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41. 发明申请

WO2015071440A4 ELECTRODE COOLING ARRANGEMENT 审中-公开
标题翻译：电极冷却装置
公开(公告)号：WO2015071440A4
公开(公告)日：2015-07-30
申请号：PCT/EP2014074681
申请日：2014-11-14
申请人： MAPPER LITHOGRAPHY IP BV
发明人： URBANUS WILLEM HENK , WIELAND MARCO JAN-JACO
IPC分类号： H01J37/317 , H01J37/065
CPC分类号： G21K1/02 , G21K5/04 , H01J37/026 , H01J37/065 , H01J37/12 , H01J37/16 , H01J37/24 , H01J37/3002 , H01J37/3007 , H01J37/3174 , H01J37/3175 , H01J37/3177 , H01J2237/002 , H01J2237/0216 , H01J2237/024 , H01J2237/032 , H01J2237/04 , H01J2237/1215 , H01J2237/16 , H01J2237/1825 , H01J2237/303 , H01J2237/30472
摘要： The invention relates to a collimator electrode, comprising an electrode body (81) that is provided with a central electrode aperture (82), wherein the electrode body defines an electrode height between two opposite main surfaces, and wherein the electrode body accommodates a cooling conduit (105) inside the electrode body for transferring a cooling liquid (102). The electrode body preferably has a disk shape or an oblate ring shape. The invention further relates to a collimator electrode stack for use in a charged particle beam generator, comprising a first collimator electrode and a second collimator electrode that are each provided with a cooling conduit (105) for transferring the cooling liquid (102), and a connecting conduit (110) for a liquid connection between the cooling conduits of the first and second collimator electrodes.
摘要翻译：本发明涉及一种准直器电极，其包括设置有中心电极孔（82）的电极体（81），其中电极体限定两个相对主表面之间的电极高度，并且其中电极体容纳冷却导管（105），用于传送冷却液（102）。电极体优选具有盘状或扁圆形状。本发明还涉及一种用于带电粒子束发生器的准直器电极叠层，其包括第一准直器电极和第二准直器电极，每个准直器电极和第二准直器电极都设置有用于传送冷却液体（102）的冷却导管（105）连接导管（110）用于第一和第二准直仪电极的冷却管道之间的液体连接。

42. 发明申请

WO2015071440A1 ELECTRODE COOLING ARRANGEMENT 审中-公开
标题翻译：电极冷却装置
公开(公告)号：WO2015071440A1
公开(公告)日：2015-05-21
申请号：PCT/EP2014/074681
申请日：2014-11-14
申请人： MAPPER LITHOGRAPHY IP B.V.
发明人： URBANUS, Willem Henk , WIELAND, Marco Jan-Jaco
IPC分类号： H01J37/317 , H01J37/065
CPC分类号： G21K1/02 , G21K5/04 , H01J37/026 , H01J37/065 , H01J37/12 , H01J37/16 , H01J37/24 , H01J37/3002 , H01J37/3007 , H01J37/3174 , H01J37/3175 , H01J37/3177 , H01J2237/002 , H01J2237/0216 , H01J2237/024 , H01J2237/032 , H01J2237/04 , H01J2237/1215 , H01J2237/16 , H01J2237/1825 , H01J2237/303 , H01J2237/30472
摘要： The invention relates to a collimator electrode, comprising an electrode body (81) that is provided with a central electrode aperture (82), wherein the electrode body defines an electrode height between two opposite main surfaces, and wherein the electrode body accommodates a cooling conduit (105) inside the electrode body for transferring a cooling liquid (102). The electrode body preferably has a disk shape or an oblate ring shape. The invention further relates to a collimator electrode stack for use in a charged particle beam generator, comprising a first collimator electrode and a second collimator electrode that are each provided with a cooling conduit (105) for transferring the cooling liquid (102), and a connecting conduit (110) for a liquid connection between the cooling conduits of the first and second collimator electrodes.
摘要翻译：本发明涉及一种准直仪电极，其包括设置有中心电极孔（82）的电极体（81），其中电极体限定两个相对主表面之间的电极高度，以及其中，电极体在电极体内部容纳用于传送冷却液体（102）的冷却导管（105）。电极体优选具有圆盘形状或扁圆环形状。本发明进一步涉及一种用于带电粒子束发生器的准直器电极堆叠，包括第一准直器电极和第二准直器电极，每个准直器电极设置有用于输送冷却液体（102）的冷却导管（105），以及连接导管（110），用于第一和第二准直器电极的冷却导管之间的液体连接。

43. 发明申请

WO2015071439A4 MULTI-ELECTRODE STACK ARRANGEMENT 审中-公开
公开(公告)号：WO2015071439A4
公开(公告)日：2015-05-21
申请号：PCT/EP2014/074680
申请日：2014-11-14
申请人： MAPPER LITHOGRAPHY IP B.V.
发明人： URBANUS, Willem Henk , WIELAND, Marco Jan-Jaco
IPC分类号： H01J37/065 , H01J37/317 , H01J37/12
摘要： The invention relates to an electrode stack (70) comprising stacked electrodes (71-80) for manipulating a charged particle beam along an optical axis (A). Each electrode comprises an electrode body with an aperture for the charged particle beam. The electrode bodies are mutually spaced and the electrode apertures are coaxially aligned along the optical axis. The electrode stack comprises electrically insulating spacing structures (89) between each pair of adjacent electrodes for positioning the electrodes (71-80) at predetermined mutual distances along the axial direction (Z). A first electrode and a second electrode each comprise an electrode body with one or more support portions (86), wherein each support portion is configured to accommodate at least one spacing structure (89). The electrode stack has at least one clamping member (91-91c) configured to hold the support portions (86) of the first and second electrodes, as well as the intermediate spacing structure (89) together.

44. 发明申请

WO2013043749A1 METHOD AND APPARATUS FOR HIGH BRIGHTNESS SUPERCONDUCTING RADIO FREQUENCY (RF) PHOTOINJECTOR GUN CAVITY (SRF GUN) 审中-公开
标题翻译：高亮度超导射频（RF）光电枪（SRF GUN）的方法和装置
公开(公告)号：WO2013043749A1
公开(公告)日：2013-03-28
申请号：PCT/US2012/056149
申请日：2012-09-19
申请人： MUONS, INC. , MARHAUSER, Frank , RIMMER, Robert , LI, Zenghai
发明人： MARHAUSER, Frank , RIMMER, Robert , LI, Zenghai
IPC分类号： H01J37/065
CPC分类号： H01J3/021
摘要： In a particular embodiment, a device is disclosed that includes a superconducting radio frequency (RF) photoinjector gun cavity further including a first cavity cell having a first diameter and further including a fully demountable back wall, the fully demountable back wall having a superconducting photocathode disposed thereon in an interior of the first cavity cell and a second cavity cell having a second diameter smaller than the first diameter and disposed adjacent the first cavity cell opposite the fully demountable back wall. The first cavity cell is arranged to oscillate in a transverse magnetic mode of electromagnetic fields that is a harmonic of an accelerating transverse mode of electromagnetic fields in which the second cavity cell is arranged to oscillate. Also disclosed is a method using the disclosed device.
摘要翻译：在一个具体实施例中，公开了一种装置，其包括超导射频（RF）光注射枪腔，其还包括具有第一直径的第一空腔，并且还包括完全可拆卸的后壁，所述完全可拆卸的后壁具有设置的超导光电阴极其上设置在第一腔室的内部，第二腔室具有小于第一直径的第二直径，并且与第一空腔相邻地布置成与完全可拆卸的后壁相对。第一空腔单元布置成以电磁场的横向磁模式振荡，电磁场是电磁场的加速横向模式的谐波，其中第二腔室被布置成摆动。还公开了使用所公开的装置的方法。

45. 发明申请

WO2009069335A1 電子放出源及び電子放出源の製造方法审中-公开
标题翻译：电子发射源的电子发射和制造方法
公开(公告)号：WO2009069335A1
公开(公告)日：2009-06-04
申请号：PCT/JP2008/062590
申请日：2008-07-11
申请人：電気化学工業株式会社 , 森下利幸 , 照井良典
发明人：森下利幸 , 照井良典
IPC分类号： H01J1/15 , H01J37/065
CPC分类号： H01J37/06 , H01J37/065 , H01J2237/06308 , H01J2237/06375
摘要：　端子間抵抗値の上昇を防ぐことができる電子放出源及び電子放出源の製造方法を提供する。希土類六硼化物からなる電子放出源チップ（４）と、上記電子放出源チップを把持し加熱するための炭素質部材からなるヒーター（５）とを有する電子放出源であって、上記電子放出源チップ（４）とヒーター（５）の間隙に導電性物質（６）が設けられていることを特徴とする電子放出源。
摘要翻译：能够防止端子间电阻增加的电子发射源和电子发射源的制造方法。电子发射源包括由稀土六硼化物制成的电子发射芯片（4）和由用于保持和加热电子发射芯片的碳质构件构成的加热器（5），其中导电物质（6）设置在电子发射芯片（4）和加热器（5）之间的间隙

46. 发明申请

WO2006040559A1 A PARTICLE BEAM GENERATING DEVICE 审中-公开
标题翻译：颗粒光束发生装置
公开(公告)号：WO2006040559A1
公开(公告)日：2006-04-20
申请号：PCT/GB2005/003935
申请日：2005-10-13
申请人： EASTHAM, Derek, Anthony
发明人： EASTHAM, Derek, Anthony
IPC分类号： H01J37/065 , H01J3/02 , H01J37/26 , H01J37/317
CPC分类号： H01J37/28 , B82Y10/00 , H01J37/065 , H01J2237/06341 , H01J2237/3175
摘要： A particle beam generating device formed from a substrate having a planar surface. The planar surface having an etched rebate portion (2), with a base surface and at least one wall surface, which defines a raised peripheral region. The device further comprising a particle extractor comprising a conductive layer, disposed on the wall surface, and an extracting aperture extending therethrough, to extract particles from a particle source. The particle extractor also having electrical contact means for providing a voltage thereto. The device further comprising a particle accelerator (4) comprising an accelerating passageway, in communication and extending concentrically with the extracting aperture, and extending from the wall surface and through the opposite surface of the raised peripheral region to provide a particle accelerator for particles extracted from a suitable particle source disposed on said base surface of said rebate. The device may further comprise focussing means (5, 6).
摘要翻译：一种由具有平面的基板形成的粒子束产生装置。平面表面具有蚀刻的折边部分（2），其具有限定凸起周边区域的基面和至少一个壁表面。所述装置还包括粒子提取器，其包括布置在所述壁表面上的导电层和延伸穿过其中的提取孔，以从颗粒源提取颗粒。颗粒提取器还具有用于向其提供电压的电接触装置。所述装置还包括颗粒加速器（4），所述颗粒加速器（4）包括加速通道，所述加速通道与所述提取孔同心地延伸并且从所述壁表面延伸并且穿过所述凸起周边区域的相对表面，以提供用于从设置在所述回扣的所述基面上的合适的颗粒源。该装置还可以包括聚焦装置（5,6）。

47. 发明申请

WO02078033A3 FILAMENT HAVING A VARIABLE CROSS-SECTION, AND ELECTRON BEAM EMITTER COMPRISING SUCH FILAMENT 审中-公开
标题翻译：具有可变交叉部分的电缆和包含这种光纤的电子束发射器
公开(公告)号：WO02078033A3
公开(公告)日：2003-08-07
申请号：PCT/US0207442
申请日：2002-03-12
申请人： ADVANCED ELECTRON BEAMS INC , AVNERY TZVI
发明人： AVNERY TZVI
IPC分类号： H01J37/065 , H01J1/16 , H01J9/04 , H01J33/00 , H01J37/04 , H01J37/06 , H01J37/301 , H01J33/02
CPC分类号： H01J9/04 , H01J1/16 , H01J33/00 , Y10T29/49002 , Y10T29/49117
摘要： A filament for generating electrons for an electron beam emitter where the filament has a cross section and a length. The cross section of the filament is varied along the length for producing a desired electron generation profile.
摘要翻译：用于产生用于电子束发射器的电子的灯丝，其中灯丝具有横截面和长度。长丝的横截面沿长度变化以产生所需的电子生成曲线。

48. 发明申请

WO02043102A1 ELECTRON-BEAM GENERATING APPARATUS AND ELECTRON-BEAM EXPOSURE APPARATUS 审中-公开
标题翻译：电子束发生装置和电子束曝光装置
公开(公告)号：WO02043102A1
公开(公告)日：2002-05-30
申请号：PCT/JP2001/010019
申请日：2001-11-16
IPC分类号： G03F7/20 , H01J37/06 , H01J37/065 , H01J37/305 , H01J37/317 , H01L21/027
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/065 , H01J37/3177
摘要： An electron beam generating apparatus for generating electron beam comprising cathodes for generating thermoelectrons, a cathode power source unit for applying negative voltage to the cathodes to emit thermoelectrons from the cathodes, grids corresponding to the respective cathodes for respectively converging thermoelectrons emitted from the cathodes to form electron beams, and an insulator with the cathodes and grids disposed thereon.
摘要翻译：一种用于产生电子束的电子束产生装置，包括用于产生热电子的阴极，用于向阴极施加负电压以从阴极发射热电子的阴极电源单元，对应于各阴极的栅极，用于分别会聚从阴极发射的热电子，形成电子束，以及设置有阴极和栅极的绝缘体。

49. 发明申请

WO0060632A3 ELECTROSTATICALLY FOCUSED ADDRESSABLE FIELD EMISSION ARRAYCHIPS (AFEA'S) FOR HIGH-SPEED MASKLESS DIGITAL E-BEAM DIRECT WRITE LITHOGRAPHY AND SCANNING ELECTRON MICROSCOPY 审中-公开
标题翻译：用于高速数字电子束直接写入和扫描电子显微镜的静电聚焦的可寻址场发射阵列（AFEA）
公开(公告)号：WO0060632A3
公开(公告)日：2001-01-25
申请号：PCT/US0008313
申请日：2000-03-29
申请人： UT BATTELLE LLC , THOMAS CLARENCE E , BAYLOR LARRY R , VOELKL EDGAR , LOWNDES DOUGLAS H , PAULUS MICHAEL J
发明人： THOMAS CLARENCE E , BAYLOR LARRY R , VOELKL EDGAR , LOWNDES DOUGLAS H , PAULUS MICHAEL J
IPC分类号： G01Q30/02 , G01Q70/06 , G03F7/20 , H01J1/304 , H01J3/02 , H01J37/073 , H01J37/28 , H01J37/305 , H01J37/317 , H01L21/027 , H01J37/065
CPC分类号： B82Y40/00 , B82Y10/00 , H01J3/021 , H01J37/073 , H01J37/3174 , H01J37/3175 , H01J37/3177 , H01J2237/0635 , H01J2237/31786
摘要： System and methods are described for addressable field emission array (AFEA) chips. A method of operating an addressable field-emission array, includes: generating a plurality of electron beams from a plurality of emitters that compose the addressable field-emission array; and focusing at least one of the plurality of electron beams with an on-chip electrostatic focusing stack. The system and methods provide advantages including the avoidance of space-charge blow-up.
摘要翻译：描述了可寻址场致发射阵列（AFEA）芯片的系统和方法。一种操作可寻址场致发射阵列的方法包括：从构成可寻址场致发射阵列的多个发射体产生多个电子束; 并且用片上静电聚焦叠层聚焦多个电子束中的至少一个。该系统和方法提供了避免空间电荷爆炸的优点。

50. 发明申请

WO00060632A2 ELECTROSTATICALLY FOCUSED ADDRESSABLE FIELD EMISSION ARRAY CHIPS (AFEA's) FOR HIGH-SPEED MASSIVELY PARALLEL MASKLESS DIGITAL e-BEAM DIRECT WRITE LITHOGRAPHY AND SCANNING ELECTRON MICROSCOPY 审中-公开
标题翻译：静电聚焦的可发射场排放阵列（AFEA）用于高速大规模并行数字数字电子束直接写入和扫描电子显微镜
公开(公告)号：WO00060632A2
公开(公告)日：2000-10-12
申请号：PCT/US2000/008313
申请日：2000-03-29
IPC分类号： G01Q30/02 , G01Q70/06 , G03F7/20 , H01J1/304 , H01J3/02 , H01J37/073 , H01J37/28 , H01J37/305 , H01J37/317 , H01L21/027 , H01J37/065
CPC分类号： B82Y40/00 , B82Y10/00 , H01J3/021 , H01J37/073 , H01J37/3174 , H01J37/3175 , H01J37/3177 , H01J2237/0635 , H01J2237/31786
摘要： System and methods are described for addressable field emission array (AFEA) chips. A method of operating an addressable field-emission array, includes: generating a plurality of electron beams from a plurality of emitters that compose the addressable field-emission array; and focusing at least one of the plurality of electron beams with an on-chip electrostatic focusing stack. The system and methods provide advantages including the avoidance of space-charge blow-up.
摘要翻译：描述了可寻址场致发射阵列（AFEA）芯片的系统和方法。一种操作可寻址场致发射阵列的方法包括：从构成可寻址场致发射阵列的多个发射体产生多个电子束; 并且用片上静电聚焦叠层聚焦多个电子束中的至少一个。该系统和方法提供了避免空间电荷爆炸的优点。

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