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    • 1. 发明申请
    • RAPID THERMAL FIRING IR CONVEYOR FURNACE HAVING HIGH INTENSITY HEATING SECTION
    • 具有高强度加热部分的快速热式红外线输送机
    • WO2008002904A2
    • 2008-01-03
    • PCT/US2007/072096
    • 2007-06-26
    • THERMAL PROCESSING SOLUTIONS, INC.PARKS, Richard, W.RAGAY, Peter, G.GARCIA, Luis Alejandro, ReyKRUZEK, Raymond, G.
    • PARKS, Richard, W.RAGAY, Peter, G.GARCIA, Luis Alejandro, ReyKRUZEK, Raymond, G.
    • H01J7/26
    • H05B3/0076H01L21/67109H01L21/67115
    • Isolation IR heat lamp module and method of firing multi-zone IR furnaces for solar cell processing comprising lamps disposed in individual parallel channels in a reflector/insulator body to provide a cooling air channel surrounding each tube; the channels are covered with IR-transmissive plate material to isolate each lamp from adjacent lamps and the process zone. Cooling air is exhausted and recycled upstream for energy conservation. Lamp spacing can be varied and power to each lamp individually controlled to provide infinite control of temperature profile in each heating zone. For a spike zone, and in combination with downstream quench control and annealing zones, steep heating and cooling curves with very short dwell (sharp) peak temperature profiles permit faster throughput due to operation of the lamps at essentially 100 % rated capacity, at a 2X or greater heating and throughput rate without compromising lamp life, while producing solar cells with improved output efficiency.
    • 隔离IR加热灯模块和用于太阳能电池处理的多区域IR炉的点火方法,包括设置在反射器/绝缘体中的各个并行通道中的灯,以提供围绕每个管的冷却空气通道; 通道用IR透射板材料覆盖,以将每个灯与相邻的灯和处理区隔离开。 冷却空气已经耗尽,并在上游回收节能。 灯间距可以变化,每个灯的功率单独控制,以提供每个加热区域温度曲线的无限制控制。 对于尖峰区域,并结合下游淬火控制和退火区域,具有非常短暂停留(锋利的)峰值温度曲线的陡峭的加热和冷却曲线允许由于灯在基本上100%额定容量下的操作而获得更快的生产量,在2X 或更高的加热和生产率而不损害灯的寿命,同时生产具有改善的输出效率的太阳能电池。