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    • 1. 发明申请
    • WAFER-LEVEL BURN-IN AND TEST CARTRIDGE AND METHODS
    • 水平测量和测试方法
    • WO0104643A3
    • 2002-04-18
    • PCT/US0019391
    • 2000-07-13
    • AEHR TEST SYSTEMSUHER FRANK OTTOANDBERG JOHN WILLIAMCARBONE MARK CHARLESRICHMOND DONALD PAUL II
    • UHER FRANK OTTOANDBERG JOHN WILLIAMCARBONE MARK CHARLESRICHMOND DONALD PAUL II
    • G01R31/26G01R1/04G01R1/06G01R31/28H01L21/66H05K3/00G01R31/316
    • G01R1/0491G01R31/2806G01R31/2831G01R31/2863G01R31/2865G01R31/2867G01R31/2886H05K3/4691
    • A cartridge (10) includes a chuck plate (12) for receiving a wafer (74) and a probe plate (14) for establishing electrical contact with the wafer. In use, a mechanical connecting device (90) locks the chuck plate and the probe plate fixed relative to one another to maintain alignment of the wafer and the probe plate. Preferably, electrical contact with the wafer is established using a probe card (50) that is movably mounted to the probe plate by means of a plurality of leaf springs (52). The mechanical connecting device is preferably a kinematic coupling including a male connector (94) and first and second opposed jaws (122, 124). Each of the jaws is pivotable from a retracted position in which the male connector can be inserted between the jaws and an engaging position in which the jaws prevent withdrawal of the male connector from between the jaws. The male connector is movable between an extended and a retracted position, and is biased towards the retracted position. This provides a positive clamping force that pulls the chuck and probe plates together when the mechanical connecting device is engaged. To leaf a wafer into the cartridge, the wafer is placed on the chuck plate, the probe plate is aligned with the wafer, and the chuck plate and the probe plate are locked together. The cartridge can then be removed from the alignment device and placed in a burn-in or test chamber that does not itself require means for aligning the wafer or for providing a probe actuation force.
    • 盒(10)包括用于接收晶片(74)的卡盘板(12)和用于与晶片建立电接触的探针板(14)。 在使用中,机械连接装置(90)相对于彼此固定的卡盘板和探针板锁定,以保持晶片和探针板的对准。 优选地,使用通过多个​​板簧(52)可移动地安装到探针板的探针卡(50)来建立与晶片的电接触。 机械连接装置优选地是包括阳连接器(94)和第一和第二相对的夹爪(122,124)的运动耦合。 每个夹爪可从缩回位置枢转,在该缩回位置中,阳连接器可以插入在夹爪之间,并且夹爪防止凸形连接器从夹爪之间拔出。 阳连接器可在延伸位置和缩回位置之间移动,并且朝着缩回位置偏置。 这提供了当夹持机械连接装置时将卡盘和探针板拉到一起的正夹紧力。 为了将晶片放入盒中,将晶片放置在卡盘上,探针板与晶片对准,并将卡盘板和探针板锁定在一起。 然后可以将该盒从对准装置移除并放置在本身不需要用于对准晶片或提供探针致动力的装置的老化或测试室中。