substrate (10) thereon after deposition. The deposition chamber (120) includes a coating drum (122) for guiding the flexible substrate past a plurality of deposition units (121) including at least one deposition unit (124) having a graphite target (125). Further, the deposition chamber (120) includes a coating treatment device (160) configured to densify a layer deposited on the flexible substrate.

2. 发明申请

WO2018149510A1 DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE AND METHOD OF COATING A FLEXIBLE SUBSTRATE 审中-公开
公开(公告)号：WO2018149510A1
公开(公告)日：2018-08-23
申请号：PCT/EP2017/053790
申请日：2017-02-20
申请人： APPLIED MATERIALS, INC. , METT, Valerius , DEPPISCH, Thomas , HEIN, Stefan , ULRICH, Jürgen , KURTHEN, Christof
发明人： METT, Valerius , DEPPISCH, Thomas , HEIN, Stefan , ULRICH, Jürgen , KURTHEN, Christof
IPC分类号： C23C14/56 , C23C16/54 , C23C16/44
CPC分类号： C23C14/562 , C23C14/564 , C23C14/566 , C23C16/4409 , C23C16/545
摘要： A deposition apparatus (100) for coating a flexible substrate (10) with at least one layer is described. The deposition apparatus comprises: a first spool chamber (110) configured for housing a storage spool for providing the flexible substrate; a first deposition chamber (120) arranged downstream from the first spool chamber and comprising a first coating drum (122) configured for guiding the flexible substrate past a first plurality of deposition units (121); a second deposition chamber (140) arranged downstream from the first deposition chamber (120) and comprising a second coating drum (142) configured for guiding the flexible substrate past a second plurality of deposition units (141); a second spool chamber arranged downstream from the second deposition chamber (140) and configured for housing a wind-up spool for winding the flexible substrate thereon after deposition; and a roller assembly configured to transport the flexible substrate (10) along a partially convex and partially concave substrate transportation path from the first spool chamber to the second spool chamber. Further, a method of coating a flexible substrate, particularly with the described deposition apparatus, is described.

3. 发明申请

WO2018130300A1 LAYER SYSTEM ADAPTED FOR USE IN AN ELECTRO-OPTICAL DEVICE AND METHOD FOR MANUFACTURING A LAYER SYSTEM IN A CONTINUOUS ROLL-TO-ROLL PROCESS 审中-公开
公开(公告)号：WO2018130300A1
公开(公告)日：2018-07-19
申请号：PCT/EP2017/050692
申请日：2017-01-13
申请人： APPLIED MATERIALS, INC. , MORRISON, Neil , DIEGUEZ-CAMPO, Jose Manuel , LANDGRAF, Heike , HEIN, Stefan , STOLLEY, Tobias
发明人： MORRISON, Neil , DIEGUEZ-CAMPO, Jose Manuel , LANDGRAF, Heike , HEIN, Stefan , STOLLEY, Tobias
IPC分类号： C23C16/02 , C23C16/40 , C23C16/54 , C23C28/04 , G06F3/044 , H01L51/50
摘要： A layer system (100) adapted for use in an electro-optical device is described. The layer system includes a flexible substrate (101), a planarization layer (110) provided on the flexible substrate (101), and a transparent conductive oxide layer (120) provided on the planarization layer (110), wherein the planarization layer (110) is configured to encapsulate defects on the flexible substrate (101), and wherein the planarization layer is configured to covalently bind to the surface of the flexible substrate.

4. 发明申请

WO2010089662A2 MODULAR PVD SYSTEM FOR FLEX PV 审中-公开
标题翻译： FLEX PV模块化PVD系统
公开(公告)号：WO2010089662A2
公开(公告)日：2010-08-12
申请号：PCT/IB2010/000231
申请日：2010-02-05
申请人： APPLIED MATERIALS, INC. , HEIN, Stefan , HERZOG, Andre , SAUER, Peter , MORRISON, Neil
发明人： HEIN, Stefan , HERZOG, Andre , SAUER, Peter , MORRISON, Neil
IPC分类号： H01L31/042 , H01L31/045 , H01L21/203
CPC分类号： H01L31/1876 , C23C14/086 , C23C14/205 , C23C14/562 , C23C14/568 , H01L21/67155 , H01L21/67173 , H01L21/67207 , H01L21/67236 , Y02E10/50 , Y02P70/521
摘要： A system for thin film deposition on a flexible substrate having at least a first deposition region is described. The system includes a first chamber being based on a platform, wherein the first deposition region is within the first chamber, wherein the first chamber has a first support member configuration configured for supporting at least two different substrate guiding systems and wherein one substrate guiding system is supported by the first support member configuration, and wherein the platform is configured for at least two different deposition units and wherein one deposition unit of the at least two different deposition units is enclosed by the first chamber.
摘要翻译：描述了具有至少第一沉积区域的柔性基板上的薄膜沉积系统。该系统包括基于平台的第一室，其中第一沉积区域在第一室内，其中第一室具有构造成用于支撑至少两个不同的衬底引导系统的第一支撑构件配置，并且其中一个衬底引导系统是由所述第一支撑构件构造支撑，并且其中所述平台构造成用于至少两个不同的沉积单元，并且其中所述至少两个不同沉积单元中的一个沉积单元被所述第一室包围。

5. 发明申请

WO2010035128A3 EVAPORATOR FOR ORGANIC MATERIALS AND METHOD FOR EVAPORATING ORGANIC MATERIALS 审中-公开
公开(公告)号：WO2010035128A3
公开(公告)日：2010-04-01
申请号：PCT/IB2009/006988
申请日：2009-09-29
申请人： APPLIED MATERIALS, INC. , HEIN, Stefan , HOFFMANN, Gerd , SKUK, Peter
发明人： HEIN, Stefan , HOFFMANN, Gerd , SKUK, Peter
IPC分类号： C23C14/24
摘要： An evaporator for vaporizing an organic material to be deposited on a flexible substrate is described. The evaporator includes an evaporation tube having a wall encompassing a cavity for vaporizing the organic material; at least one heating device arranged adjacent to the wall and being adapted to heat the evaporation tube; at least one nozzle assembly protruding from the evaporation tube, wherein the nozzle assembly further comprises a nozzle cover with an opening; and a shutter for selectively opening and closing the opening of the nozzle cover, wherein the shutter is adapted to have in operation of the evaporation tube a temperature within a shutter temperature range of 140°C such that the temperature of the nozzle cover is within the shutter temperature range.

6. 发明申请

WO2017202444A1 METHOD OF MANUFACTURING A BATTERY, VACUUM PROCESSING APPARATUS AND BATTERY 审中-公开
标题翻译：制造电池的方法，真空处理装置和电池
公开(公告)号：WO2017202444A1
公开(公告)日：2017-11-30
申请号：PCT/EP2016/061567
申请日：2016-05-23
申请人： APPLIED MATERIALS, INC. , DIETER, Torsten Bruno , HEIN, Stefan , DEPPISCH, Thomas
发明人： DIETER, Torsten Bruno , HEIN, Stefan , DEPPISCH, Thomas
IPC分类号： H01M4/04 , H01M4/38 , H01M4/40
CPC分类号： H01M4/0421 , H01M2/1673 , H01M4/0407 , H01M10/0431 , H01M10/0525 , H01M10/0587
摘要： The present disclosure provides a method of manufacturing a battery. The method includes providing a separator film, processing the separator film by at least two of the actions of depositing an anode material layer onto a first side of the separator film, depositing a cathode material layer onto a second side of the separator film opposite to the first side, coating the anode material layer with an anode contact, and coating the cathode material layer with an anode contact. At least two of these actions are carried out without a break in vacuum in the vacuum processing environment.
摘要翻译：本公开提供了一种制造电池的方法。该方法包括提供分隔膜，通过将阳极材料层沉积到分隔膜的第一侧上的操作中的至少两种来处理分隔膜，将阴极材料层沉积到分隔膜的与第一侧相反的第二侧上第一侧，用阳极触点涂覆阳极材料层，并用阳极触点涂覆阴极材料层。这些行为中至少有两个是在真空处理环境中没有真空中断的情况下进行的。

7. 发明申请

WO2015007858A1 CLEANING METHOD FOR THIN-FILM PROCESSING APPLICATIONS AND APPARATUS FOR USE THEREIN 审中-公开
标题翻译：薄膜加工应用的清洗方法及其使用的装置
公开(公告)号：WO2015007858A1
公开(公告)日：2015-01-22
申请号：PCT/EP2014/065424
申请日：2014-07-17
申请人： APPLIED MATERIALS, INC. , RIES, Florian , HEIN, Stefan , LORENZ, Stefan , MORRISON, Neil , STOLLEY, Tobias
发明人： RIES, Florian , HEIN, Stefan , LORENZ, Stefan , MORRISON, Neil , STOLLEY, Tobias
IPC分类号： H01J37/32
CPC分类号： C23C16/4405 , H01J37/3277 , H01J37/32862 , Y10T428/18 , Y10T428/192
摘要： According to the present disclosure, a method for cleaning the processing chamber of a flexible substrate processing apparatus without breaking the vacuum in the processing chamber is provided. The method for cleaning the processing chamber includes guiding a sacrificial foil into the processing chamber; initiating a first pump process in the processing chamber; plasma cleaning the processing chamber while the sacrificial foil is provided in the processing chamber; initiating a second pump process in the processing chamber; and guiding the sacrificial foil out of the processing chamber.
摘要翻译：根据本公开，提供了一种用于清洁柔性基板处理设备的处理室而不破坏处理室中的真空的方法。用于清洁处理室的方法包括将牺牲箔引导到处理室中; 在处理室中启动第一泵过程; 等离子体清洁处理室，同时牺牲箔设置在处理室中; 在处理室中启动第二泵过程; 并将牺牲箔引导出处理室。

8. 发明申请

WO2012072132A1 EVAPORATION UNIT AND VACUUM COATING APPARATUS 审中-公开
标题翻译：蒸发单元和真空涂料设备
公开(公告)号：WO2012072132A1
公开(公告)日：2012-06-07
申请号：PCT/EP2010/068661
申请日：2010-12-01
申请人： APPLIED MATERIALS, INC. , HEIN, Stefan , HOFFMANN, Gerd
发明人： HEIN, Stefan , HOFFMANN, Gerd
IPC分类号： C23C14/56
CPC分类号： C23C14/24 , C23C14/562
摘要： Vacuum coating apparatus for coating a web includes a first rotatable coating drum (11) and a second rotatable coating drum (12) disposed parallel to the first drum (11) with a gap (17) formed between the first and the second coating drums (11, 12) for transporting at least one web (15). A first evaporator (21) has at least one evaporation source (21a) for generating a first evaporation beam (31b), wherein the first evaporator (21) is arranged next to the first coating drum (11). A second evaporator (22) has at least one evaporation source (22a) for generating a second evaporation beam (32b), wherein the second evaporator (22) is arranged next to the second coating drum (12). The first and the second evaporators (21, 22) are inclined relative to each other.
摘要翻译：用于涂布卷材的真空涂布装置包括：第一可旋转涂布滚筒（11）和平行于第一滚筒（11）设置的第二可旋转涂布滚筒（12），在第一和第二涂布滚筒之间形成间隙（17）用于运输至少一个网（15）的装置（11,12）。第一蒸发器（21）具有用于产生第一蒸发束（31b）的至少一个蒸发源（21a），其中第一蒸发器（21）设置在第一涂布滚筒（11）的旁边。第二蒸发器（22）具有用于产生第二蒸发束（32b）的至少一个蒸发源（22a），其中所述第二蒸发器（22）设置在所述第二涂布滚筒（12）的旁边。第一和第二蒸发器（21,22）相对于彼此倾斜。

9. 发明申请

WO2011138182A1 SEALING ELEMENT 审中-公开
标题翻译：密封元件
公开(公告)号：WO2011138182A1
公开(公告)日：2011-11-10
申请号：PCT/EP2011/056440
申请日：2011-04-21
申请人： TYCO ELECTRONICS AMP GMBH , HEIN, Stefan , SZELAG, Martin , HERRMANN, Andreas
发明人： HEIN, Stefan , SZELAG, Martin , HERRMANN, Andreas
IPC分类号： H01R13/52 , H02G3/08
CPC分类号： H05K5/02 , H01R13/5205 , H02G3/0658 , H02G15/013
摘要： The invention relates to a sealing element (1) for sealing between an electric line (2) and a housing (100). In order to provide a sealing element (1) for a plurality of different line diameters, provision is made according to the invention for the sealing element (1) to have an elastically expandable inner sleeve (5) which has, in an axial direction (X) of the sealing element (1), a passage opening (4) for the line (2) which has at least one inner sealing surface (6a, 6b) extending along its inner periphery (6), an outer sleeve (10) surrounding the inner sleeve (5), which outer sleeve has at least one outer sealing surface (11a, 11b) extending along its outer periphery (11), and comprises at least one compensation section (7a-d) which is designed to be compressible in a radial direction (Y, Z) of the sealing element (1) and has a yieldingness which is greater than the yieldingness of the outer sleeve (10).
摘要翻译：本发明涉及一种用于密封电线（2）和壳体（100）之间的密封元件（1）。为了提供用于多个不同线径的密封元件（1），根据本发明为密封元件（1）提供具有可弹性膨胀的内套筒（5），其沿轴向（（1）的通道开口（4），其具有至少一个沿着其内周（6）延伸的内密封表面（6a，6b），外套筒（10）围绕所述内套筒（5），所述外套筒具有沿着其外周缘（11）延伸的至少一个外密封表面（11a，11b），并且包括至少一个被设计为可压缩的补偿部分（7a-d）在密封元件（1）的径向（Y，Z）处，并且具有大于外套筒（10）的屈服度的屈服强度。

10. 发明申请

WO2010136464A1 PLASMA DEPOSITION SOURCE AND METHOD FOR DEPOSITING THIN FILMS 审中-公开
标题翻译：等离子体沉积源和沉积薄膜的方法
公开(公告)号：WO2010136464A1
公开(公告)日：2010-12-02
申请号：PCT/EP2010/057181
申请日：2010-05-25
申请人： APPLIED MATERIALS, INC. , MORRISON, Neil , HERZOG, Andre , HEIN, Stefan , SKUK, Peter
发明人： MORRISON, Neil , HERZOG, Andre , HEIN, Stefan , SKUK, Peter
IPC分类号： H01J37/32
CPC分类号： H01J37/32 , C23C14/505 , H01J37/3277
摘要： A plasma deposition source for transferring a deposition gas into a plasma phase and for depositing, from the plasma phase, a thin film onto a substrate moving in a substrate transport direction in a vacuum chamber is described. The plasma deposition source includes a multiregion electrode device adapted to be positioned in the vacuum chamber and including at least one RF electrode arranged opposite to the moving substrate, and an RF power generator adapted for supplying RF power to the RF electrode. The RF electrode has at least one gas inlet arranged at one edge of the RF electrode and at least one gas outlet arranged at the opposed edge of the RF electrode. A normalized plasma volume is provided by a plasma volume defined between an electrode surface and an opposite substrate position, divided by an electrode length. The normalized plasma volume is tuned to a depletion length of the deposition gas.
摘要翻译：一种等离子体沉积源，用于将沉积气体转移到等离子体相中，并且用于从等离子体相将薄膜沉积到在真空室中沿基板输送方向移动的基板上。等离子体沉积源包括多电极电极装置，其适于定位在真空室中并且包括与移动衬底相对布置的至少一个RF电极，以及适于向RF电极提供RF功率的RF功率发生器。 RF电极具有布置在RF电极的一个边缘处的至少一个气体入口和布置在RF电极的相对边缘处的至少一个气体出口。通过在电极表面和相对的衬底位置之间限定的等离子体体积除以电极长度来提供归一化的等离子体体积。将归一化的等离子体体积调节到沉积气体的耗尽长度。

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