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    • 40. 发明申请
    • ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM USING THE SAME, PATTERN FORMING METHOD, MANUFACTURING METHOD OF ELECTRONIC DEVICE AND ELECTRONIC DEVICE
    • 丙烯酸类敏感性或辐射敏感性树脂组合物,使用其的耐腐蚀膜,图案形成方法,电子器件和电子器件的制造方法
    • WO2013115345A1
    • 2013-08-08
    • PCT/JP2013/052296
    • 2013-01-25
    • FUJIFILM CORPORATION
    • YAMAGUCHI, ShuheiTAKAHASHI, HidenoriITO, JunichiYAMAMOTO, Kei
    • G03F7/039C08F220/10G03F7/004G03F7/038G03F7/32H01L21/027
    • G03F7/0388C08F220/18G03F7/0045G03F7/0046G03F7/038G03F7/0392G03F7/0397G03F7/11G03F7/20G03F7/2041G03F7/325
    • There is provided an actinic ray-sensitive or radiation-sensitive resin composition, having: (A) a resin having a repeating unit represented by formula (I); (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; and (C) a resin having at least one repeating unit (x) out of a repeating unit represented by formula (II) and a repeating unit represented by formula (III) and containing substantially neither fluorine atom nor silicon atom, wherein the content of the repeating unit (x) is 90% or more by mole based on all repeating units in the resin (C): wherein Xa represents a hydrogen atom, an alkyl group, a cyano group or a halogen atom, each of R 1a , R 1b and R 1c independently represents an alkyl group or a cycloalkyl group, two members of R 1a , R 1b and R 1c may combine to form a ring structure, X b1 represents a hydrogen atom, an alkyl group, a cyano group or a halogen atom, R 2 represents an organic group having one or more CH 3 partial structures and being stable to acid, X b2 represents a hydrogen atom, an alkyl group, a cyano group or a halogen atom, R 3 represents an organic group having one or more CH 3 partial structures and being stable to acid, and n represents an integer of 1 to 5.
    • 提供了一种光化射线敏感或辐射敏感性树脂组合物,其具有:(A)具有由式(I)表示的重复单元的树脂; (B)能够在用光化射线或辐射照射时能产生酸的化合物; 和(C)具有由式(II)表示的重复单元中的至少一个重复单元(x)和基本上不包含氟原子或硅原子的式(III)表示的重复单元的树脂,其中, 重复单元(x)基于树脂(C)中的所有重复单元为90%或更多摩尔:其中Xa表示氢原子,烷基,氰基或卤素原子,R1a,R1b和 R1c独立地表示烷基或环烷基,R1a,R1b和R1c的两个成员可以结合形成环结构,Xb1表示氢原子,烷基,氰基或卤素原子,R2表示有机基团 具有一个或多个CH3部分结构并且对酸稳定,Xb2表示氢原子,烷基,氰基或卤素原子,R3表示具有一个或多个CH3部分结构并且对酸稳定的有机基团,以及 n表示1〜5的整数。