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    • 6. 发明申请
    • PROCESS FOR MANUFACTURE OF A GMR BRIDGE SENSOR AND A GMR BRIDGE SENSOR
    • 用于生产GMR桥和传感器GMR桥式传感器
    • WO1997039364A1
    • 1997-10-23
    • PCT/DE1997000110
    • 1997-01-23
    • ROBERT BOSCH GMBHNEUMANN, ChristianMARX, KlausJOST, FranzFREITAG, MartinSENGHAAS, Dietmar
    • ROBERT BOSCH GMBH
    • G01R33/09
    • G01R33/09H01L43/12Y10T29/49034
    • The invention concerns a process for producing a GMR bridge sensor and the bridge sensor itself which connects magnetoresistive resistors (1 - 4) into a bridge to detect a magnetic field. The resistors are made of a material which shows Giant Magnetoresistive Ratio Effect (GMR Effect). The magnetoresistive sensitivity of the individual resistors is caused by tempering. Tempering the resistors is done by selectively directing a current into the bridge connections (5 - 8) which is sufficient to achieve the temperature required for tempering. By switching the bridge connections, the resistors are given, pair-wise or individually, the necessary property for the GMR effect. The material used for the resistors is from the class of discontinuous laminated materials, especially NiFe/Ag, in which the GMR effect is induced by tempering one time at a specific temperature.
    • 本发明描述了用于制造GMR传感器桥和桥传感器本身,其中磁阻用于检测磁场的电阻器(1 - 4)的方法,以桥接的形式被连接在一起。 电阻器由具有GMR效应(巨磁阻比效果)的材料制成。 各个电阻的磁阻灵敏度由退火引起的。 电阻器的退火通过选择性地供给电流,其足以用于实现必要的退火温度,在桥连接(5-8)进行。 根据桥的连接端子上,使得电阻器是单独必要的GMR财产或成对提供。 作为电阻器的材料是一种材料,特别是类不连续的多层的材料,特别是由NiFe /银,被使用,其中,所述GMR特性通过一次在一定温度下进行退火而引起的。