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    • 61. 发明申请
    • A TOOL FOR WORKING STONE MATERIALS AND THE LIKE
    • 用于工作石料的工具和类似物
    • WO2011061665A1
    • 2011-05-26
    • PCT/IB2010/055160
    • 2010-11-15
    • AROS S.R.L.FIORATTI, Stefano
    • FIORATTI, Stefano
    • B24D7/06B24B41/047B24B7/22
    • B24D7/066B24B7/22B24B41/0475
    • The present invention relates to a tool for stone material finishing working comprising a support component or base (2) for anchoring to a machine tool, at least one abrasive work component (3), at least one housing seat (SA) delimited between the support component (2) and the at least one work component (3), at least one elastic vibration absorption component (6, 6a, 6b) arranged, in use, in a respective housing seat (SA), the support component (2) and the at least one abrasive work component (3) comprising mutual engagement means (4, 4b, 4c, 5, 5a, 5b, 5c, 5d, 5f), the mutual engagement means comprise snap-mutual engagement means (4, 4b, 4c, 5, 5a, 5b, 5c, 5d, 5f).
    • 本发明涉及一种用于石材整理加工的工具,其包括用于锚定到机床的支撑部件或基座(2),至少一个磨料加工部件(3),至少一个壳体座(SA) 组件(2)和至少一个工作部件(3),至少一个弹性振动吸收部件(6,6a,6b)在使用中在相应的壳体座(SA)中布置,支撑部件(2)和 所述至少一个研磨作业组件(3)包括相互接合装置(4,4b,4c,5,5a,5b,5c,5d,5f),所述相互接合装置包括卡扣互作用装置(4,4b,4c) ,5,5a,5b,5c,5d,5f)。
    • 65. 发明申请
    • CLEANING CUP SYSTEM FOR CHEMICAL MECHANICAL PLANARIZATION APPARATUS
    • 化学机械平面设备清洁杯系统
    • WO2008097627A1
    • 2008-08-14
    • PCT/US2008/001656
    • 2008-02-07
    • TBW INDUSTRIES, INC.BENNER, Stephen, J.
    • BENNER, Stephen, J.
    • B24B7/22
    • B24B53/017B24B57/02
    • The present invention is related to an improved cleaning cup arrangement for CMP systems that efficiently and effectively removes most, if not all, of any slurry material present on the abrasive conditioning disk and conditioner head as they are resting in the cup between conditioning cycles. The cleaning cup of the present invention includes an underside water knife for directing a high velocity stream of cleaning fluid against the rotating abrasive disk (or conditioning brush, which may be used instead of a disk) surface, and at least a pair of spray stems for directing columns of cleaning fluid with sufficient cleaning force against all exposed portions of the conditioner head.
    • 本发明涉及一种用于CMP系统的改进的清洁杯装置,其可有效且有效地去除磨损调理盘和调节器头上存在的大部分(如果不是全部)淤浆材料,因为它们在调节循环之间搁置在杯中。 本发明的清洁杯包括用于将清洁流体的高速流引导到旋转研磨盘(或可用于代替盘)的旋转研磨盘(或调节刷),以及至少一对喷杆的下侧水刀 用于以足够的清洁力将清洁液体列导向调节头的所有暴露部分。
    • 68. 发明申请
    • BLOCK TEXTURE-MODIFYING APPARATUS AND METHOD
    • 块纹理修改装置和方法
    • WO2004078441B1
    • 2005-02-17
    • PCT/CA2004000345
    • 2004-03-08
    • CORREIA HORACIO
    • CORREIA HORACIO
    • B24B7/22B28B11/08B28D1/30
    • B24B1/007B24B7/22B28B11/0818B28D1/30
    • A block texture-modifying apparatus (128) for modifying the surface texture of blocks. The apparatus (128) comprises a block support (12'), a block-texture-modifying assembly (130) and a translational movement assembly (132). The block support (12') supports the blocks thereon. The block-texture-modifying assembly (130) engages the blocks on the support (12'). The translational movement assembly (132) provides a translational movement between the blocks on the support (12') and the block-texture-modifying assembly (130). The block-texture-modifying assembly (130) acts on the blocks it engaged during this translational movement in order to modify their respective surface texture.
    • 一种用于修改块的表面纹理的块纹理修改设备(128)。 装置(128)包括块支撑件(12'),块纹理修改组件(130)和平移运动组件(132)。 块支撑件(12')支撑其上的块。 块状纹理修改组件(130)与支撑件(12')上的块接合。 平移运动组件(132)提供在支撑件(12')上的块和块纹理修改组件(130)之间的平移运动。 块纹理修改组件(130)作用于在该平移运动期间接合的块,以便修改它们各自的表面纹理。
    • 69. 发明申请
    • AGENT FOR INCREASING SELECTION RATIO OF POLISHING RATES
    • 增加抛光率选择比例的代理
    • WO2004078410A3
    • 2004-11-04
    • PCT/JP2004002680
    • 2004-03-03
    • KAO CORPEBARA CORPHAGIHARA TOSHIYAWADA YUTAKAAKATSUKA TOMOHIKOSASAKI TATSUYA
    • HAGIHARA TOSHIYAWADA YUTAKAAKATSUKA TOMOHIKOSASAKI TATSUYA
    • B24B7/22B24B37/00B24B57/00C09G1/00C09K3/14H01L21/304H01L21/3105
    • C09G1/04B24B7/228B24B57/00H01L21/31053
    • An agent for increasing a selection ratio of polishing rates, wherein the agent comprises an organic cationic compound, which increases a ratio of a polishing rate of a silicon nitride film to a polishing rate of a silicon oxide film, wherein the agent is provided as a component of a polishing composition used together with a fixed abrasive polishing tool comprising a polishing member comprising abrasive grains and a resin; a polishing composition which increases a ratio of a polishing rate of a silicon nitride film to a polishing rate of a silicon oxide film, wherein the polishing composition comprises the above agent, and wherein the polishing composition is used together with a fixed abrasive polishing tool comprising a polishing member comprising abrasive grains and a resin; and a process for increasing a ratio of a polishing rate of a silicon nitride film to a polishing rate of a silicon oxide film, comprising the step of applying the polishing composition to a fixed abrasive polishing tool comprising a polishing member comprising abrasive grains and a resin.
    • 一种用于提高抛光速率选择率的试剂,其中所述试剂包括有机阳离子化合物,其增加了氮化硅膜的研磨速率与氧化硅膜的研磨速率的比率,其中所述试剂被提供为 与固定研磨抛光工具一起使用的抛光组合物的组分,其包括包含磨料颗粒和树脂的抛光构件; 抛光组合物,其将氮化硅膜的研磨速度与氧化硅膜的研磨速度的比率增加,其中所述抛光组合物包含上述试剂,并且其中所述抛光组合物与固定的研磨抛光工具一起使用,所述固定研磨抛光工具包括 包括磨粒和树脂的抛光构件; 以及提高氮化硅膜的研磨速度与氧化硅膜的研磨速度的比例的方法,其特征在于,包括将研磨用组合物涂布在固定研磨用抛光工具上的工序,所述研磨抛光工具包括研磨材料,所述研磨部件包括磨粒和树脂 。