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1. 发明申请

WO2007146558A3 CLASSIFYING FAULTS ASSOCIATED WITH A MANUFACTURING PROCESS 审中-公开
标题翻译：与制造工艺相关的分类故障
公开(公告)号：WO2007146558A3
公开(公告)日：2008-05-08
申请号：PCT/US2007069457
申请日：2007-05-22
申请人： MKS INSTR INC , HENDLER LAWRENCE , LEV-AMI UZI JOSEF
发明人： HENDLER LAWRENCE , LEV-AMI UZI JOSEF
IPC分类号： G05B23/02
CPC分类号： G05B23/0281
摘要： Faults that are associated with a set of variables that are each associated with a manufacturing parameter are classified. A fault vector is defined according to a multivariate analysis based on a contribution to a metric of a subset of the variables. The fault vector is compared to a plurality of previously-defined fault vectors to determine a comparison value indicative of a correlation between the fault vector and the plurality of previously-defined fault vectors. The fault vector is associated with at least one of a first set of fault vectors indicative of a known fault or a second set of fault vectors indicative of an unknown fault based in part on the comparison value.
摘要翻译：与与制造参数相关联的一组变量相关联的故障被分类。根据对变量子集的度量的贡献，根据多变量分析定义故障向量。将故障向量与多个预先定义的故障向量进行比较，以确定指示故障向量与多个先前定义的故障向量之间的相关性的比较值。部分地基于比较值，故障向量与指示已知故障的第一组故障向量或指示未知故障的第二组故障向量中的至少一个相关联。

2. 发明申请

WO2005008731A3 GRAPHICAL USER INTERFACE WITH PROCESS QUALITY INDICATOR 审中-公开
标题翻译：具有过程质量指标的图形用户界面
公开(公告)号：WO2005008731A3
公开(公告)日：2005-04-21
申请号：PCT/US2004022169
申请日：2004-07-09
申请人： MKS INSTR INC , LEV-AMI UZI , SIFNATSCH GUENTER , ATTWOOD MARK
发明人： LEV-AMI UZI , SIFNATSCH GUENTER , ATTWOOD MARK
IPC分类号： G05B19/418 , G06F19/00 , H01L20060101
CPC分类号： G05B19/41875 , G05B2219/35502 , G05B2219/45031 , Y02P90/22
摘要： A graphical user interface for enabling a user to graphically observe on a displaying mechanism a statistical measure of the process quality of a manufacturing process provides for the display of an icon representing a workpiece. The location and color of the icon on the displaying mechanism indicates the process quality of the manufacturing process for the represented workpiece.
摘要翻译：一种图形用户界面，用于使用户能够在显示机构上以图形方式观察制造过程的过程质量的统计度量，用于显示表示工件的图标。显示机构上的图标的位置和颜色表示所表示的工件的制造过程的工艺质量。

3. 发明申请

WO2005008731A2 GRAPHICAL USER INTERFACE WITH PROCESS QUALITY INDICATOR 审中-公开
标题翻译：带过程质量指示器的图形用户界面
公开(公告)号：WO2005008731A2
公开(公告)日：2005-01-27
申请号：PCT/US2004/022169
申请日：2004-07-09
申请人： MKS INSTRUMENTS, INC. , LEV-AMI, Uzi , SIFNATSCH, Guenter , ATTWOOD, Mark
发明人： LEV-AMI, Uzi , SIFNATSCH, Guenter , ATTWOOD, Mark
IPC分类号： H01L
CPC分类号： G05B19/41875 , G05B2219/35502 , G05B2219/45031 , Y02P90/22
摘要： A graphical user interface for enabling a user to graphically observe on a displaying mechanism a statistical measure of the process quality of a manufacturing process provides for the display of an icon representing a workpiece. The location and color of the icon on the displaying mechanism indicates the process quality of the manufacturing process for the represented workpiece.
摘要翻译：用于使用户能够在显示机构上以图形方式观察制造过程的过程质量的统计测量的图形用户界面提供了显示表示工件的图标。显示机构上图标的位置和颜色表示所代表工件的制造过程的过程质量。

4. 发明申请

WO2007008538A3 SELF-CORRECTING MULTIVARIATE ANALYSIS FOR USE IN MONITORING DYNAMIC PARAMETERS IN PROCESS ENVIRONMENTS 审中-公开
公开(公告)号：WO2007008538A3
公开(公告)日：2007-01-18
申请号：PCT/US2006/026236
申请日：2006-07-05
申请人： MKS INSTRUMENTS, INC. , LEV-AMI, Uzi, Josef , HENDLER, Lawrence
发明人： LEV-AMI, Uzi, Josef , HENDLER, Lawrence
IPC分类号： G05B23/02
摘要： A method and apparatus for process monitoring are provided. Process monitoring includes (i) generating a multivariate analysis reference model of a process environment from data corresponding to monitored parameters of the process environment; (ii) designating at least one of the monitored parameters as being correlated to maturation of the process environment; (iii) collecting current process data corresponding to the monitored parameters, including the at least one designated parameter; and (iv) scaling the multivariate reference model based on the current process data of the at least one designated parameter to account for maturation of the process environment. The method further includes generating one or more current multivariate analysis process metrics that represent a current state of the process environment from the current process data; and comparing the current process metrics to the scaled reference model to determine whether the current state of the process environment is acceptable.

5. 发明申请

WO2005101280A2 CONTROLLER AND METHOD TO MEDIATE DATA COLLECTION FROM SMART SENSORS FOR FAB APPLICATIONS 审中-公开
标题翻译：用于FAB应用的智能传感器的数据采集的控制器和方法
公开(公告)号：WO2005101280A2
公开(公告)日：2005-10-27
申请号：PCT/US2005/011527
申请日：2005-04-06
申请人： MKS INSTRUMENTS, INC. , LEV-AMI, Uzi , SIFNATSCH, Guenter , ATTWOOD, Mark
发明人： LEV-AMI, Uzi , SIFNATSCH, Guenter , ATTWOOD, Mark
IPC分类号： G06F19/00
CPC分类号： G05B23/0221 , G05B19/41875 , G05B2219/32181 , G05B2219/37494 , G05B2219/45031 , Y02P90/18 , Y02P90/22
摘要： The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.
摘要翻译：本发明涉及与工具相关的传感器的控制和数据收集。特别地，它涉及使用控制器来调解工具之间的通信，与工具相关联的传感器和诸如主机系统或分布式处理器的数据用户之间的通信。在权利要求书，说明书和附图中描述了本发明的特定方面。

6. 发明申请

WO2005008413A2 METHOD AND APPARATUS FOR AUTOMATED BI-DIRECTIONAL INTEGRATION OF PERIPHERAL DATA SOURCES FOR A PRODUCTION TOOL 审中-公开
标题翻译：用于生产工具的外围数据源的自动双向整合的方法和装置
公开(公告)号：WO2005008413A2
公开(公告)日：2005-01-27
申请号：PCT/US2004/022166
申请日：2004-07-09
申请人： MKS INSTRUMENTS, INC. , HADAR, Ron , SMITH, John, Alexander , RUPP, Gerhard , SCHIMUNEK, Bernhard , ATTWOOD, Mark , LANDESMANN, Lior , ELLIOT, Brent , ROBINSON, Tim , LEV-AMI, Uzi
发明人： HADAR, Ron , SMITH, John, Alexander , RUPP, Gerhard , SCHIMUNEK, Bernhard , ATTWOOD, Mark , LANDESMANN, Lior , ELLIOT, Brent , ROBINSON, Tim , LEV-AMI, Uzi
IPC分类号： G06F
CPC分类号： G05B19/4185 , G05B2219/32126 , G05B2219/34038 , G05B2219/45031 , Y02P90/18 , Y02P90/185
摘要： A method and apparatus for automated bidirectional integration of peripheral data sources for a production tool couples the system components together in a web-based arrangement. The process tools and the peripheral data sources are configured as websites to provide information to the system. Certain components of the system are also configured as browsers to obtain available information and use this information to make decisions and perform actions.
摘要翻译：用于生产工具的外围数据源的自动双向集成的方法和装置将系统组件以基于网络的布置耦合在一起。流程工具和外围数据源被配置为向系统提供信息的网站。系统的某些组件也被配置为浏览器以获取可用的信息并使用该信息作出决定和执行动作。

7. 发明申请

WO2005101280A3 CONTROLLER AND METHOD TO MEDIATE DATA COLLECTION FROM SMART SENSORS FOR FAB APPLICATIONS 审中-公开
标题翻译：用于FAB应用的智能传感器介质数据采集的控制器和方法
公开(公告)号：WO2005101280A3
公开(公告)日：2006-12-28
申请号：PCT/US2005011527
申请日：2005-04-06
申请人： MKS INSTR INC , LEV-AMI UZI , SIFNATSCH GUENTER , ATTWOOD MARK
发明人： LEV-AMI UZI , SIFNATSCH GUENTER , ATTWOOD MARK
IPC分类号： G06F19/00 , G05B19/418 , G05B23/02
CPC分类号： G05B23/0221 , G05B19/41875 , G05B2219/32181 , G05B2219/37494 , G05B2219/45031 , Y02P90/18 , Y02P90/22
摘要： The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.
摘要翻译：本发明涉及与工具相关的传感器的控制和数据收集。特别地，它涉及使用控制器来调解工具之间的通信，与工具相关联的传感器和诸如主机系统或分布式处理器的数据用户之间的通信。在权利要求书，说明书和附图中描述了本发明的特定方面。

8. 发明申请

WO2007146558A2 CLASSIFYING FAULTS ASSOCIATED WITH A MANUFACTURING PROCESS 审中-公开
标题翻译：与制造过程相关的分类故障
公开(公告)号：WO2007146558A2
公开(公告)日：2007-12-21
申请号：PCT/US2007/069457
申请日：2007-05-22
申请人： MKS INSTRUMENTS, INC , HENDLER, Lawrence , LEV-AMI, Uzi, Josef
发明人： HENDLER, Lawrence , LEV-AMI, Uzi, Josef
CPC分类号： G05B23/0281
摘要： Faults that are associated with a set of variables that are each associated with a manufacturing parameter are classified. A fault vector is defined according to a multivariate analysis based on a contribution to a metric of a subset of the variables. The fault vector is compared to a plurality of previously-defined fault vectors to determine a comparison value indicative of a correlation between the fault vector and the plurality of previously-defined fault vectors. The fault vector is associated with at least one of a first set of fault vectors indicative of a known fault or a second set of fault vectors indicative of an unknown fault based in part on the comparison value.
摘要翻译：与与制造参数相关联的一组变量相关联的故障被分类。根据对变量子集的度量的贡献，根据多变量分析来定义故障向量。将故障向量与多个先前定义的故障向量进行比较，以确定指示故障向量与多个先前定义的故障向量之间的相关性的比较值。部分地基于比较值，故障向量与指示已知故障的第一组故障向量或指示未知故障的第二组故障向量中的至少一个相关联。

9. 发明申请

WO2006014888A3 FAILSAFE SWITCHING OF INTELLIGENT CONTROLLER METHOD AND DEVICE 审中-公开
标题翻译：智能控制器方法和设备的故障切换
公开(公告)号：WO2006014888A3
公开(公告)日：2007-07-19
申请号：PCT/US2005026375
申请日：2005-07-25
申请人： MKS INSTR INC , KHALIL NIDAL , SIFNATSCH GUENTER , LEV-AMI UZI , HADAR RON
发明人： KHALIL NIDAL , SIFNATSCH GUENTER , LEV-AMI UZI , HADAR RON
IPC分类号： G06F11/00
CPC分类号： G05B9/03
摘要： The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings [figure 5].
摘要翻译：本发明涉及与工具相关的传感器的控制和数据收集。特别地，它涉及使用控制器来调解工具之间的通信，与工具相关联的传感器和诸如主机系统或分布式处理器的数据用户之间的通信。在权利要求书，说明书和附图中描述了本发明的特定方面[图5]。

10. 发明申请

WO2007008538A2 SELF-CORRECTING MULTIVARIATE ANALYSIS FOR USE IN MONITORING DYNAMIC PARAMETERS IN PROCESS ENVIRONMENTS 审中-公开
标题翻译：自我修正多元分析用于监测过程环境中的动态参数
公开(公告)号：WO2007008538A2
公开(公告)日：2007-01-18
申请号：PCT/US2006026236
申请日：2006-07-05
申请人： MKS INSTR INC , LEV-AMI UZI JOSEF , HENDLER LAWRENCE
发明人： LEV-AMI UZI JOSEF , HENDLER LAWRENCE
IPC分类号： G05B23/02
CPC分类号： G05B23/0254
摘要： A method and apparatus for process monitoring are provided. Process monitoring includes (i) generating a multivariate analysis reference model of a process environment from data corresponding to monitored parameters of the process environment; (ii) designating at least one of the monitored parameters as being correlated to maturation of the process environment; (iii) collecting current process data corresponding to the monitored parameters, including the at least one designated parameter; and (iv) scaling the multivariate reference model based on the current process data of the at least one designated parameter to account for maturation of the process environment. The method further includes generating one or more current multivariate analysis process metrics that represent a current state of the process environment from the current process data; and comparing the current process metrics to the scaled reference model to determine whether the current state of the process environment is acceptable.
摘要翻译：提供了一种用于过程监控的方法和装置。过程监控包括（i）从对应于过程环境的监视参数的数据生成过程环境的多变量分析参考模型; （ii）将所监视的参数中的至少一个指定为与过程环境的成熟相关; （iii）收集与所监视参数对应的当前过程数据，包括所述至少一个指定参数; 以及（iv）基于所述至少一个指定参数的当前过程数据来缩放多变量参考模型以考虑过程环境的成熟度。该方法还包括从当前处理数据生成表示过程环境的当前状态的一个或多个当前多变量分析过程度量; 以及将当前过程度量与缩放的参考模型进行比较，以确定过程环境的当前状态是否可接受。

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