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    • 4. 发明申请
    • POLYMERIC MICROGELS FOR CHEMICAL MECHANICAL PLANARIZATION (CMP) PROCESSING
    • 用于化学机械平面化(CMP)处理的聚合物微胶囊
    • WO2008052216A3
    • 2008-06-26
    • PCT/US2007082843
    • 2007-10-29
    • UNIV SOUTH FLORIDAGUPTA VINAYKUMAR ASHOKCOUTINHO CECILMUDHIVARTHI SUBRAHMANYA
    • GUPTA VINAYKUMAR ASHOKCOUTINHO CECILMUDHIVARTHI SUBRAHMANYA
    • C09K3/14
    • C09G1/02C08G83/001C08J3/075C08J3/128C08J5/005C08J2300/208C08J2323/26C08J2343/04C09K3/1436C09K3/1463H01L21/31053
    • Organic-inorganic composites were prepared as colloidal particles of a cross-linked, thermally responsive polymer. Hybrid PNIPAM-polysiloxane particles and composite polymeric particles with embedded nanoparticles of an inorganic metal-oxide (MOx) such as CeO2 and TiO2 were formed. To promote the incorporation of unaggregated nanoparticles, temperature responsive microspherical gels (microgels) of N-isopropylacrylamide (NIPAM) with interpenetrating (IP) linear chains of poly(acrylic acid) (PAA) were used. The organic-inorganic composition of the hybrid polymer network was controlled by changing the time for condensation and hydrolysis of the siloxane monomer during synthesis. Experimental results indicated that the planarization of silicon oxide wafers using these hybrid particles and composites exhibited lower topographical variations and surface roughness as compared to slurries consisting of only silica or ceria nanoparticles while achieving similar removal rates and better or similar frictional characteristics.
    • 制备有机 - 无机复合材料作为交联的热响应聚合物的胶体颗粒。 形成混合PNIPAM-聚硅氧烷颗粒和具有无机金属氧化物(MOx)如CeO 2和TiO 2的嵌入纳米颗粒的复合聚合物颗粒。 为了促进未聚集的纳米颗粒的掺入,使用具有聚(丙烯酸)(PAA)的互穿(IP)线性链的N-异丙基丙烯酰胺(NIPAM)的温度敏感性微球凝胶(微凝胶)。 通过在合成过程中改变硅氧烷单体的缩合和水解时间来控制杂化聚合物网络的有机 - 无机组合物。 实验结果表明,与仅由二氧化硅或二氧化铈纳米颗粒组成的浆料相比,使用这些杂化颗粒和复合材料的氧化硅晶片的平面化显示更低的形貌变化和表面粗糙度,同时实现类似的去除速率和更好或相似的摩擦特性。