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31. 发明申请

WO2005076419A1 SYSTEMS AND METHODS FOR FORMING A LASER BEAM HAVING A FLAT TOP 审中-公开
标题翻译：用于形成具有平板顶部的激光束的系统和方法
公开(公告)号：WO2005076419A1
公开(公告)日：2005-08-18
申请号：PCT/US2004/039951
申请日：2004-11-30
申请人： COHERENT, INC. , DEMARIA, Anthony, J. , NEWMAN, Leon, A. , SEQUIN, Vernon
发明人： DEMARIA, Anthony, J. , NEWMAN, Leon, A. , SEQUIN, Vernon
IPC分类号： H01S3/00
CPC分类号： G02B27/0927 , B23K26/0604 , B23K26/067 , B23K26/0732 , B23K26/0736 , G02B27/0977 , H01S3/0315 , H01S3/08031 , H01S3/10092 , H01S3/105 , H01S3/2232 , H01S3/2383
摘要： Multiple laser beams, each having a shape such as a Gaussian profile (200), can be incoherently combined to obtain a shaped, flat top laser beam (300, 400). The combined laser beams can provide power levels necessary for material processing applications such as annealing, drilling, and cutting, while minimizing the amount of unused power. The lasers can be positioned in an array (700, 800) in order to shape the flat top beam, and can be staggered in position where necessary to give each output beam an equal beam path length. The relative frequencies and/or powers of the lasers can be adjusted to control the flatness and stability of the incoherently combined beam.
摘要翻译：每个具有诸如高斯分布（200）的形状的多个激光束可以被不相干地组合以获得成形的平顶激光束（300,400）。组合的激光束可以提供材料处理应用所需的功率等级，例如退火，钻孔和切割，同时最小化未使用功率的量。可以将激光器定位在阵列（700,800）中，以形成平坦的顶部波束，并且可以在必要时交错地位以给予每个输出光束相等的光束路径长度。可以调节激光器的相对频率和/或功率以控制非相干组合光束的平坦度和稳定性。

32. 发明申请

WO2005038999A1 INTRACAVITY FREQUENCY-TRIPLED CW LASER 审中-公开
标题翻译： INTRACAVITY FREQUENCY-TRIPLED CW激光
公开(公告)号：WO2005038999A1
公开(公告)日：2005-04-28
申请号：PCT/US2004/032839
申请日：2004-10-06
申请人： COHERENT, INC. , SPINELLI, Luis , CAPRARA, Andrea
发明人： SPINELLI, Luis , CAPRARA, Andrea
IPC分类号： H01S3/109
CPC分类号： H01S3/109 , G02F1/3532 , G02F1/3534 , G02F1/37 , G02F2001/354 , H01S3/1083 , H01S5/041 , H01S5/14
摘要： A method of intracavity frequency conversion in a CW laser includes causing fundamental radiation to circulate in a laser resonator. The fundamental radiation makes a first pass through an optically nonlinear crystal where a fraction of the fundamental radiation generates second-harmonic radiation in a forward pass through the crystal. The residual fundamental radiation and the second-harmonic radiation are then sum-frequency mixed in forward and reverse passes through an optically nonlinear crystal such that a fraction of each is converted to third-harmonic radiation. The residual second-harmonic radiation and fundamental radiation from the sum-frequency mixing then make a reverse pass through the second-harmonic generating crystal where the second-harmonic radiation is converted back to fundamental radiation. The third harmonic radiation can be delivered from the resonator as output radiation, or can be used to pump another optically nonlinear crystal in an optical parametric oscillator. Second-harmonic radiation can also be used to pump an optical parametric oscillator.
摘要翻译：在CW激光器中的腔内频率转换的方法包括使基本辐射在激光谐振器中循环。基本辐射首先通过光学非线性晶体，其中基波的一部分在向前通过晶体时产生二次谐波辐射。剩余的基本辐射和二次谐波辐射然后在正向和反向通过光学非线性晶体进行和频混合，使得其中的一部分被转换为三次谐波辐射。来自和频混合的残余二次谐波辐射和基波辐射反向通过二次谐波产生晶体，二次谐波辐射被转换回基本辐射。三次谐波辐射可以作为输出辐射从谐振器输出，或者可以用于泵浦光参量振荡器中的另一光学非线性晶体。二次谐波辐射也可用于泵浦光参量振荡器。

33. 发明申请

WO2005010606A1 APPARATUS AND METHOD FOR PROVIDING MULTIPLE INDEPENDENTLY CONTROLABLE BEAMS FROM A SINGLE LASER BEAM 审中-公开
标题翻译：从单根激光束提供多个独立可控制光束的装置和方法
公开(公告)号：WO2005010606A1
公开(公告)日：2005-02-03
申请号：PCT/US2004/020628
申请日：2004-06-28
申请人： COHERENT, INC. , MUELLER, Eric, R. , STRAAYER, Ronald
发明人： MUELLER, Eric, R. , STRAAYER, Ronald
IPC分类号： G02F1/33
CPC分类号： B23K26/0673 , B23K26/067 , G02F1/113 , G02F1/33
摘要： A laser output beam (16) is directed into an acousto-optic cell (22). The acousto-optic cell is driven by RF voltages at a plurality of different frequencies. Portions of the laser output beam are diffracted by the acousto-optic cell at a plurality of different angles corresponding the different drive frequencies. The different portions of the output beam define a plurality of secondary beams (B1-B4). The magnitude of the RF voltages applied to the acousto-optic cell and the power in the laser output beam may be cooperatively varied to provide a predetermined power in each of the secondary beams.
摘要翻译：激光输出光束（16）被引导到声光电池（22）中。声光单元由多个不同频率的RF电压驱动。激光输出光束的部分被对应于不同驱动频率的多个不同角度的声光单元衍射。输出光束的不同部分限定多个次光束（B1-B4）。施加到声光单元的RF电压的大小和激光输出光束中的功率可以协调地变化，以在每个次级光束中提供预定的功率。

34. 发明申请

WO2004023214A1 INTERFEROMETRY-BASED METHOD AND APPARATUS FOR OVERLAY METROLOGY 审中-公开
标题翻译：基于介质的方法和装置的覆盖度计
公开(公告)号：WO2004023214A1
公开(公告)日：2004-03-18
申请号：PCT/US2003/025300
申请日：2003-08-14
申请人： THERMA-WAVE, INC.
发明人： JOHNSON, Kenneth
IPC分类号： G03F7/20
CPC分类号： G03F7/70633 , G01N21/956
摘要： A method for optically inspecting and evaluating a semiconductor wafer includes projecting a probe beam at two overlay targets. Each overlay target includes an upper grating and a lower grating. At each target, the combined intensity of the 1 St diffracted orders generated by the upper and lower gratings are measured. The combined intensity of the -1 St diffracted orders generated by the upper and lower gratings are also measured for each target. The method then calculates an overlay offset between an upper layer and a lower layer as a function of the measured intensity information.
摘要翻译：用于光学检查和评估半导体晶片的方法包括将探测光束投影在两个覆盖目标上。每个覆盖目标包括上光栅和下光栅。在每个目标处，测量由上和下光栅产生的1 衍射级的组合强度。对于每个目标，也测量由上和下光栅产生的-1 衍射级的组合强度。然后，该方法根据测量的强度信息计算上层和下层之间的覆盖偏移。

35. 发明申请

WO2003073568A3 LASER MODULATION AND Q-SWITCHING USING AN INVERSE FABRY-PEROT FILTER 审中-公开
公开(公告)号：WO2003073568A3
公开(公告)日：2003-09-04
申请号：PCT/US2003/005509
申请日：2003-02-21
申请人： COHERENT, INC.
发明人： MUELLER, Eric, R.
IPC分类号： H01S3/105
摘要： A laser includes an external modulation device (20) including two spaced-apart wire-grids (22, 24). The device has a reflectivity peak at a wavelength dependent on the spacing between the wire grids. The device is arranged to reflect and transmit radiation received from the laser. The reflected and transmitted radiation are modulated by varying the spacing between the wire-grid polarizers. The device may be used as an end mirror or a fold mirror of a laser resonator and operated as a Q-switch for the laser resonator. Q-switching is accomplished by varying the reflectivity of the device at the lasing wavelength from below to above a threshold reflectivity value for lasing.

36. 发明申请

WO2003071313A1 OPTICAL ELEMENT AND MATERIAL WITH REDUCED UV ABSORPTION AND DETERIORATION 审中-公开
标题翻译：光学元件和材料与减少紫外线吸收和检测
公开(公告)号：WO2003071313A1
公开(公告)日：2003-08-28
申请号：PCT/US2003/001377
申请日：2003-01-17
申请人： COHERENT, INC.
发明人： LOIACONO, Dominic , PERLOV, Dan
IPC分类号： G02B1/02
CPC分类号： C03C3/32 , G02B1/02
摘要： No bridging fluorine sites in calcium fluoride (CaF 2 ) caused by lanthanide, transition metal or actinide impurities are eliminated by doping the CaF 2 with sodium or another monovalent anionic dopant during or after growth of the crystal. This doping technique may be applied in the growth of other UV-transmissive fluoride materials in a family designated by a general formula Z:XF N where X is one or some combination of magnesium, calcium, zinc, strontium, cadmium, and barium, Z is one or some caombination of lithium, sodium, potassium, rubidium, cesium, thallium, copper, silver and gold, and N is an integer in the range 1 through 6, and dependant on X. Elimination of the non-bridging fluorine sites can provide solarization resistant materials with low UV absorption even when the material contains sufficient lanthanide transition metal, or actinide impurities to cause the fluoride materials to be highly absorbing for UV radiation in the absence of the monovalent anion doping.
摘要翻译：在晶体生长期间或之后，通过在钠或其它单价阴离子掺杂剂中掺杂CaF2而消除由镧系元素，过渡金属或锕系杂质引起的氟化钙（CaF 2）中的桥接氟位点。这种掺杂技术可以用于通式Z：XFN所示的其他紫外线透射性氟化物材料的生长，其中X是镁，钙，锌，锶，镉和钡的一种或某种组合，Z是锂，钠，钾，铷，铯，铊，铜，银和金的一个或一些组合，N是1至6范围内的整数，并且取决于X.取消非桥接氟位点可以提供即使当材料含有足够的镧系元素过渡金属或锕系杂质时，即使在不存在一价阴离子掺杂的情况下，氟化物材料也可以高度吸收UV辐射

37. 发明申请

WO2003050514A3 POSITION-DEPENDENT OPTICAL METROLOGY CALIBRATION 审中-公开
公开(公告)号：WO2003050514A3
公开(公告)日：2003-06-19
申请号：PCT/US2002/039733
申请日：2002-12-12
申请人： THERMA-WAVE, INC.
发明人： SEZGINER, Abdurrahman , JOHNSON, Kenneth , NORTON, Adam, E. , TUITJE, Holger, A.
IPC分类号： G01N21/93
摘要： An optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependent quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. A portion of the characterization of the optical system may be accomplished by using titled black glass to provide a non-reflective reference.

38. 发明申请

WO2003030312A3 CYLINDRICAL TWO-DIMENSIONAL DIODE-LASER ARRAYS AND METHOD FOR MAKING SAME 审中-公开
公开(公告)号：WO2003030312A3
公开(公告)日：2003-04-10
申请号：PCT/US2002/028793
申请日：2002-09-09
申请人： COHERENT, INC.
发明人： YATSKAR, Alexander, A. , CARTER, Serrena, Marie , AUSTIN, Russel, R.
IPC分类号： H01S3/0941
摘要： A cylindrical two-dimensional diode-laser assembly (20) includes fractionally-cylindrical dielectric segments (26) bonded in a circular aperture (24) in a metal heat-sink (22). Diode laser bars (30) are located in gaps (28) between the segments (26) with light from the diode-lasers (32) directed inwardly. The segments (26) are made by cutting slots (42) in one end of a tube (40) of the dielectric material with the width of the slots corresponding to the width of the gaps (28) and the part of the tube between slots providing the segments. The slotted tube is metallized and the slotted end of the tube is inserted into the heat-sink aperture with an unslotted part of the tube outside the aperture. The slotted part of the tube is bonded in the aperture and the unslotted part of the tube separated from the slotted part leaving the segments bonded in the aperture.

39. 发明申请

WO2023091849A1 PULSE EQUALIZATION IN Q-SWITCHED GAS LASERS 审中-公开
公开(公告)号：WO2023091849A1
公开(公告)日：2023-05-25
申请号：PCT/US2022/078772
申请日：2022-10-27
申请人： COHERENT, INC.
发明人： SEGUIN, Vernon A. , SCHMELZER, David P. , FONTANELLA, Joel , ROSENTHAL, Peter
IPC分类号： H01S3/223 , H01S3/117 , H01S3/13 , H01S3/136 , H01S3/10 , H01S3/106 , H01S3/23
摘要： A Q-switched gas laser apparatus with bivariate pulse equalization includes a gas laser, a sensor, and an electronic circuit. A Q-switch that switches the laser resonator between high-loss and low-loss states to generate a pulsed laser beam. The sensor obtains a measurement of the pulsed laser beam indicative of the laser pulse energy. The electronic circuitry operates the Q-switch to (a) repeatedly switch the laser resonator between the high-loss and low-loss states to set a repetition rate of laser pulses of the pulsed laser beam, (b) adjust a loss level of the low-loss state, based on the pulse energy measurement, to achieve a target laser pulse energy, and (c) adjust a duration of the low-loss state to achieve a target laser pulse duration. By adjusting both pulse energy and duration, uniform pulse energy and, if desired, uniform pulse duration are achieved over a wide range of repetition rates.

40. 发明申请

WO2023069847A1 SCANNING RADIAL LASER PROCESSING WITH BI-CONICAL REFLECTION 审中-公开
公开(公告)号：WO2023069847A1
公开(公告)日：2023-04-27
申请号：PCT/US2022/077891
申请日：2022-10-11
申请人： ROFIN-SINAR TECHNOLOGIES LLC
发明人： KOLE, Matthew, R.
IPC分类号： B23K26/082 , B23K26/10 , B23K26/06 , B23K26/28
摘要： An apparatus (100) for radial laser processing of a workpiece (180), located on a center axis (190), includes a laser beam scanner (150) directing a laser beam (170) along but offset from the center axis (190), and a bi-conical reflector system (110) including first (112) and second (114) conical mirror surfaces (112S, 114S) surrounding the center axis (190). The first conical mirror surface (112S) faces away from the center axis (190) to reflect the laser beam (170) radially outwards therefrom, toward the second conical mirror surface (114S). The second conical mirror surface (114S) faces the center axis (190) to reflect the laser beam (170) radially inwards toward the workpiece (180). The laser beam scanner (150) azimuthally scans a location of incidence of the laser beam (170) on the first conical mirror surface (112S) to scan an azimuthal angle of propagation of the laser beam (170) from the second conical mirror surface (114S) toward the workpiece (180). The apparatus enables irradiation of the entire circumference of the workpiece (180) without physically rotating the workpiece.

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