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    • 30. 发明申请
    • A METHOD FOR THE PREPARATION OF A THIN SEMICONDUCTOR FILM
    • 一种制备薄膜半导体膜的方法
    • WO1988005835A1
    • 1988-08-11
    • PCT/GB1987000095
    • 1987-02-06
    • THE BOC GROUP PLC
    • THE BOC GROUP PLCROBILLARD, Jean, Jules, Achille
    • C30B15/00
    • C30B15/08C23C26/02C30B15/00C30B15/007C30B29/605
    • A method of preparing a thin film of a semiconductor material on a substrate, in which charged microdroplets of the semiconductor material (12) or a constituent thereof are generated by electrohydrodynamic (EHD) extraction of the droplets from a meniscus (16) formed at an elongate tip (14) of a nozzle (11) containing the material in a molten state, the EHD extraction occurring under the influence of a high electric field produced by an extractor electrode (17) adjacent the tip (14) of the nozzle (11). The microdroplets are then accelerated away from the elongate tip (14) of the nozzle (11) to form a two-dimensional ribbon-like beam or blanket (19) of the charged microdroplets. The two-dimensional beam (19) is directed onto the trailing edge of a target (26) carried on a moving substrate (27) such that a film of the semiconductor material is formed on the substrate by deposition of the microdroplets on the trailing edge of the moving target.
    • 一种在基板上制备半导体材料的薄膜的方法,其中半导体材料(12)或其组成物的带电微滴通过电子流体动力学(EHD)从形成于其上的弯液面(16)提取液滴而产生 包含处于熔融状态的材料的喷嘴(11)的细长尖端(14),所述EHD提取在由与喷嘴(11)的尖端(14)相邻的抽出器电极(17)产生的高电场的影响下发生 )。 然后将微滴从喷嘴(11)的细长尖端(14)加速,以形成带电微滴的二维带状束或毛毯(19)。 二维光束(19)被引导到承载在移动的衬底(27)上的靶(26)的后缘上,使得半导体材料的膜通过在后缘上沉积微滴而形成在衬底上 的移动目标。