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1. 发明申请

WO2009144727A2 CHARGED PARTICLE DETECTION SYSTEM AND METHOD 审中-公开
标题翻译：充电颗粒检测系统和方法
公开(公告)号：WO2009144727A2
公开(公告)日：2009-12-03
申请号：PCT/IL2009/000534
申请日：2009-05-31
申请人： EL-MUL TECHNOLOGIES, LTD. , SHOFMAN, Semyon , CHEIFETZ, Eli , SCHON, Armin , PINHASI, Eitan
发明人： SHOFMAN, Semyon , CHEIFETZ, Eli , SCHON, Armin , PINHASI, Eitan
IPC分类号： H01J3/14
CPC分类号： H01J37/244 , H01J2237/2448
摘要： A charged particle detection device comprising an electric field generator configured and operable to create an electric field defining trajectories for charged particles of different types emitted from a sample as a result of the sample interaction with a particle beam, the emitted charged particles of different types being one of the following: electrons, positive ions and negative ions, an ion-to-electron converter having a conversion surface including a continuous interaction region oriented so as to intersect the trajectories of the charged particles of different types propagating from the sample, the conversion surface operative to emit electrons in response to the surface interaction with the charged particles of the different types, and an electron detector configured and operable to receive electrons from the converter and generate output data indicative thereof.
摘要翻译：一种带电粒子检测装置，其包括电场发生器，其被配置并可操作以产生电场，该电场定义了作为样品与粒子束相互作用的结果从样品发射的不同类型的带电粒子的轨迹，不同类型的发射带电粒子以下之一：电子，正离子和负离子，具有转换表面的离子到电子转换器，转换表面包括定向为与从样品传播的不同类型的带电粒子的轨迹相交的连续相互作用区域，转换表面响应于与不同类型的带电粒子的表面相互作用而发射电子，以及电子检测器，其配置和操作以从转换器接收电子并产生指示其的输出数据。

2. 发明申请

WO2005015599A2 E X B ION DETECTOR FOR HIGH EFFICIENCY TIME-OF-FLIGHT MASS SPECTROMETERS 审中-公开
标题翻译： E X B离子检测器用于高效飞行时间质谱仪
公开(公告)号：WO2005015599A2
公开(公告)日：2005-02-17
申请号：PCT/EP2004008451
申请日：2004-07-28
申请人： EL MUL TECHNOLOGIES LTD , CHEIFETZ ELI , SCHON ARMIN
发明人： CHEIFETZ ELI , SCHON ARMIN
IPC分类号： H01J49/00 , H01J49/02 , H01J49/10 , H01J49/40
CPC分类号： H01J49/025 , H01J49/40
摘要： An ion detector, comprising a planar entrance plate with an entrance window, which comprises a first mesh; a converter assembly comprising a planar converter plate and a converter member for providing electrons upon impact of ions, said converter member being supported by said converter plate; a planar exit plate, with an exit window; the planes of the above plates being parallel, the converter plate and the exit plate facing the entrance plate, the converter member being aligned with the entrance window, the other plates being biasable with respect to the entrance plate, to provide a homogeneous electric field between the converter plate and the exit plate, respectively and the entrance plate; the ion detector further comprising a magnet assembly for providing a magnetic field in the space between the plates that the electrons from the converter plate can pass through the exit window; towards a detection assembly.
摘要翻译： 1。一种离子检测器，包括具有入口窗口的平面入口板，所述入口窗口包括第一网格; 包括平面转换器板和用于在离子撞击时提供电子的转换器部件的转换器组件，所述转换器部件由所述转换器板支撑; 具有出射窗的平面出射板; 上述板的平面是平行的，转换器板和面对入口板的出口板，转换器构件与入口窗口对准，其他板可相对于入口板偏置，以在两者之间提供均匀的电场转换器板和出口板以及入口板; 所述离子检测器还包括用于在所述板之间的空间中提供磁场的磁体组件，所述来自所述转换器板的电子可以穿过所述出射窗; 朝向检测组件。

3. 发明申请

WO2006120005A1 PARTICLE DETECTOR FOR SECONDARY IONS AND DIRECT AND OR INDIRECT SECONDARY ELECTRONS 审中-公开
标题翻译：用于二次离子和直接或间接二次电子的颗粒检测器
公开(公告)号：WO2006120005A1
公开(公告)日：2006-11-16
申请号：PCT/EP2006/004465
申请日：2006-05-11
申请人： EL-MUL TECHNOLOGIES LTD. , SCHÖN, Armin , CHEIFETZ, Eli , SHOFMAN, Semyon
发明人： SCHÖN, Armin , CHEIFETZ, Eli , SHOFMAN, Semyon
IPC分类号： H01J37/244 , H01J43/22
CPC分类号： G01N23/2251 , H01J37/244 , H01J37/28 , H01J43/22 , H01J43/24 , H01J2237/2448 , H01J2237/2449 , H01J2237/31749
摘要： A multi-purpose efficient charge particle detector that by switching bias voltages measures either secondary ions, or secondary electrons (SE) from a sample, or secondary electrons that originate from back scattered electrons (SE3), is described. The basic version of the detector structure and two stripped down versions enable its use for the following detection combinations: 1. The major version is for measuring secondary ions, or secondary electrons from the sample, or secondary electrons due to back-scattered electrons that hit parts other than the sample together or without secondary electrons from the sample. 2. Measuring secondary ions or secondary electrons from the sample (no SE3). 3. Measuring secondary electrons from the sample and/or secondary electrons resulting from back-scattered electrons hitting objects other than the sample (no ions).
摘要翻译：描述了通过切换偏置电压来测量来自样品的二次离子或二次电子（SE）或源自背散射电子（SE3）的二次电子的多用途有效电荷粒子检测器。检测器结构的基本版本和两个剥离版本使其能够用于以下检测组合：1.主要版本用于测量二次离子或来自样品的二次电子，或由于后向散射的电子而产生的二次电子除了样品之外的部分或来自样品的二次电子。 2.从样品（无SE3）测量二次离子或二次电子。 3.测量来自样品的二次电子和/或由后向散射的电子产生的二次电子撞击除样品之外的物体（无离子）。

4. 发明申请

WO2005015599A3 E X B ION DETECTOR FOR HIGH EFFICIENCY TIME-OF-FLIGHT MASS SPECTROMETERS 审中-公开
公开(公告)号：WO2005015599A3
公开(公告)日：2005-02-17
申请号：PCT/EP2004/008451
申请日：2004-07-28
申请人： EL-MUL TECHNOLOGIES LTD. , CHEIFETZ, Eli , SCHON, Armin
发明人： CHEIFETZ, Eli , SCHON, Armin
IPC分类号： H01J49/02
摘要： An ion detector, comprising a planar entrance plate with an entrance window, which comprises a first mesh; a converter assembly comprising a planar converter plate and a converter member for providing electrons upon impact of ions, said converter member being supported by said converter plate; a planar exit plate, with an exit window; the planes of the above plates being parallel, the converter plate and the exit plate facing the entrance plate, the converter member being aligned with the entrance window, the other plates being biasable with respect to the entrance plate, to provide a homogeneous electric field between the converter plate and the exit plate, respectively and the entrance plate; the ion detector further comprising a magnet assembly for providing a magnetic field in the space between the plates that the electrons from the converter plate can pass through the exit window; towards a detection assembly.

5. 发明申请

WO2009144727A3 CHARGED PARTICLE DETECTION SYSTEM AND METHOD 审中-公开
标题翻译：充电颗粒检测系统和方法
公开(公告)号：WO2009144727A3
公开(公告)日：2010-01-21
申请号：PCT/IL2009000534
申请日：2009-05-31
申请人： EL MUL TECHNOLOGIES LTD , SHOFMAN SEMYON , CHEIFETZ ELI , SCHON ARMIN , PINHASI EITAN
发明人： SHOFMAN SEMYON , CHEIFETZ ELI , SCHON ARMIN , PINHASI EITAN
IPC分类号： H01J49/06
CPC分类号： H01J37/244 , H01J2237/2448
摘要： A charged particle detection device comprising an electric field generator configured and operable to create an electric field defining trajectories for charged particles of different types emitted from a sample as a result of the sample interaction with a particle beam, the emitted charged particles of different types being one of the following: electrons, positive ions and negative ions, an ion-to-electron converter having a conversion surface including a continuous interaction region oriented so as to intersect the trajectories of the charged particles of different types propagating from the sample, the conversion surface operative to emit electrons in response to the surface interaction with the charged particles of the different types, and an electron detector configured and operable to receive electrons from the converter and generate output data indicative thereof.
摘要翻译：一种带电粒子检测装置，其包括电场发生器，其被配置并可操作以产生电场，该电场定义了作为样品与粒子束相互作用的结果从样品发射的不同类型的带电粒子的轨迹，不同类型的发射带电粒子以下之一：电子，正离子和负离子，具有转换表面的离子到电子转换器，转换表面包括定向为与从样品传播的不同类型的带电粒子的轨迹相交的连续相互作用区域，转换表面响应于与不同类型的带电粒子的表面相互作用而发射电子，以及电子检测器，其配置和操作以从转换器接收电子并产生指示其的输出数据。

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