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1. 发明申请

WO2012100062A1 DUAL INDEPENDENT TRANSPORT SYSTEMS FOR IR CONVEYOR FURNACES AND METHODS OF FIRING THIN WORK PIECES 审中-公开
标题翻译：红外线输送机双重独立运输系统及其工作方式
公开(公告)号：WO2012100062A1
公开(公告)日：2012-07-26
申请号：PCT/US2012/021881
申请日：2012-01-19
申请人： TP SOLAR, INC. , PARKS, Richard, W. , RAGAY, Peter, G. , GARCIA, Luis, Alejandro Rey
发明人： PARKS, Richard, W. , RAGAY, Peter, G. , GARCIA, Luis, Alejandro Rey
IPC分类号： F27B9/24
CPC分类号： F27B9/021 , F27B9/243 , F27B9/36 , H01L21/67115 , H01L21/67173 , H01L21/67736 , H01L21/6776
摘要： Multi-lane, side-by-side, independently driven transport systems particularly useful for transfer, on conveyor belts or finger/chains, of thin work pieces, such as silicon wafers, through processing equipment for converting the wafers into solar cells, including UV pre-treaters, dopers, dryers, diffusion furnaces and metallization furnaces. The inventive multi-lane transport systems may employ wire mesh belts having a flying bridge wafer support system comprising longitudinally spaced carrier wire elements that support the wafers at their side edges at only point contacts, by means of opposed, inwardly inclined, downwardly slanted segments or wings. Alternately, finger drives comprising spaced-apart chains having inwardly projecting fingers may be used for transport of the wafers by side edge contact. Friction or sprocket drives having tensioner assemblies associated therewith are used to move the transport belts or finger chains through the furnace zones. Each lane may be independently controlled to provide unique thermal profiles along their processing paths.
摘要翻译：多通道，并排，独立驱动的运输系统，特别适用于通过用于将晶片转换成太阳能电池的加工设备（包括紫外线）在传送带或手指/链条上传输诸如硅晶片的薄工件预处理剂，掺杂剂，干燥器，扩散炉和金属化炉。本发明的多车道运输系统可以采用具有飞桥晶片支撑系统的金属丝网带，其包括纵向间隔的载体线元件，其通过相对的向内倾斜的向下倾斜的段在仅靠点接触的侧边缘处支撑晶片，或翅膀。或者，包括具有向内突出的指状物的间隔开的链的手指驱动器可以用于通过侧边接触输送晶片。具有与其相关联的张紧器组件的摩擦或链轮驱动器用于将传送带或指链移动通过炉区。每个通道可以独立控制，以沿其处理路径提供独特的热分布。

2. 发明申请

WO2008002904A3 RAPID THERMAL FIRING IR CONVEYOR FURNACE HAVING HIGH INTENSITY HEATING SECTION 审中-公开
标题翻译：具有高强度加热段的快速热燃烧红外输送炉
公开(公告)号：WO2008002904A3
公开(公告)日：2008-12-24
申请号：PCT/US2007072096
申请日：2007-06-26
申请人： THERMAL PROC SOLUTIONS INC , PARKS RICHARD W , RAGAY PETER G , GARCIA LUIS ALEJANDRO REY , KRUZEK RAYMOND G
发明人： PARKS RICHARD W , RAGAY PETER G , GARCIA LUIS ALEJANDRO REY , KRUZEK RAYMOND G
IPC分类号： A21B2/00 , A45D20/40 , F26B3/30
CPC分类号： H05B3/0076 , H01L21/67109 , H01L21/67115
摘要： Isolation IR heat lamp module and method of firing multi-zone IR furnaces for solar cell processing comprising lamps disposed in individual parallel channels in a reflector/insulator body to provide a cooling air channel surrounding each tube; the channels are covered with IR-transmissive plate material to isolate each lamp from adjacent lamps and the process zone. Cooling air is exhausted and recycled upstream for energy conservation. Lamp spacing can be varied and power to each lamp individually controlled to provide infinite control of temperature profile in each heating zone. For a spike zone, and in combination with downstream quench control and annealing zones, steep heating and cooling curves with very short dwell (sharp) peak temperature profiles permit faster throughput due to operation of the lamps at essentially 100 % rated capacity, at a 2X or greater heating and throughput rate without compromising lamp life, while producing solar cells with improved output efficiency.
摘要翻译：隔离IR加热灯模块以及用于太阳能电池加工的多区IR炉的烧制方法，其包括设置在反射器/绝缘体中的各个平行通道中的灯，以提供围绕每个管的冷却空气通道; 通道被IR透射板材覆盖，以隔离每个灯与相邻的灯和处理区域。冷却空气被耗尽并在上游再循环以节约能源。灯的间距可以改变，每个灯的功率可以单独控制，以提供对每个加热区的温度分布的无限控制。对于尖峰区以及与下游淬火控制区和退火区相结合，陡峭的加热和冷却曲线以及非常短的停留时间（尖峰）峰值温度曲线允许更快的吞吐量，这是由于灯在基本100％额定容量下的运行速度为2倍或更高的加热和吞吐速率而不损害灯的寿命，同时生产具有提高的输出效率的太阳能电池。

3. 发明申请

WO2012074891A1 FINGER DRIVES FOR IR WAFER PROCESSING EQUIPMENT CONVEYORS AND LATERAL DIFFERENTIAL TEMPERATURE PROFILE METHODS 审中-公开
标题翻译：红外波浪加工设备输送机和侧向差热温度曲线方法的指尖驱动
公开(公告)号：WO2012074891A1
公开(公告)日：2012-06-07
申请号：PCT/US2011/062176
申请日：2011-11-28
申请人： TP SOLAR, INC. , GARCIA, Luis, Alejandro, Rey , PARKS, Richard, W. , RAGAY, Peter, G.
发明人： GARCIA, Luis, Alejandro, Rey , PARKS, Richard, W. , RAGAY, Peter, G.
IPC分类号： B65G19/00
CPC分类号： B65G17/12 , B65G17/26 , B65G17/32 , F27B17/0025 , F27D3/0084 , H01L21/67109 , H01L21/67706 , H01L21/67742
摘要： A new class of work-piece conveyors, comprising zero-mass, shadow-less transport systems, with a drive having a pair of parallel, laterally spaced, movable chains defining a processing path, with fingers projecting transversely toward the process path centerline. The gap between fingers eliminates conveyor tube/rod supports, improving wafer quality and conserving energy. Implementations include wire chain, band and roller chain transports to which fingers are secured. Fingers are angled down so that the intersection of the bottom and side edges of the work-piece make only point contacts with each finger. A pair of finger chains implement a single lane drive; adding center bilateral finger drive chains with oppositely pointing fingers implement a multi-lane system. The inventive method includes individually configurable processing temperature profiles in side-by-side lanes, on a zone-by-zone, upper and lower half basis for broad processing flexibility. A novel transducer-based lamp-voltage control system provides stable lamp power for precise temperature control.
摘要翻译：一种新型的工件输送机，包括零质量，无阴影传输系统，驱动器具有一对平行的，横向间隔的可移动的链，其限定了处理路径，手指横向于过程路径中心线突出。手指之间的间隙消除输送管/杆支撑，提高晶圆质量并节约能源。实施包括固定手指的线链，带和滚链链条输送。手指向下倾斜，使得工件的底部和侧边的交点仅与每个手指进行点接触。一对手指链实现单车道驱动; 用指向手指的中心双手指驱动链加上多通道系统。本发明的方法包括在逐行通道中的单独配置的处理温度曲线，逐区，上下半部分，用于广泛的处理灵活性。一种新型的基于传感器的灯电压控制系统提供稳定的灯功率，用于精确的温度控制。

4. 发明申请

WO2008002904A2 RAPID THERMAL FIRING IR CONVEYOR FURNACE HAVING HIGH INTENSITY HEATING SECTION 审中-公开
标题翻译：具有高强度加热部分的快速热式红外线输送机
公开(公告)号：WO2008002904A2
公开(公告)日：2008-01-03
申请号：PCT/US2007/072096
申请日：2007-06-26
申请人： THERMAL PROCESSING SOLUTIONS, INC. , PARKS, Richard, W. , RAGAY, Peter, G. , GARCIA, Luis Alejandro, Rey , KRUZEK, Raymond, G.
发明人： PARKS, Richard, W. , RAGAY, Peter, G. , GARCIA, Luis Alejandro, Rey , KRUZEK, Raymond, G.
IPC分类号： H01J7/26
CPC分类号： H05B3/0076 , H01L21/67109 , H01L21/67115
摘要： Isolation IR heat lamp module and method of firing multi-zone IR furnaces for solar cell processing comprising lamps disposed in individual parallel channels in a reflector/insulator body to provide a cooling air channel surrounding each tube; the channels are covered with IR-transmissive plate material to isolate each lamp from adjacent lamps and the process zone. Cooling air is exhausted and recycled upstream for energy conservation. Lamp spacing can be varied and power to each lamp individually controlled to provide infinite control of temperature profile in each heating zone. For a spike zone, and in combination with downstream quench control and annealing zones, steep heating and cooling curves with very short dwell (sharp) peak temperature profiles permit faster throughput due to operation of the lamps at essentially 100 % rated capacity, at a 2X or greater heating and throughput rate without compromising lamp life, while producing solar cells with improved output efficiency.
摘要翻译：隔离IR加热灯模块和用于太阳能电池处理的多区域IR炉的点火方法，包括设置在反射器/绝缘体中的各个并行通道中的灯，以提供围绕每个管的冷却空气通道; 通道用IR透射板材料覆盖，以将每个灯与相邻的灯和处理区隔离开。冷却空气已经耗尽，并在上游回收节能。灯间距可以变化，每个灯的功率单独控制，以提供每个加热区域温度曲线的无限制控制。对于尖峰区域，并结合下游淬火控制和退火区域，具有非常短暂停留（锋利的）峰值温度曲线的陡峭的加热和冷却曲线允许由于灯在基本上100％额定容量下的操作而获得更快的生产量，在2X 或更高的加热和生产率而不损害灯的寿命，同时生产具有改善的输出效率的太阳能电池。

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