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21. 发明申请

WO2012051121A3 BUILDING A LIBRARY OF SPECTRA FOR OPTICAL MONITORING 审中-公开
标题翻译：建立光学监测光谱图书馆
公开(公告)号：WO2012051121A3
公开(公告)日：2012-06-21
申请号：PCT/US2011055642
申请日：2011-10-10
申请人： APPLIED MATERIALS INC , DAVID JEFFREY DRUE , BENVEGNU DOMINIC J , HU XIAOYUAN
发明人： DAVID JEFFREY DRUE , BENVEGNU DOMINIC J , HU XIAOYUAN
IPC分类号： H01L21/304 , H01L21/66
CPC分类号： H01L22/26 , B24B37/013 , B24B49/12 , H01L21/3212 , H01L22/12
摘要： A method of controlling polishing includes storing a library having a plurality of reference spectra, polishing a substrate, measuring a sequence of spectra of light from the substrate during polishing, for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum using a matching technique other than sum of squared differences to generate a sequence of best matching reference spectra, and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on the sequence of best matching reference spectra. Finding a best matching reference spectrum may include performing a cross-correlation of the measured spectrum with each of two or more of the plurality of reference spectra from the library and selecting a reference spectrum with the greatest correlation to the measured spectrum as a best matching reference spectrum.
摘要翻译：控制抛光的方法包括：存储具有多个参考光谱的库，抛光衬底，在抛光期间测量来自衬底的光的光谱序列，对于光谱序列的每个测量光谱，使用除了平方差的和以产生最佳匹配参考光谱的序列之外的匹配技术，以及基于最佳匹配参考光谱的序列来确定抛光终点或抛光速率的调整中的至少一个。找到最佳匹配的参考光谱可以包括执行所测量的光谱与来自文库的多个参考光谱中的两个或更多个的互相关，并且选择与所测量的光谱具有最大相关性的参考光谱作为最佳匹配参考光谱。

22. 发明申请

WO2012145418A3 CONSTRUCTION OF REFERENCE SPECTRA WITH VARIATIONS IN ENVIRONMENTAL EFFECTS 审中-公开
标题翻译：建筑环境影响变化参考光谱
公开(公告)号：WO2012145418A3
公开(公告)日：2013-01-24
申请号：PCT/US2012034109
申请日：2012-04-18
申请人： APPLIED MATERIALS INC , DAVID JEFFREY DRUE
发明人： DAVID JEFFREY DRUE
IPC分类号： H01L21/66 , H01L21/304
CPC分类号： B24B49/12 , B24B37/013 , B24B37/042 , G01B11/0683 , G01J3/28 , G01N21/59 , G01N21/9501 , G01N2021/8416 , G01N2021/8438
摘要： A method of generating a library of reference spectra includes storing at least one reference spectrum, storing a plurality of different transmission curves, and for at least two transmission curves from the plurality of different transmission curves, calculating a modified reference spectrum from the reference spectrum and the transmission curve to generate a plurality of modified reference spectra. The transmission curves represent distortion to a spectrum introduced by variations in components in an optical path before a substrate surface.
摘要翻译：生成参考光谱库的方法包括存储至少一个参考光谱，存储多个不同的透射曲线，以及存储来自多个不同透射曲线的至少两个透射曲线，从参考光谱计算修改的参考光谱，以及传输曲线以产生多个修改的参考光谱。透射曲线表示在基板表面之前的光路中的分量变化引入的光谱的失真。

23. 发明申请

WO2012148716A3 VARYING COEFFICIENTS AND FUNCTIONS FOR POLISHING CONTROL 审中-公开
标题翻译：改变系统和功能的抛光控制
公开(公告)号：WO2012148716A3
公开(公告)日：2012-12-20
申请号：PCT/US2012033677
申请日：2012-04-13
申请人： APPLIED MATERIALS INC , DAVID JEFFREY DRUE , BENVEGNU DOMINIC J , HU XIAOYUAN
发明人： DAVID JEFFREY DRUE , BENVEGNU DOMINIC J , HU XIAOYUAN
IPC分类号： H01L21/304
CPC分类号： B24B37/005 , B24B37/042 , G01N21/274 , G01N21/41 , H01L21/3212 , H01L22/12 , H01L22/26
摘要： A method of generating a library of reference spectra includes storing an optical model for a layer stack having at a plurality of layers, and for each combination of a refractive index function from a set of refractive index functions and an extinction coefficient function from a set of extinction coefficient functions, calculating a reference spectrum using the optical model. Another method of generating a library of reference spectra includes receiving user input identifying a plurality of different contribution percentages for at least one of a first stack or a second stack on the substrate, and for each contribution percentage from the plurality of different contribution percentages, calculating a reference spectrum from a first spectrum for the first stack, a second spectrum for the second stack, and the contribution percentage.
摘要翻译：产生参考光谱库的方法包括：存储具有多个层的层叠层的光学模型，以及对于来自一组折射率函数的折射率函数和来自一组折射率函数的消光系数函数的折射率函数的每个组合消光系数函数，使用光学模型计算参考光谱。生成参考光谱库的另一种方法包括：接收用户输入，其识别基板上的第一堆叠或第二堆叠中的至少一个的多个不同贡献百分比，以及对于来自多个不同贡献百分比的每个贡献百分比，计算来自第一堆叠的第一光谱的参考光谱，第二堆叠的第二光谱和贡献百分比。

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