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    • 31. 发明申请
    • DUAL ZONE GAS INJECTION NOZZLE
    • 双区气体喷射喷嘴
    • WO2009085810A1
    • 2009-07-09
    • PCT/US2008/087139
    • 2008-12-17
    • APPLIED MATERIALS, INC.LIU, WeiSWENBERG, Johanes S.NGUYEN, Hanh D.NGUYEN, Son T.CURTIS, RogerBOTTINI, Philip A.
    • LIU, WeiSWENBERG, Johanes S.NGUYEN, Hanh D.NGUYEN, Son T.CURTIS, RogerBOTTINI, Philip A.
    • H01L21/02
    • H01J37/3244H01J37/32449
    • The present invention generally provides apparatus and method for processing a substrate. Particularly, the present invention provides apparatus and methods to obtain a desired distribution of a process gas. One embodiment of the present invention provides an apparatus for processing a substrate comprising an injection nozzle having a first fluid path including a first inlet configured to receive a fluid input, and a plurality of first injection ports connected with the first inlet, wherein the plurality of first injection ports are configured to direct a fluid from the first inlet towards a first region of a process volume, and a second fluid path including a second inlet configured to receive a fluid input, and a plurality of second injection ports connected with the second inlet, wherein the second injection ports are configured to direct a fluid from the second inlet towards a second region of the process volume.
    • 本发明总体上提供了用于处理衬底的装置和方法。 特别地,本发明提供了获得处理气体的期望分布的装置和方法。 本发明的一个实施例提供一种用于处理衬底的装置,其包括具有第一流体路径的注射喷嘴,所述第一流体路径包括构造成接收流体输入的第一入口和与第一入口连接的多个第一注入口,其中, 第一注入口构造成将流体从第一入口引向处理容积的第一区域,并且第二流体路径包括构造成接收流体输入的第二入口和与第二入口连接的多个第二注入口 ,其中所述第二注射端口被配置为将流体从所述第二入口引导到所述处理体积的第二区域。
    • 39. 发明申请
    • COMPOSITIONS, ORGANISMS AND METHODOLOGIES EMPLOYING A NOVEL HUMAN KINASE
    • 使用新型人类激素的成分,组织和方法学
    • WO2004050831A2
    • 2004-06-17
    • PCT/US2003/035609
    • 2003-11-07
    • WYETHLIU, WeiWU, Leeying
    • LIU, WeiWU, Leeying
    • C12N
    • C12N9/1205
    • This invention provides compositions, organisms and methodologies employing a novel human protein kinase, MCRKI . The novel human kinase has sequence homology to rat myotonic dystrophy kinase-related Cdc42 binding kinase (MRCK) alpha. The gene encoding the novel kinase is localized in locus 11 q13 of human chromosome 11. The novel protein kinase comprises multiple functional/structural domains that include a kinase domain, a pkinase_C domain, a DAG-PE binding domain, and a CNH domain. The sequence and structure similarity between the novel human protein and rat MRCK alpha indicates that the novel human protein may function as a downstream effector of Cdc42 in cytoskeleton reorganization.
    • 本发明提供使用新型人蛋白激酶MCRKI的组合物,生物体和方法。 新型人类激酶与大鼠肌强直性营养不良激酶相关的Cdc42结合激酶(MRCK)α具有序列同源性。 编码新型激酶的基因位于人染色体11的基因座11q13中。新型蛋白激酶包含多个功能/结构域,其包括激酶结构域,pkinase_C结构域,DAG-PE结合结构域和CNH结构域。 新型人类蛋白质与大鼠MRCKα之间的序列和结构相似性表明新型人蛋白质可能在细胞骨架重组中起到Cdc42的下游作用。