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1. 发明申请

WO2008054346A3 IMPROVED SPECTRAL METROLOGY FOR HIGH REPETITION RATE GAS DISCHARGE LASER 审中-公开
公开(公告)号：WO2008054346A3
公开(公告)日：2008-05-08
申请号：PCT/US2006/024464
申请日：2006-06-23
申请人： CYMER, INC. , RAFAC, Robert, J.
发明人： RAFAC, Robert, J.
IPC分类号： G01J3/45 , G01B9/02
摘要： A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter; the multivariable equation comprising a symmetry sensitive term.

2. 发明申请

WO2007021406A3 MULTI-CHAMBER GAS DISCHARGE LASER BANDWIDTH CONTROL THROUGH DISCHARGE TIMING 审中-公开
公开(公告)号：WO2007021406A3
公开(公告)日：2007-02-22
申请号：PCT/US2006/027015
申请日：2006-07-12
申请人： CYMER, INC. , JACQUES, Robert, N. , PARTLO, William, M. , BROWN, Daniel, J.W.
发明人： JACQUES, Robert, N. , PARTLO, William, M. , BROWN, Daniel, J.W.
IPC分类号： H01S3/22 , H01S3/097
摘要： A method and apparatus are disclosed for controlling bandwidth in a multi- portion laser system comprising a first line narrowed oscillator laser system portion providing a line narrowed seed pulse to an amplifier laser system portion, may comprise utilizing a timing difference curve defining a relationship between a first' laser system operating parameter other than bandwidth and the timing difference and also a desired point on the curve defining a desired timing difference, wherein each unique operating point on the curve corresponds to a respective bandwidth value; determining an actual offset from the timing difference at the desired point on the curve to an actual operating point on the curve; determining an error between the actual offset and a desired offset corresponding to a desired bandwidth; modifying the firing differential timing to remove the error between the actual offset and the desired offset.

3. 发明申请

WO2007002386A3 EUV LIGHT SOURCE COLLECTOR LIFETIME IMPROVEMENTS 审中-公开
公开(公告)号：WO2007002386A3
公开(公告)日：2007-01-04
申请号：PCT/US2006/024463
申请日：2006-06-23
申请人： CYMER, INC. , PARTLO, William, N. , ERSHOV, Alexander, I. , FOMENKOV, Igor, V. , KHODYKIN, Oleh
发明人： PARTLO, William, N. , ERSHOV, Alexander, I. , FOMENKOV, Igor, V. , KHODYKIN, Oleh
IPC分类号： G01J3/10
摘要： An apparatus and method for cleaning a plasma source material compound from a plasma produced EUV light source collector optic which may comprise reacting the plasma source material compound with hydrogen to form a hydride of the plasma source material from the plasma source material contained in the plasma source material compound on the collector optic. The method may further comprise initiating the reacting by introducing hydrogen into a plasma formation chamber containing the collector optic, and may further comprise removing the hydride from the collector optic, e.g., by cleaning plasma action and/or plasma source material sputtering, or other means as may be determined to be effective. An apparatus and method of extending the useful life of a plasma produced EUV light source collector coating layer may comprise in situ replacement of the material of the coating layer by deposition of the coating layer material onto the coating layer.

4. 发明申请

WO2006093826A3 LPP EUV DRIVE LASER 审中-公开
公开(公告)号：WO2006093826A3
公开(公告)日：2006-09-08
申请号：PCT/US2006/006597
申请日：2006-02-22
申请人： CYMER, INC. , BROWN, Daniel, J., W. , ERSHOV, Alexander, I. , FLEUROV, Vladimir, B. , FOMENKOV, Igor, V. , PARTLO, William, N.
发明人： BROWN, Daniel, J., W. , ERSHOV, Alexander, I. , FLEUROV, Vladimir, B. , FOMENKOV, Igor, V. , PARTLO, William, N.
IPC分类号： H01S3/22 , H01S3/223
摘要： An apparatus and method is disclosed which may comprise an EUV drive laser system comprising: a solid state seed laser master oscillator laser; a gas discharge excimer laser gain generator producing a drive laser output light beam. The solid state seed laser may comprise a third harmonic Nd: YLF laser, which may be tunable. The gas discharge excimer gain generator laser may comprise a XeF excimer laser power amplifier or power oscillator. The solid state laser may comprise a tunable laser tuned by changing the temperature of a laser crystal comprising the solid state laser, or by utilizing a wavelength selection element, e.g., a Lyot filter or an etalon.

5. 发明申请

WO2006012062A3 METHOD AND APPARATUS FOR GAS DISCHARGE LASER OUTPUT LIGHT COHERENCY REDUCTION 审中-公开
公开(公告)号：WO2006012062A3
公开(公告)日：2006-02-02
申请号：PCT/US2005/021576
申请日：2005-06-17
申请人： CYMER, INC. , RAFAC, Robert, J. , SMITH, Scot, T.
发明人： RAFAC, Robert, J. , SMITH, Scot, T.
IPC分类号： G01B9/02 , H01S3/22 , G02B5/04
摘要： A method and apparatus for producing with a gas discharge laser an output laser beam comprising output laser light pulses, for delivery as a light source to a utilizing tool is disclosed which may comprise a beam path ( 80 ) and a beam homogenizer ( 60 ) in the beam path.

6. 发明申请

WO2005091879A3 EUV LIGHT SOURCE 审中-公开
公开(公告)号：WO2005091879A3
公开(公告)日：2005-10-06
申请号：PCT/US2005/005935
申请日：2005-02-24
申请人： CYMER, INC. , PARTLO, William, N. , BOWERING, Norbert, R. , ERSHOV, Alexander, I. , FOMENKOV, Igor, V. , OLIVER, I., Roger , VIATELLA, John , JACQUES, Robert, N.
发明人： PARTLO, William, N. , BOWERING, Norbert, R. , ERSHOV, Alexander, I. , FOMENKOV, Igor, V. , OLIVER, I., Roger , VIATELLA, John , JACQUES, Robert, N.
IPC分类号： H01J35/20
摘要： A laser produced plasma extreme ultraviolet light source control system (10) includes a target delivery system (80) for delivering plasma initiation targets (20), an EUV light collection optic (40), a target tracking and feedback system (150), at least one imaging device (60, 62) for providing an image of a target stream track (92); a stream track error detector (120, 122) for detecting an error in the position of the target stream track (92) in at least one axis perpendicular to the target stream track (92).

7. 发明申请

WO2005001853A2 METHOD AND APPARATUS FOR COOLING MAGNETIC CIRCUIT ELEMENTS 审中-公开
标题翻译：用于冷却磁电元件的方法和装置
公开(公告)号：WO2005001853A2
公开(公告)日：2005-01-06
申请号：PCT/US2004/018941
申请日：2004-06-14
申请人： CYMER, INC. , NESS, Richard, M. , PARTLO, William, N. , MELCHER, Paul, C. , FERGUSON, George, X. , SAETHRE, Robert, B.
发明人： NESS, Richard, M. , PARTLO, William, N. , MELCHER, Paul, C. , FERGUSON, George, X. , SAETHRE, Robert, B.
IPC分类号： H01F
CPC分类号： H01F27/266 , H01F27/025 , H01F27/10 , H01S3/097
摘要： An apparatus and method for providing cooling to a magnetic circuit element having a magnetic core disposed around a centrally located core support member having at least one core support member wall is disclosed which may comprise a core support coolant inlet; a core support coolant outlet; a plurality of interconnected coolant flow passages contained within the core support member wall and interconnected and arranged to pass coolant from one coolant flow passage to the next within the core support member wall along a coolant flow path within at least a substantial portion of the core support member wall from the core support coolant inlet to the core support coolant outlet. The apparatus may also comprise each core support coolant flow passage is in fluid communication with a fluid communication plenum at each end of each respective core support coolant flow passage, with each respective fluid communication plenum forming an outlet plenum for at least a first one of the respective core support coolant flow passages and an inlet plenum for at least a second one of the respective core support coolant flow passages along the coolant flow path from the core support coolant inlet to the core support coolant outlet. The core support member may comprise a flange extending from the core support member, the flange having an inner dimension and an outer dimension, which may also comprise a plurality of interconnected flange coolant flow passages extending alternatively toward the inner dimension and away from the outer dimension and then toward the outer dimension and away from the inner dimension, between the core support coolant inlet and the core support coolant outlet. The core and core support may be contained in a housing which may comprise a housing wall; a housing coolant inlet; a housing coolant outlet; and a plurality of interconnected housing coolant flow passages contained within the housing wall and interconnected and arranged to pass coolant from one coolant flow passage to the next within the housing wall along a coolant flow path within at least a substantial portion of the housing wall from the housing coolant inlet to the housing coolant outlet. The housing and core support may forma a part of at least a portion of an electrical current flow path forming two turns around the magnetic core. In another aspect of the invention buswork may be coated with a thin film of electrically conductive material.
摘要翻译：公开了一种用于向具有设置在具有至少一个芯支撑构件壁的中心定位的芯支撑构件周围的磁芯的磁路元件提供冷却的装置和方法，其可包括芯支撑冷却剂入口; 核心支撑冷却液出口; 多个互连的冷却剂流动通道，其容纳在所述芯部支撑构件壁内并且互连并且布置成沿着所述芯部支撑件的至少大部分内的冷却剂流动路径将冷却剂从一个冷却剂流动通道传递到所述芯部支撑构件壁内的下一个构件壁从芯部支撑冷却剂入口到芯部支撑冷却剂出口。该装置还可以包括每个芯支撑冷却剂流动通道与每个相应的芯支撑冷却剂流动通道的每个端部处的流体连通通气室流体连通，每个相应的流体连通增压室形成出口压力室，用于至少第一个相应的芯支撑冷却剂流动通道和用于沿着从芯支撑冷却剂入口到芯支撑冷却剂出口的冷却剂流动路径的相应的芯支撑冷却剂流动通道中的至少第二个的入口气室。芯支撑构件可以包括从芯支撑构件延伸的凸缘，凸缘具有内部尺寸和外部尺寸，该凸缘还可以包括多个互连的凸缘冷却剂流动通道，所述凸缘冷却剂流动通道相对于内部尺寸交替地延伸并远离外部尺寸然后朝向外部尺寸并远离内部尺寸，在核心支撑冷却剂入口和芯部支撑冷却剂出口之间。芯和芯支撑件可以包含在可以包括壳体壁的壳体中; 壳体冷却剂入口; 外壳冷却液出口; 以及多个互连的壳体冷却剂流动通道，其容纳在所述壳体壁内并且被互连并且布置成将冷却剂沿着沿着所述壳体壁的至少大部分内的冷却剂流动路径从所述壳体壁在所述壳体壁内向下流动将冷却剂入口容纳到壳体冷却剂出口。壳体和芯部支撑件可以形成绕磁芯形成两圈的电流流路的至少一部分的一部分。在本发明的另一方面，母线可以涂覆有导电材料的薄膜。

8. 发明申请

WO2008105988A3 LASER GAS INJECTION SYSTEM 审中-公开
公开(公告)号：WO2008105988A3
公开(公告)日：2008-09-04
申请号：PCT/US2008/001348
申请日：2008-02-01
申请人： CYMER, INC , DUNSTAN, Wayne, J. , O'BRIEN, Kevin, M. , JACQUES, Robert, N. , BESAUCELE, Herve, A. , RIGGS, Daniel, J. , RATNAM, Aravind
发明人： DUNSTAN, Wayne, J. , O'BRIEN, Kevin, M. , JACQUES, Robert, N. , BESAUCELE, Herve, A. , RIGGS, Daniel, J. , RATNAM, Aravind
IPC分类号： H01S3/22
摘要： A method and apparatus are disclosed which may comprise predicting the gas lifetime for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas may comprise: utilizing at least one of a plurality of laser operating Input and/or output parameters; utilizing a set of at least one parameter of utilization in the photolithography process to determine a gas use model in relation to the respective input or output parameter; predicting the end of gas life based upon the mod and a measurement of the respective input or output parameter. The parameter may comprise a pulse utilization pattern.

9. 发明申请

WO2007126693A2 CONFOCAL PULSE STRETCHER 审中-公开
标题翻译： CONFOCAL脉冲拉伸器
公开(公告)号：WO2007126693A2
公开(公告)日：2007-11-08
申请号：PCT/US2007/007201
申请日：2007-03-23
申请人： CYMER, INC. , DAS, Palash, P. , HOFMANN, Thomas , LEI, Gang
发明人： DAS, Palash, P. , HOFMANN, Thomas , LEI, Gang
IPC分类号： H01S3/03 , H01S3/10
CPC分类号： H01S3/0057 , G03F7/7055 , H01S3/225
摘要： A gas discharge laser system producing a laser output pulse and a method of operating such a system is disclosed which may comprise a pulse stretcher which may comprise a laser output pulse optical delay initiating optic directing a portion of the laser output pulse along a laser system output pulse optical axis and diverting a portion of the output pulse into an optical delay having an optical delay path and which may comprise a plurality of confocal resonators in series aligned to deliver an output of the optical delay to the laser output pulse optical delay initiating optic; an optical axis alignment mechanism comprising an radial mirror positioning mechanism operable to position the output of the optical delay to the align with the portion of the laser output pulse transmitted along the optical axis of the portion of the laser system output pulse transmitted by the laser output pulse optical delay initiating optic.
摘要翻译：公开了一种产生激光输出脉冲的气体放电激光器系统和这种系统的操作方法，其可以包括脉冲展宽器，其可以包括激光输出脉冲光学延迟启动光学器件，以将激光输出脉冲的一部分沿激光系统输出脉冲光轴并将输出脉冲的一部分转移成具有光学延迟路径的光学延迟，并且可以包括串联对准的多个共焦谐振器，以将光学延迟的输出传递到激光输出脉冲光学延迟启动光学器件; 光轴对准机构，其包括径向镜定位机构，其可操作以将光学延迟的输出定位成与激光输出脉冲的沿激光输出脉冲发射的激光系统输出脉冲部分的光轴传输的部分对准脉冲光学延迟启动光学器件。

10. 发明申请

WO2007053335A2 LASER SYSTEM 审中-公开
标题翻译：激光系统
公开(公告)号：WO2007053335A2
公开(公告)日：2007-05-10
申请号：PCT/US2006/041107
申请日：2006-10-20
申请人： CYMER, INC. , ERSHOV, Alexander, I. , PARTLO, William, N. , BROWN, Daniel, J.W. , FOMENKOV, Igor, V. , BERGSTEDT, Robert, A. , SANDSTROM, Richard, L. , LALOVIC, Ivan
发明人： ERSHOV, Alexander, I. , PARTLO, William, N. , BROWN, Daniel, J.W. , FOMENKOV, Igor, V. , BERGSTEDT, Robert, A. , SANDSTROM, Richard, L. , LALOVIC, Ivan
IPC分类号： G11C8/00
CPC分类号： H01S3/225 , G03F7/70583 , H01S3/005 , H01S3/0057 , H01S3/03 , H01S3/034 , H01S3/08036 , H01S3/08059 , H01S3/10092 , H01S3/105 , H01S3/2251 , H01S3/2333
摘要： A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser output light beam of pulses which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module within a first oscillator cavity; a laser amplification stage containing an amplifying gain medium in a second gas discharge excimer or molecular fluorine laser chamber receiving the output of the seed laser oscillator and amplifying the output of the seed laser oscillator to form a laser system output comprising a laser output light beam of pulses, which may comprise a ring power amplification stage wherein the output of the seed laser oscillator passes through the amplifying gain medium of the ring power amplification stage at least two times per loop.
摘要翻译：一种方法和装置可以包括线变窄的脉冲准分子或分子氟气放电激光系统，其可以包括种子激光振荡器，其产生包括可以包括第一气体放电准分子或分子氟激光室的脉冲的激光输出光束的输出; 第一振荡器腔内的线窄模块; 在第二气体放电准分子或分子氟激光室中包含放大增益介质的激光放大级，其接收种子激光振荡器的输出并放大种子激光振荡器的输出，以形成激光系统输出，该激光系统输出包括：激光输出光束脉冲，其可以包括环形功率放大级，其中种子激光振荡器的输出通过环形功率放大级的放大增益介质至少每循环两次。

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