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    • 81. 发明申请
    • PRODUCTION PROCESS OF MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM, AND MAGNETIC RECORDING AND REPRODUCING APPARATUS
    • 磁记录介质,磁记录介质,磁记录和再现装置的生产过程
    • WO2006098504A1
    • 2006-09-21
    • PCT/JP2006/305764
    • 2006-03-16
    • SHOWA DENKO K.K.OKA, Masahiro
    • OKA, Masahiro
    • G11B5/84G11B5/64G11B5/72
    • G11B5/65G11B5/84G11B5/8408Y10T428/11
    • A production process of magnetic recording media is provided in which, when using an oxide magnetic material as a perpendicular magnetic recording layer and forming a carbon protective layer using a plasma CVD method, stripping of the carbon protective layer and separation of a lubrication layer can be prevented, and satisfactory recording and reproduction characteristics can be obtained. In the production process of magnetic recording media, the magnetic recording media consists of, at least, a substrate 1 on which are provided a perpendicular magnetic recording layer and a carbon protective layer, in which the perpendicular magnetic recording layer consists of magnetic material containing a Co alloy and oxide material; the method includes a perpendicular magnetic recording layer formation process of forming the perpendicular magnetic recording layer on the substrate 1, a heating process of using a heating portion 28 to heat the substrate 1 on which the perpendicular magnetic recording layer has been formed, and a protective layer formation process of using a plasma CVD method to form a carbon protective layer on the substrate 1 on which the perpendicular magnetic recording layer has been formed.
    • 提供一种磁记录介质的制造方法,其中,当使用氧化物磁性材料作为垂直磁记录层并使用等离子体CVD法形成碳保护层时,可以剥离碳保护层和分离润滑层 并且可以获得令人满意的记录和再现特性。 在磁记录介质的生产过程中,磁记录介质至少由至少提供有垂直磁记录层和碳保护层的基底1组成,其中垂直磁记录层由含有 Co合金和氧化物材料; 该方法包括在基板1上形成垂直磁记录层的垂直磁记录层形成工艺,使用加热部28加热其上形成有垂直磁记录层的基板1的加热处理和保护 使用等离子体CVD法在形成有垂直磁记录层的基板1上形成碳保护层的层形成工艺。