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    • 2. 发明申请
    • PIEZOELECTRIC POSITIONER
    • 压电式定位器
    • WO2005067072A1
    • 2005-07-21
    • PCT/GB2005/000037
    • 2005-01-07
    • THORLABS, INC.DIXON, Michael, JohnDHESE, Keith, Allen
    • DIXON, Michael, JohnDHESE, Keith, Allen
    • H01L41/09
    • H02N2/028H02N2/023
    • A multi-axis piezoelectric positioner (16, 36, 56, 116) is described. The positioner comprises a fixed part (20, 60, 120) which may be moved relative to a moveable part (22, 62, 122) in a plane. The moveable part comprises a piezoelectric device (24, 64A-D; 66A-D, 124), which is arranged so that it may expand and contract within the plane. The moveable part may be selectively clamped in position relative to the fixed part at first, second and third locations by corresponding first, second and third releasable clamp mechanisms (28A-C, 34A-C, 63A-D, 128A-C). The moveable part may thus be moved in the plane relative by the fixed part by selected activation of ones of the releasable clamp mechanisms while the piezoelectric device is expanded or contracted. This provides for a parallel-mechanism multi-axis piezoelectric positioner. A carrier can be provided which may be positioned along a direction perpendicular to the plane to provide for a three-axis positioner.
    • 描述了多轴压电定位器(16,36,56,116)。 定位器包括固定部分(20,60,120),该固定部分可相对于平面中的可移动部分(22,62,122)移动。 可移动部件包括压电装置(24,64A-D; 66A-D,124),其布置成使得其可在平面内膨胀和收缩。 通过对应的第一,第二和第三可释放的夹紧机构(28A-C,34A-C,63A-D,128A-C),可移动部件可以在第一,第二和第三位置处相对于固定部分选择性地夹紧就位。 因此,当压电装置膨胀或收缩时,可移动部件可以通过选择的可释放的夹紧机构中的一个而被固定部件在平面内移动。 这提供了一种并联机构的多轴压电定位器。 可以提供可沿垂直于该平面的方向定位的载体,以提供三轴定位器。
    • 3. 发明申请
    • PIEZOELECTRIC POSITIONER
    • 压电式定位器
    • WO2005067072A8
    • 2006-04-27
    • PCT/GB2005000037
    • 2005-01-07
    • THORLABS INCDIXON MICHAEL JOHNDHESE KEITH ALLEN
    • DIXON MICHAEL JOHNDHESE KEITH ALLEN
    • H01L41/09
    • H02N2/028H02N2/023
    • A multi-axis piezoelectric positioner (16, 36, 56, 116) is described. The positioner comprises a fixed part (20, 60, 120) which may be moved relative to a moveable part (22, 62, 122) in a plane. The moveable part comprises a piezoelectric device (24, 64A-D; 66A-D, 124), which is arranged so that it may expand and contract within the plane. The moveable part may be selectively clamped in position relative to the fixed part at first, second and third locations by corresponding first, second and third releasable clamp mechanisms (28A-C, 34A-C, 63A-D, 128A-C). The moveable part may thus be moved in the plane relative by the fixed part by selected activation of ones of the releasable clamp mechanisms while the piezoelectric device is expanded or contracted. This provides for a parallel-mechanism multi-axis piezoelectric positioner. A carrier can be provided which may be positioned along a direction perpendicular to the plane to provide for a three-axis positioner.
    • 描述了多轴压电定位器(16,36,56,116)。 定位器包括固定部分(20,60,120),该固定部分可相对于平面中的可移动部分(22,62,122)移动。 可移动部件包括压电装置(24,64A-D; 66A-D,124),其布置成使得其可在平面内膨胀和收缩。 通过对应的第一,第二和第三可释放的夹紧机构(28A-C,34A-C,63A-D,128A-C),可移动部件可以在第一,第二和第三位置处相对于固定部分选择性地夹紧就位。 因此,当压电装置膨胀或收缩时,可移动部件可以通过选择的可释放的夹紧机构中的一个而被固定部件在平面内移动。 这提供了一种并联机构的多轴压电定位器。 可以提供可沿垂直于该平面的方向定位的载体,以提供三轴定位器。