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    • 1. 发明申请
    • SCANNING PROBE FOR DATA STORAGE AND MICROSCOPY
    • 数据存储和显微镜扫描探针
    • WO2003062742A1
    • 2003-07-31
    • PCT/IB2002/005292
    • 2002-12-11
    • INTERNATIONAL BUSINESS MACHINES CORPORATIONBINNIG, Gerd, K.DESPONT, MichelHÄBERLE, WalterLANTZ, Mark
    • BINNIG, Gerd, K.DESPONT, MichelHÄBERLE, WalterLANTZ, Mark
    • G01B7/34
    • G11B9/1418G01Q70/06G01Q80/00G11B9/14G11B9/1409G11B2005/0021
    • A cantilever device (30, 50, 70) for scanning a surface comprises a support (32, 52, 72), a tip platform (31, 51, 71) and a flexible arm arrangement (33, 53, 73). The tip platform (31, 51, 71) has a plurality of tips. These comprise at least two contact tips (34; 55a-55c; 74, 75) providing points of contact with a surface to be scanned, and a scanning tip (36; 55a, 55b; 75) for scanning the surface, where the scanning tip may be one of the two or more contact tips provided on the platform. The flexible arm arrangement (33, 53, 73) connects the tip platform to the support and allows orientation of the platform, via flexing of the arm arrangement, to bring the contact tips into contact with a surface to be scanned. The platform (31, 51, 71) is then at a well-defined orientation relative to the scan surface, and the scanning tip (36; 55a, 55b; 75) is appropriately positioned for the scanning operation. Scanning probe microscopes and data storage devices incorporating such cantilever devices are also provided.
    • 用于扫描表面的悬臂装置(30,50,70)包括支撑件(32,52,72),尖端平台(31,51,71)和柔性臂装置(33,53,73)。 尖端平台(31,51,71)具有多个尖端。 这些包括提供与待扫描表面的接触点的至少两个接触尖端(34; 55a-55c; 74,75)和用于扫描表面的扫描尖端(36; 55a,55b; 75) 提示可以是在平台上提供的两个或更多个接触提示之一。 柔性臂布置(33,53,73)将尖端平台连接到支撑件,并且允许平台的取向通过臂布置的弯曲,以使接触尖端与待扫描的表面接触。 然后,平台(31,51,71)相对于扫描表面处于相当明确的方向,并且扫描尖端(36; 55a,55b; 75)被适当地定位用于扫描操作。 还提供了包括这种悬臂装置的扫描探针显微镜和数据存储装置。