会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 10. 发明申请
    • SENSING LAYER FORMATION
    • 感应层形成
    • WO2017103577A1
    • 2017-06-22
    • PCT/GB2016/053921
    • 2016-12-13
    • AMS SENSORS UK LIMITED
    • STACEY, Simon JonathanGOVETT, MatthewALI, Syed Zeeshan
    • G01N27/12
    • G01N27/128H01L21/67115
    • We disclose herein a method for heating a gas sensing material formulation on a microhotplate which comprises: a dielectric membrane formed on a semiconductor substrate comprising an etched portion; and the gas sensing material formulation being located on one side of the dielectric membrane. The method comprising: selectively heating the gas sensing material formulation using an infra-red (IR) heater located over the substrate, and controllably cooling the semiconductor substrate using a cooling baseplate provided under the substrate and using an insulating medium located between the substrate and the cooling base plate so that a gas sensing structure is formed on said one side of the dielectric membrane from the gas sensing material formulation.
    • 我们在此公开了一种用于加热微型印版上的气体传感材料配方的方法,该方法包括:在包括蚀刻部分的半导体衬底上形成的介电膜; 并且气体传感材料配方位于电介质膜的一侧上。 该方法包括:使用位于衬底上方的红外(IR)加热器选择性地加热气敏材料配方,并且使用设置在衬底下方的冷却基板并且使用位于衬底和衬底之间的绝缘介质可控地冷却半导体衬底 冷却基板,使得气体传感结构形成在介电膜的所述一侧上,与气体传感材料配方不同。