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1. 发明申请

WO2011060416A3 ENERGY SAVINGS BASED ON POWER FACTOR CORRECTION 审中-公开
标题翻译：基于功率因数校正的能源节约
公开(公告)号：WO2011060416A3
公开(公告)日：2011-08-18
申请号：PCT/US2010056822
申请日：2010-11-16
申请人： APPLIED MATERIALS INC , LOLDJ YOUSSEF A , GELO MIROSLAV , JUNG JAY J , CLARK DANIEL O
发明人： LOLDJ YOUSSEF A , GELO MIROSLAV , JUNG JAY J , CLARK DANIEL O
IPC分类号： G05B11/48 , G05B19/418
CPC分类号： G05B19/042 , Y02P80/10 , Y02P90/14 , Y02P90/18 , Y10T307/406 , Y10T307/469
摘要： Methods and apparatus for enhanced control over electronic device manufacturing systems are provided herein. In some embodiments, an integrated sub-fab system in accordance with the present invention may be provided with fixed or real time power factor management, correction, reporting, and tabulation. Such a system could also be used by any industry consuming significant levels of power. The integrated sub-fab system power management could be extended to other parts of the factory where high levels of power are used.
摘要翻译：本文提供了用于增强对电子设备制造系统的控制的方法和装置。在一些实施例中，根据本发明的集成子晶圆厂系统可以被提供有固定或实时功率因数管理，校正，报告和制表。这样的系统也可以被任何消耗大量功率的工业所使用。集成的子晶圆系统电源管理可以扩展到使用高电平的工厂的其他部分。

2. 发明申请

WO2010088592A2 ABATEMENT APPARATUS WITH SCRUBBER CONDUIT 审中-公开
标题翻译：带洗涤器导管的脱脂装置
公开(公告)号：WO2010088592A2
公开(公告)日：2010-08-05
申请号：PCT/US2010/022716
申请日：2010-02-01
申请人： APPLIED MATERIALS, INC. , CLARK, Daniel, O. , DICKINSON, Colin, John , JUNG, Jay, J. , BROWN, Daniel, Stephan , MOALEM, Mehran , HOOSHDARAN, Frank, F. , FARNIA, Morteza , PAGE, Barry , SYPHERD, Gary , DAHM, Jonathan , CHANDLER, Phil
发明人： CLARK, Daniel, O. , DICKINSON, Colin, John , JUNG, Jay, J. , BROWN, Daniel, Stephan , MOALEM, Mehran , HOOSHDARAN, Frank, F. , FARNIA, Morteza , PAGE, Barry , SYPHERD, Gary , DAHM, Jonathan , CHANDLER, Phil
IPC分类号： B01D53/78 , B01D47/00
CPC分类号： B01D47/027 , B01D47/06 , B01D53/185 , B01D53/40 , B01D53/78 , B01D2251/604 , B01D2251/80 , B01D2258/0216
摘要： Embodiments of an abatement apparatus are disclosed herein. In some embodiments, an abatement apparatus may include a scrubber configured to receive an effluent stream from a process chamber and further configured to remove first particles from the effluent stream; a scrubber conduit coupled to the scrubber to receive the effluent stream therefrom and configured to remove second particles from the effluent stream, the scrubber conduit having one or more inlets configured to provide a fluid to sufficiently wet an interior surface of the scrubber conduit to trap the second particles thereon and to wash the second particles therealong; and a central scrubber coupled to the scrubber via the scrubber conduit. In some embodiments, the scrubber conduit is downward sloping from the scrubber to the central scrubber. In some embodiments, a plurality of scrubbers may be coupled to the central scrubber via a plurality of scrubber conduits.
摘要翻译：本文公开了减排设备的实施例。在一些实施例中，减量装置可以包括洗涤器，该洗涤器构造成接收来自处理室的流出物流并且还被配置为从流出物流中去除第一颗粒; 洗涤器导管，所述洗涤器导管连接至所述洗涤器以接收来自所述洗涤器的流出物流并配置成从所述流出物流移除第二颗粒，所述洗涤器导管具有一个或多个入口，所述入口构造成提供流体以充分湿润所述洗涤器导管的内表面，第二颗粒在其上并沿其洗涤第二颗粒; 以及通过洗涤器导管连接到洗涤器的中央洗涤器。在一些实施例中，洗涤器导管从洗涤器向中央洗涤器向下倾斜。在一些实施例中，多个洗涤器可以通过多个洗涤器导管连接到中心洗涤器。

3. 发明申请

WO2010045468A3 METHODS AND APPARATUS FOR RECOVERING HEAT FROM PROCESSING SYSTEMS 审中-公开
公开(公告)号：WO2010045468A3
公开(公告)日：2010-04-22
申请号：PCT/US2009/060857
申请日：2009-10-15
申请人： APPLIED MATERIALS, INC. , NEUBER, Andreas , CLARK, Daniel, O.
发明人： NEUBER, Andreas , CLARK, Daniel, O.
IPC分类号： H01L21/00 , H01L21/02
摘要： Methods and apparatus for recovering heat from disposed effluents are disclosed herein. In some embodiments, an apparatus may include a first process chamber configured for gaseous or liquid processes; a second process chamber configured for liquid processes; and a heat pump having a compressor and a first heat exchanger, wherein the compressor is configured to use a first effluent exhausted from the first process chamber and wherein the first heat exchanger having first and second sides configured to transfer heat therebetween, wherein the first side is configured to flow a liquid reagent therethrough and into the second process chamber, and wherein the second side is configured to flow the pressurized first effluent from the first process chamber therethrough. In some embodiments, a heater may be disposed between the heat pump and the second process chamber to further heat the liquid reagent prior to entering the second process chamber.

4. 发明申请

WO2009105433A2 METHODS AND APPARATUS FOR HEATING REAGENTS AND EFFLUENTS IN ABATEMENT SYSTEMS 审中-公开
标题翻译：在加热系统中加热试剂和废水的方法和装置
公开(公告)号：WO2009105433A2
公开(公告)日：2009-08-27
申请号：PCT/US2009034334
申请日：2009-02-17
申请人： APPLIED MATERIALS INC , VERMEULEN ROBBERT M , CLARK DANIEL O
发明人： VERMEULEN ROBBERT M , CLARK DANIEL O
IPC分类号： H01L21/00 , H01L21/30
CPC分类号： H01L21/67103
摘要： In some aspects, an apparatus for abating effluent from an electronic device manufacturing process tool is provided, including: a reaction chamber adapted to receive an effluent; and a reagent heating apparatus in fluid connection with the reaction chamber; wherein the reagent heating apparatus is adapted to heat a reagent and to introduce the heated reagent into a heated reagent reaction zone of the reaction chamber; and wherein the reaction chamber is further adapted to mix the effluent and the heated reagent in the heated reagent reaction zone. Other apparatus and methods are disclosed.
摘要翻译：在一些方面，提供了一种用于减轻来自电子设备制造工艺工具的流出物的设备，包括：适于接收流出物的反应室; 以及与所述反应室流体连接的试剂加热装置; 其中所述试剂加热装置适于加热试剂并将加热的试剂引入反应室的加热试剂反应区; 并且其中所述反应室还适于将所述流出物和所述加热的试剂混合在所述加热的试剂反应区中。公开了其他装置和方法。

5. 发明申请

WO2011068936A3 METHODS AND APPARATUS FOR TREATING EXHAUST GAS IN A PROCESSING SYSTEM 审中-公开
标题翻译：在处理系统中处理废气的方法和设备
公开(公告)号：WO2011068936A3
公开(公告)日：2011-10-27
申请号：PCT/US2010058664
申请日：2010-12-02
申请人： APPLIED MATERIALS INC , DICKINSON COLIN JOHN , MOALEM MEHRAN , CLARK DANIEL O
发明人： DICKINSON COLIN JOHN , MOALEM MEHRAN , CLARK DANIEL O
IPC分类号： H01L21/02
CPC分类号： B01D53/32 , B01D53/92 , B01D2258/0216 , B01D2259/122 , B01D2259/80 , B01D2259/818 , C23C16/4412
摘要： Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, an apparatus for treating an exhaust gas in a foreline of a substrate processing system includes a plasma source coupled to a foreline of a process chamber, a reagent source coupled to the foreline upstream of the plasma source, and a foreline gas injection kit coupled to the foreline to controllably deliver a gas to the foreline, wherein the foreline injection kit includes a pressure regulator to set a foreline gas delivery pressure setpoint, and a first pressure gauge coupled to monitor a delivery pressure of the gas upstream of the foreline.
摘要翻译：本文提供了用于处理基板处理系统的前级管线中的排气的方法和设备。在一些实施例中，用于处理衬底处理系统的前级管线中的废气的设备包括耦合到处理室的前级管线的等离子体源，耦合到等离子体源上游的前级管线的试剂源以及前级管线气体注入其耦合到前级管线以可控地将气体输送到前级管线，其中，前级管线注射套件包括用于设定前级管线气体输送压力设定点的压力调节器，以及耦合以监测前级管线上游气体的输送压力的第一压力计。

6. 发明申请

WO2011060416A2 ENERGY SAVINGS BASED ON POWER FACTOR CORRECTION 审中-公开
标题翻译：基于功率因数校正的节能
公开(公告)号：WO2011060416A2
公开(公告)日：2011-05-19
申请号：PCT/US2010/056822
申请日：2010-11-16
申请人： APPLIED MATERIALS, INC. , LOLDJ, Youssef, A. , GELO, Miroslav , JUNG, Jay, J. , CLARK, Daniel, O.
发明人： LOLDJ, Youssef, A. , GELO, Miroslav , JUNG, Jay, J. , CLARK, Daniel, O.
CPC分类号： G05B19/042 , Y02P80/10 , Y02P90/14 , Y02P90/18 , Y10T307/406 , Y10T307/469
摘要： Methods and apparatus for enhanced control over electronic device manufacturing systems are provided herein. In some embodiments, an integrated sub-fab system in accordance with the present invention may be provided with fixed or real time power factor management, correction, reporting, and tabulation. Such a system could also be used by any industry consuming significant levels of power. The integrated sub-fab system power management could be extended to other parts of the factory where high levels of power are used.
摘要翻译：本文提供了用于增强对电子器件制造系统的控制的方法和设备。在一些实施例中，根据本发明的集成次晶圆厂系统可以被提供有固定或实时功率因数管理，校正，报告和制表。这种系统也可以被任何消耗大量电力的工业所使用。集成的次晶圆厂系统电源管理可以扩展到工厂中使用高功率的其他部分。

7. 发明申请

WO2010111291A2 POINT OF USE RECYCLING SYSTEM FOR CMP SLURRY 审中-公开
标题翻译：使用CMP浆料回收系统的要点
公开(公告)号：WO2010111291A2
公开(公告)日：2010-09-30
申请号：PCT/US2010/028346
申请日：2010-03-23
申请人： APPLIED MATERIALS, INC. , NEUBER, Andreas , CHANDLER, Phil , STOW, Cliff , CLARK, Daniel O. , KIEFER, Michael , LEIGHTON, Jamie
发明人： NEUBER, Andreas , CHANDLER, Phil , STOW, Cliff , CLARK, Daniel O. , KIEFER, Michael , LEIGHTON, Jamie
IPC分类号： H01L21/304 , H01L21/00
CPC分类号： B24B57/02 , B01D61/025 , B01D61/027 , B01D61/142 , B01D61/145 , B01D61/147 , B01D61/58 , B01D65/02 , B01D2315/08 , B01D2315/10 , B01D2321/04 , B24B37/04
摘要： The present invention generally relates to apparatus and method for recycling both polishing slurry and rinse water from CMP processes. The present invention also relates to rheology measurements and agglomeration prevention using centrifugal pumps.
摘要翻译：本发明一般涉及用于从CMP工艺回收抛光浆料和冲洗水的设备和方法。本发明还涉及使用离心泵的流变学测量和聚集防止。

8. 发明申请

WO2010045468A2 METHODS AND APPARATUS FOR RECOVERING HEAT FROM PROCESSING SYSTEMS 审中-公开
标题翻译：从加工系统回收热量的方法和装置
公开(公告)号：WO2010045468A2
公开(公告)日：2010-04-22
申请号：PCT/US2009060857
申请日：2009-10-15
申请人： APPLIED MATERIALS INC , NEUBER ANDREAS , CLARK DANIEL O
发明人： NEUBER ANDREAS , CLARK DANIEL O
IPC分类号： H01L21/00 , H01L21/02
CPC分类号： H01L21/67017 , Y02P70/605
摘要： Methods and apparatus for recovering heat from disposed effluents are disclosed herein. In some embodiments, an apparatus may include a first process chamber configured for gaseous or liquid processes; a second process chamber configured for liquid processes; and a heat pump having a compressor and a first heat exchanger, wherein the compressor is configured to use a first effluent exhausted from the first process chamber and wherein the first heat exchanger having first and second sides configured to transfer heat therebetween, wherein the first side is configured to flow a liquid reagent therethrough and into the second process chamber, and wherein the second side is configured to flow the pressurized first effluent from the first process chamber therethrough. In some embodiments, a heater may be disposed between the heat pump and the second process chamber to further heat the liquid reagent prior to entering the second process chamber.
摘要翻译：本文公开了从处置的废水中回收热量的方法和装置。在一些实施例中，装置可以包括被配置用于气态或液体过程的第一处理室; 配置用于液体处理的第二处理室; 以及具有压缩机和第一热交换器的热泵，其中所述压缩机构造成使用从所述第一处理室排出的第一流出物，并且其中所述第一热交换器具有被配置为在其间传热的第一和第二侧，其中所述第一侧被配置为使液体试剂流过其中并进入第二处理室，并且其中第二侧构造成使来自第一处理室的加压的第一流出物流过其中。在一些实施例中，加热器可以设置在热泵和第二处理室之间，以在进入第二处理室之前进一步加热液体试剂。

9. 发明申请

WO2009105434A3 APPARATUS AND METHODS FOR SUPPLYING FUEL EMPLOYED BY ABATEMENT SYSTEMS TO EFFECTIVELY ABATE EFFLUENTS 审中-公开
标题翻译：用于提供废物处理系统的燃料提供有效消耗的装置和方法
公开(公告)号：WO2009105434A3
公开(公告)日：2009-10-15
申请号：PCT/US2009034336
申请日：2009-02-17
申请人： APPLIED MATERIALS INC , CLARK DANIEL O , FOX ALLEN G , VERMEULEN ROBBERT M , CRAWFORD SHAUN W
发明人： CLARK DANIEL O , FOX ALLEN G , VERMEULEN ROBBERT M , CRAWFORD SHAUN W
IPC分类号： H01L21/00 , F02C1/00
CPC分类号： F23G7/065 , F23G2209/142 , Y10T137/877
摘要： An abatement apparatus for introducing fuel into an electronic device manufacturing effluent abatement tool, including: a manifold; a fuel source adapted to supply fuel to the manifold through a fuel conduit; and a plurality of nozzles adapted to receive fuel from the manifold; wherein the manifold is adapted to supply fuel to the nozzles at a fuel velocity greater than a flame velocity.
摘要翻译：一种用于将燃料引入制造污水消除工具的电子装置中的减排装置，包括：歧管; 燃料源，其适于通过燃料管道向所述歧管供应燃料; 以及适于从所述歧管接收燃料的多个喷嘴; 其中所述歧管适于以大于火焰速度的燃料速度向所述喷嘴供应燃料。

10. 发明申请

WO2009105434A2 APPARATUS AND METHODS FOR SUPPLYING FUEL EMPLOYED BY ABATEMENT SYSTEMS TO EFFECTIVELY ABATE EFFLUENTS 审中-公开
标题翻译：用于供应受减速系统作用的燃料以有效减少流量的装置和方法
公开(公告)号：WO2009105434A2
公开(公告)日：2009-08-27
申请号：PCT/US2009/034336
申请日：2009-02-17
申请人： APPLIED MATERIALS, INC. , CLARK, Daniel, O. , FOX, Allen, G. , VERMEULEN, Robbert, M. , CRAWFORD, Shaun, W.
发明人： CLARK, Daniel, O. , FOX, Allen, G. , VERMEULEN, Robbert, M. , CRAWFORD, Shaun, W.
IPC分类号： H01L21/00 , F02C1/00
CPC分类号： F23G7/065 , F23G2209/142 , Y10T137/877
摘要： An abatement apparatus for introducing fuel into an electronic device manufacturing effluent abatement tool, including: a manifold; a fuel source adapted to supply fuel to the manifold through a fuel conduit; and a plurality of nozzles adapted to receive fuel from the manifold; wherein the manifold is adapted to supply fuel to the nozzles at a fuel velocity greater than a flame velocity.
摘要翻译：一种用于将燃料引入电子装置制造流出物减排工具的减排设备，所述减排设备包括：歧管; 适于通过燃料导管将燃料供应到歧管的燃料源; 以及适于从歧管接收燃料的多个喷嘴; 其中歧管适于以大于火焰速度的燃料速度向喷嘴供应燃料。

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