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1. 发明申请

WO2012098550A1 OPTICAL SYSTEM AND METHOD FOR MEASURING IN THREE-DIMENSIONAL STRUCTURES 审中-公开
标题翻译：用于测量三维结构的光学系统和方法
公开(公告)号：WO2012098550A1
公开(公告)日：2012-07-26
申请号：PCT/IL2012/050014
申请日：2012-01-18
申请人： NOVA MEASURING INSTRUMENTS LTD. , BARAK, Gilad , BRILL, Boaz
发明人： BARAK, Gilad , BRILL, Boaz
IPC分类号： G01B11/06
CPC分类号： G01N21/9501 , G01B11/02 , G01B11/12 , G01B11/22 , G01B2210/56 , G01N21/956 , G01N2021/8822 , H01L22/12 , H01L2924/0002 , H04L25/0216 , H04L25/0222 , H04L25/0226 , H04L27/2607 , H04L27/2655 , H01L2924/00
摘要： An optical system is presented for use in measuring in patterned structures having vias. The system is configured and operable to enable measurement of a via profile parameters. The system comprises an illumination channel for propagating illuminated light onto the structure being measured, a detection channel for collecting light returned from the illuminated structure to a detection unit, and a modulating assembly configured and operable for implementing a dark-field detection mode by carrying out at least one of the following: affecting at least one parameter of light propagating along at least one of the illumination and detection channels, and affecting propagation of light along at least the detection channel.
摘要翻译：提供了一种用于在具有通孔的图案化结构中进行测量的光学系统。该系统被配置并且可操作以允许测量通孔轮廓参数。该系统包括用于将被照射的光传播到所测量的结构上的照明通道，用于将从照明结构返回的光聚集到检测单元的检测通道，以及调制组件，其配置和可操作以通过执行暗区检测模式以下中的至少一个：影响沿着照明和检测通道中的至少一个传播的光的至少一个参数，并且影响光沿着至少检测通道的传播。

2. 发明申请

WO2013011508A3 OPTICAL SYSTEM AND METHOD FOR MEASURING IN PATTERNED STUCTURES 审中-公开
标题翻译：光学系统和测绘方法
公开(公告)号：WO2013011508A3
公开(公告)日：2013-03-07
申请号：PCT/IL2012050253
申请日：2012-07-18
申请人： NOVA MEASURING INSTR LTD , BARAK GILAD , BRILL BOAZ
发明人： BARAK GILAD , BRILL BOAZ
IPC分类号： G03F7/20 , G01B11/22
CPC分类号： G01B11/22 , G01B11/24 , G01N21/27 , G01N21/9501 , G03F7/70625 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： An optical system is presented for use in measuring in patterned structures having vias. The optical system comprises an illumination channel for propagating illuminated light onto the structure being measured; a detection channel for collecting light returned from the illuminated structure to a detection unit; and an attenuation assembly accommodated in the illumination and detection channels and being configured and operable for selectively attenuating light propagating along the detection channel, the attenuation creating a predetermined condition for the selectively attenuated light, said predetermined condition being defined by a predetermined ratio between a first light portion corresponding to a dark field condition and a second light portion corresponding to a bright field condition in said selectively attenuated light, detected selectively attenuated light being therefore indicative of at least one parameter of the via being illuminated.
摘要翻译：提供了一种用于在具有通孔的图案化结构中进行测量的光学系统。光学系统包括用于将照明光传播到所测量的结构上的照明通道; 用于将从照明结构返回的光聚集到检测单元的检测通道; 以及衰减组件，其容纳在所述照明和检测通道中并且被配置和可操作以选择性地衰减沿着所述检测通道传播的光，所述衰减产生用于所述选择性衰减的光的预定条件，所述预定条件由第一对应于暗场条件的光部分和对应于所述选择性衰减的光中的亮场条件的第二光部分，所检测的选择性衰减的光因此指示经过被照亮的至少一个参数。

3. 发明申请

WO2013011508A2 OPTICAL SYSTEM AND METHOD FOR MEASURING IN PATTERNED STUCTURES 审中-公开
标题翻译：用于测量图案化结构的光学系统和方法
公开(公告)号：WO2013011508A2
公开(公告)日：2013-01-24
申请号：PCT/IL2012/050253
申请日：2012-07-18
申请人： NOVA MEASURING INSTRUMENTS LTD. , BARAK, Gilad , BRILL, Boaz
发明人： BARAK, Gilad , BRILL, Boaz
IPC分类号： G03F7/20 , G01B11/22
CPC分类号： G01B11/22 , G01B11/24 , G01N21/27 , G01N21/9501 , G03F7/70625 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： An optical system is presented for use in measuring in patterned structures having vias. The optical system comprises an illumination channel for propagating illuminated light onto the structure being measured; a detection channel for collecting light returned from the illuminated structure to a detection unit; and an attenuation assembly accommodated in the illumination and detection channels and being configured and operable for selectively attenuating light propagating along the detection channel, the attenuation creating a predetermined condition for the selectively attenuated light, said predetermined condition being defined by a predetermined ratio between a first light portion corresponding to a dark field condition and a second light portion corresponding to a bright field condition in said selectively attenuated light, detected selectively attenuated light being therefore indicative of at least one parameter of the via being illuminated.
摘要翻译：提出了一种用于在具有通孔的图案化结构中进行测量的光学系统。该光学系统包括用于将照明光传播到被测量的结构上的照明通道; 检测通道，用于收集从照明结构返回到检测单元的光; 以及衰减组件，其容纳在所述照明和检测通道中，并且被配置并可操作用于选择性地衰减沿着所述检测通道传播的光，所述衰减为所述选择性衰减的光创建预定条件，所述预定条件由第一因此检测到的选择性衰减的光因此指示通孔的至少一个参数被照亮。

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