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1. 发明申请

WO2019036525A2 METHOD FOR JOINING QUARTZ PIECES AND QUARTZ ELECTRODES AND OTHER DEVICES OF JOINED QUARTZ 审中-公开
公开(公告)号：WO2019036525A2
公开(公告)日：2019-02-21
申请号：PCT/US2018/046788
申请日：2018-08-14
申请人： COMPONENT RE-ENGINEERING COMPANY, INC. , ELLIOT, Brent , HUSSEN, Guleid , STEPHENS, Jason , PARKER, Michael
发明人： ELLIOT, Brent , HUSSEN, Guleid , STEPHENS, Jason , PARKER, Michael
IPC分类号： H01L21/683
摘要： A method for joining quartz pieces using metallic aluminum as the joining element. The aluminum may be placed between two quartz pieces and the assembly may be heated in the range of 500C to 650C. The joining atmosphere may be non-oxygenated. A method for the joining of quartz pieces which may include barrier layers on the quartz pieces. The barrier layers may be resistant to aluminum diffusion and may be of a metal oxide or metal nitride. The quartz pieces with the barrier layers may then be joined at temperatures higher than 650C and less than 1200C. A device such as an RF antenna or electrode in support of semiconductor processing using joined quartz pieces wherein the aluminum joining layer which has joined the pieces and also functions as antenna electrode.

2. 发明申请

WO2013081675A1 METHOD FOR MANUFACTURING AND REPAIRING SEMICONDUCTOR PROCESSING EQUIPMENT AND EQUIPMENT PRODUCED USING SAME 审中-公开
标题翻译：制造和修理半导体加工设备的方法和使用其生产的设备
公开(公告)号：WO2013081675A1
公开(公告)日：2013-06-06
申请号：PCT/US2012/048746
申请日：2012-07-28
申请人： COMPONENT RE-ENGINEERING COMPANY, INC. , ELLIOT, Alfred Grant , ELLIOT, Brent Donald Alfred , BALMA, Frank , SCHUSTER, Richard Erich , REX, Dennis George , VEYTSER, Alexander
发明人： ELLIOT, Alfred Grant , ELLIOT, Brent Donald Alfred , BALMA, Frank , SCHUSTER, Richard Erich , REX, Dennis George , VEYTSER, Alexander
IPC分类号： H01L21/687 , B23K1/19
CPC分类号： H01L21/67103 , B23K1/0012 , B23K1/0016 , B23K1/008 , B23K1/19 , B23K2201/40 , H01L21/6833 , H01L21/68792 , Y10T279/23 , Y10T428/131 , Y10T428/1317
摘要： A method for the joining of ceramic pieces into an assembly adapted to be used in semiconductor processing. The joined pieces can be adapted to withstand the environments within a process chamber during substrate processing, chamber cleaning processes, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The ceramic pieces may be aluminum nitride and the pieces may be brazed with aluminum. The joint material can be adapted to withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The joint can be adapted to provide a hermetic seal across the joint. The joined pieces can be adapted to be separated at a later time should rework or replacement of one of the pieces be desired.
摘要翻译：一种用于将陶瓷件接合到适于用于半导体加工的组件中的方法。连接件可适用于在衬底加工，腔室清洁过程以及可在加热器或静电吸盘的轴内看到的氧化气氛下承受处理室内的环境。陶瓷片可以是氮化铝，并且片可以用铝钎焊。接头材料可以适于在衬底处理期间承受处理室内的环境，以及可以在加热器或静电吸盘的轴内看到的氧化气氛。接头可以适应于在接头上提供气密密封。连接件可以适于在稍后的时间被分离，以便期望返修或更换其中一件。

3. 发明申请

WO2005063060A1 CONDITIONING PROCESS FOR TOBACCO AND/OR SNUFF COMPOSITIONS 审中-公开
标题翻译：烟草和/或SNUFF组合物的调节过程
公开(公告)号：WO2005063060A1
公开(公告)日：2005-07-14
申请号：PCT/US2004/043511
申请日：2004-12-22
申请人： U.S. SMOKELESS TOBACCO COMPANY , ATCHLEY, Frank , DUE, Vernie, A. , BRESLIN, James, C. , WILLIAMS, Scott , ELLIOT, Brent
发明人： ATCHLEY, Frank , DUE, Vernie, A. , BRESLIN, James, C. , WILLIAMS, Scott , ELLIOT, Brent
IPC分类号： A24B3/12
CPC分类号： A24B3/12 , A24B3/10 , A24B15/18
摘要： A process is provided for producing smokeless tobacco and/or snuff compositions using steam alone in an open vessel or in combination with pressure and venting to alter organoleptic properties of the smokeless tobacco and/or snuff compositions.
摘要翻译：提供了一种制造无烟烟草和/或鼻烟组合物的方法，其使用单独的蒸气在开放的容器中或与压力和排气相组合以改变无烟烟草和/或鼻烟组合物的感官特性。

4. 发明申请

WO2019036525A3 METHOD FOR JOINING QUARTZ PIECES AND QUARTZ ELECTRODES AND OTHER DEVICES OF JOINED QUARTZ 审中-公开
公开(公告)号：WO2019036525A3
公开(公告)日：2019-02-21
申请号：PCT/US2018/046788
申请日：2018-08-14
申请人： COMPONENT RE-ENGINEERING COMPANY, INC. , ELLIOT, Brent , HUSSEN, Guleid , STEPHENS, Jason , PARKER, Michael
发明人： ELLIOT, Brent , HUSSEN, Guleid , STEPHENS, Jason , PARKER, Michael
IPC分类号： C03C27/06 , C03C27/08 , C03C3/04 , C03C3/06 , C03C17/06 , C03B20/00 , B32B17/00
摘要： A method for joining quartz pieces using metallic aluminum as the joining element. The aluminum may be placed between two quartz pieces and the assembly may be heated in the range of 500C to 650C. The joining atmosphere may be non-oxygenated. A method for the joining of quartz pieces which may include barrier layers on the quartz pieces. The barrier layers may be resistant to aluminum diffusion and may be of a metal oxide or metal nitride. The quartz pieces with the barrier layers may then be joined at temperatures higher than 650C and less than 1200C. A device such as an RF antenna or electrode in support of semiconductor processing using joined quartz pieces wherein the aluminum joining layer which has joined the pieces and also functions as antenna electrode.

5. 发明申请

WO2014098964A1 OFFLOADING TETHERING-RELATED COMMUNICATION PROCESSING 审中-公开
标题翻译：卸载相关通信处理
公开(公告)号：WO2014098964A1
公开(公告)日：2014-06-26
申请号：PCT/US2013/043531
申请日：2013-05-31
申请人： INTEL CORPORATION , ELLIOT, Brent
发明人： ELLIOT, Brent
IPC分类号： H04L12/28
CPC分类号： H04L67/28 , H04L61/2015 , H04L61/2514 , H04L63/0281 , H04L67/2871 , H04L69/12 , H04L69/14 , H04W28/08 , Y02D70/1262 , Y02D70/142 , Y02D70/144 , Y02D70/166
摘要： This disclosure is directed to offloading tethering-related communication processing. In general, a communication processor in an intermediary device may be responsible for handling communication between tethered devices and a wide area network (WAN) like the Internet. In offloading responsibility for managing tethered devices to the communication processor, other processing resources (e.g., an applications processor) in the intermediary device may be both uninvolved and potentially totally isolated from the tethering, allowing the intermediary device to conserve power/processing resources, maintain better security, etc. An intermediary device may comprise, for example, a communication module to communicate with at least one other device and a WAN, a communication processor to control how information may be conveyed between the at least one other device and the WAN and an application processor, separate from the communication processor, to execute at least one application in the device.
摘要翻译：本公开涉及卸载与网络共享相关的通信处理。通常，中间设备中的通信处理器可负责处理系留设备和诸如因特网的广域网（WAN）之间的通信。在将负责管理系留设备的责任卸载到通信处理器时，中间设备中的其他处理资源（例如，应用处理器）可以既不涉及并且潜在地与系链完全隔离，允许中间设备节省功率/处理资源，维护更好的安全性等。中间设备可以包括例如与至少一个其他设备和WAN通信的通信模块，用于控制如何在至少一个其他设备和WAN之间传送信息的通信处理器，以及与通信处理器分离的应用处理器，以在设备中执行至少一个应用。

6. 发明申请

WO2005008413A3 METHOD AND APPARATUS FOR AUTOMATED BI-DIRECTIONAL INTEGRATION OF PERIPHERAL DATA SOURCES FOR A PRODUCTION TOOL 审中-公开
标题翻译：用于生产工具的外围数据源的自动双向集成的方法和设备
公开(公告)号：WO2005008413A3
公开(公告)日：2005-05-12
申请号：PCT/US2004022166
申请日：2004-07-09
申请人： MKS INSTR INC , HADAR RON , SMITH JOHN ALEXANDER , RUPP GERHARD , SCHIMUNEK BERNHARD , ATTWOOD MARK , LANDESMANN LIOR , ELLIOT BRENT , ROBINSON TIM , LEV-AMI UZI
发明人： HADAR RON , SMITH JOHN ALEXANDER , RUPP GERHARD , SCHIMUNEK BERNHARD , ATTWOOD MARK , LANDESMANN LIOR , ELLIOT BRENT , ROBINSON TIM , LEV-AMI UZI
IPC分类号： G05B19/418 , G06F20060101 , G06F19/00
CPC分类号： G05B19/4185 , G05B2219/32126 , G05B2219/34038 , G05B2219/45031 , Y02P90/18 , Y02P90/185
摘要： A method and apparatus for automated bidirectional integration of peripheral data sources for a production tool couples the system components together in a web-based arrangement. The process tools and the peripheral data sources are configured as websites to provide information to the system. Certain components of the system are also configured as browsers to obtain available information and use this information to make decisions and perform actions.
摘要翻译：用于生产工具的外围数据源的自动双向集成的方法和装置将系统组件以基于网络的布置结合在一起。处理工具和外围数据源被配置为网站以向系统提供信息。系统的某些组件也被配置为浏览器以获取可用信息并使用这些信息来做出决定并执行操作。

7. 发明申请

WO1993002768A1 A METHOD FOR PURIFYING GAS DISTRIBUTION SYSTEMS 审中-公开
标题翻译：一种净化气体分配系统的方法
公开(公告)号：WO1993002768A1
公开(公告)日：1993-02-18
申请号：PCT/US1992006505
申请日：1992-08-05
申请人： BALMA, Frank, R. , ELLIOT, Brent, D.
IPC分类号： B01D46/10
CPC分类号： F24H3/0411
摘要： An apparatus (10) for purifying gas distribution systems has a gas inlet (12) and a gas outlet (14) for connection to gas distribution lines (20). A housing (22) encloses a resistance heater (24) and a particle filter (26) for the gas. The resistance heater (24) is connected to the gas inlet (12) and the particle filter (26) is connected between the resistance heater (24) and the gas outlet (14). The resistance heater includes a sealed tube (27) defining a gas plenum (28). A resistance heater element enclosed in a cylindrical Inconel TM alloy shell (30) is centrally disposed in the sealed tube (26). A spiral ridge (32) winds around the shell (30) to define a spiral path for gas flowing through the plenum (28). The spiral ridge (32) has a narrower pitch near the gas inlet (12) and a wider pitch moving toward the filter (26) end of the plenum (28).

8. 发明申请

WO2013082564A3 METHOD FOR JOINING MATERIALS AND PLATE AND SHAFT DEVICE AND MULTI-LAYER PLATE FORMED THEREWITH 审中-公开
标题翻译：连接材料和板和轴装置的方法以及形成于其上的多层板
公开(公告)号：WO2013082564A3
公开(公告)日：2013-07-25
申请号：PCT/US2012067491
申请日：2012-11-30
申请人： COMPONENT RE ENGINEERING COMPANY INC , ELLIOT ALFRED GRANT , ELLIOT BRENT DONALD ALFRED , BALMA FRANK , SCHUSTER RICHARD ERICH , REX DENNIS GEORGE , VEYTSER ALEXANDER
发明人： ELLIOT ALFRED GRANT , ELLIOT BRENT DONALD ALFRED , BALMA FRANK , SCHUSTER RICHARD ERICH , REX DENNIS GEORGE , VEYTSER ALEXANDER
IPC分类号： B28B1/16 , B28B1/30 , C04B35/581
CPC分类号： B23K1/0008 , B23K1/0016 , B23K1/19 , B23K1/20 , B23K35/005 , B23K35/286 , B23K2203/10 , B32B3/30 , B32B7/14 , B32B9/005 , B32B9/04 , B32B9/041 , B32B15/20 , B32B18/00 , C04B35/645 , C04B37/001 , C04B37/006 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/6581 , C04B2235/6582 , C04B2235/945 , C04B2237/121 , C04B2237/122 , C04B2237/126 , C04B2237/127 , C04B2237/34 , C04B2237/343 , C04B2237/348 , C04B2237/36 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/592 , C04B2237/61 , C04B2237/64 , C04B2237/66 , C04B2237/68 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C04B2237/76 , C04B2237/765 , C04B2237/80 , C04B2237/84 , F16B9/00 , H01L21/67103 , H01L21/6831 , H05B1/00 , Y10T403/46 , Y10T428/31504 , Y10T428/31678
摘要： A method for joining first and second ceramic pieces comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material can be controlled by among other factors the selection of the joining material, the joining temperature, the time at temperature and the joining atmosphere. The pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material can be adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
摘要翻译：一种用于连接第一和第二陶瓷片的方法，包括在两片之间钎焊连续材料的连续层。接合材料的润湿和流动可以通过接合材料的选择，接合温度，温度和接合气氛的时间等因素来控制。这些碎片可以是氮化铝，并且这些碎片可以在受控的气氛下用铝合金钎焊。接合材料可以适应后来在衬底处理期间承受处理室内的环境以及可以在加热器或静电吸盘的轴内看到的含氧气氛。

9. 发明申请

WO2007087196A2 ADVANCED CERAMIC HEATER FOR SUBSTRATE PROCESSING 审中-公开
标题翻译：先进的陶瓷加热器用于基板加工
公开(公告)号：WO2007087196A2
公开(公告)日：2007-08-02
申请号：PCT/US2007/001137
申请日：2007-01-17
申请人： COMPONENT RE-ENGINEERING COMPANY, INC. , SANDVIK OSPREY LIMITED , ELLIOT, Brent , BALMA, Frank , VEYTSER, Alexander , OGILVY, Andrew Josef Widawski , FORREST, James Burnett
发明人： ELLIOT, Brent , BALMA, Frank , VEYTSER, Alexander , OGILVY, Andrew Josef Widawski , FORREST, James Burnett
IPC分类号： H01L21/306 , C23C16/00
CPC分类号： C23C16/4586 , C23C16/4581
摘要： Susceptors are provided that employ layers of CTE-matching materials to reduce the stresses that otherwise lead to cracking and failure. Exemplary CTE-matching materials include metal alloys of aluminum and silicon that can be tailored to specific CTE values by adjusting the ratio of the elements. An exemplary susceptor comprises a CTE-matching material that accommodates the differences in the CTEs of a ceramic material and a thermal barrier layer disposed on opposite sides of the CTE-matching material. Methods are also provided for forming susceptors. These methods comprise assembling the components and bonding the assembly together, such as by diffusion bonding, to produce a susceptor that is a monolithic body.
摘要翻译：提供感受器，其采用CTE匹配材料层来减少否则会导致开裂和失效的应力。示例性的CTE匹配材料包括铝和硅的金属合金，其可以通过调整元素的比例来适应特定的CTE值。示例性的感受器包括CTE匹配材料，该CTE匹配材料适应陶瓷材料和布置在CTE匹配材料的相对侧上的热障层的CTE中的差异。还提供了形成感受器的方法。这些方法包括组装组件并将组件结合在一起，例如通过扩散结合，以产生作为单块体的感受器。

10. 发明申请

WO2005008413A2 METHOD AND APPARATUS FOR AUTOMATED BI-DIRECTIONAL INTEGRATION OF PERIPHERAL DATA SOURCES FOR A PRODUCTION TOOL 审中-公开
标题翻译：用于生产工具的外围数据源的自动双向整合的方法和装置
公开(公告)号：WO2005008413A2
公开(公告)日：2005-01-27
申请号：PCT/US2004/022166
申请日：2004-07-09
申请人： MKS INSTRUMENTS, INC. , HADAR, Ron , SMITH, John, Alexander , RUPP, Gerhard , SCHIMUNEK, Bernhard , ATTWOOD, Mark , LANDESMANN, Lior , ELLIOT, Brent , ROBINSON, Tim , LEV-AMI, Uzi
发明人： HADAR, Ron , SMITH, John, Alexander , RUPP, Gerhard , SCHIMUNEK, Bernhard , ATTWOOD, Mark , LANDESMANN, Lior , ELLIOT, Brent , ROBINSON, Tim , LEV-AMI, Uzi
IPC分类号： G06F
CPC分类号： G05B19/4185 , G05B2219/32126 , G05B2219/34038 , G05B2219/45031 , Y02P90/18 , Y02P90/185
摘要： A method and apparatus for automated bidirectional integration of peripheral data sources for a production tool couples the system components together in a web-based arrangement. The process tools and the peripheral data sources are configured as websites to provide information to the system. Certain components of the system are also configured as browsers to obtain available information and use this information to make decisions and perform actions.
摘要翻译：用于生产工具的外围数据源的自动双向集成的方法和装置将系统组件以基于网络的布置耦合在一起。流程工具和外围数据源被配置为向系统提供信息的网站。系统的某些组件也被配置为浏览器以获取可用的信息并使用该信息作出决定和执行动作。

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