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    • 13. 发明申请
    • METHODS FOR CREATING OPTICAL STRUCTURES IN DIELECTRICS USING CONTROLLED ENERGY DEPOSITION
    • 使用控制能量沉积在电介质中创建光学结构的方法
    • WO02016070A2
    • 2002-02-28
    • PCT/CA2001/001174
    • 2001-08-21
    • B23K26/00B23K26/06G02B6/12G02B6/13G02B6/132
    • B23K26/0063B23K26/0057B23K26/0624B23K26/361G02B6/13G02B6/132G02B2006/12171
    • The present invention relates to a method for writing an optical structure within a workpiece of a dielectric material using FLDM. In a first embodiment system parameters for the FLDM are determined in dependence upon the dielectric material, a predetermined volume element and a predetermined change of the refractive index of the dielectric material within the predetermined volume element. The system parameters are determined such that self-focusing of a pulsed femtosecond laser beam is inhibited by non-linear absorption of the energy of the pulsed femtosecond laser beam within the dielectric material. A pulsed femtosecond laser beam based on the determined system parameters is focused at a predetermined location within the workpiece for inducing a change of the refractive index through dielectric modification within the predetermined volume element, the volume element including the focus. Various embodiments enable writing of various different optical structures into a workpiece.
    • 本发明涉及使用FLDM在介电材料的工件内写入光学结构的方法。 在第一实施例中,用于FLDM的系统参数根据电介质材料,预定体积元素和预定体积元件内介电材料的折射率的预定变化来确定。 确定系统参数,使得脉冲飞秒激光束的自聚焦通过介电材料内的脉冲飞秒激光束的能量的非线性吸收而被抑制。 基于所确定的系统参数的脉冲飞秒激光束被聚焦在工件内的预定位置处,以通过预定体积元件(包括焦点)的体积元件中的介电修改来引起折射率的变化。 各种实施例使得可以将各种不同的光学结构写入工件。
    • 16. 发明申请
    • TRIMMING OPTICAL DEVICE STRUCTURES
    • 修剪光学器件结构
    • WO2017125608A1
    • 2017-07-27
    • PCT/EP2017/051341
    • 2017-01-23
    • UNIVERSITY OF SOUTHAMPTON
    • THOMSON, David JohnREED, Graham TrevorTOPLEY, Robert
    • G02B6/134
    • G02B6/1347G02B2006/12171G02B2006/12188
    • A method of trimming the refractive index of material forming at least part of one or more structures integrated in one or more pre-fabricated devices, the method comprising : implanting one or more first regions of material of one or more pre-fabricated devices, encompassing at least partially one or more device structures, with ions to alter the crystal form of the material within the one or more first regions and change the refractive index of the material within the one or more first regions; and heat treating one or more second regions of material of the one or more devices, encompassing at least partially the one or more first regions, to alter the crystal form of the material within the one or more first regions encompassed by the one or more second regions and change the refractive index thereof, thereby trimming the refractive index of the material of at least part of the one or more device structures, such that the one or more device structures provide one or more predetermined device outputs.
    • 一种修整形成集成在一个或多个预制器件中的一个或多个结构的至少一部分的材料的折射率的方法,所述方法包括:将一个或多个第一材料区域 或更多预制器件,其至少部分地包含一个或多个器件结构,其中离子改变所述一个或多个第一区域内的材料的晶体形式并且改变所述一个或多个第一区域内的材料的折射率; 以及热处理所述一个或多个装置的材料的一个或多个第二区域,其至少部分地包围所述一个或多个第一区域以改变由所述一个或多个第二区域包围的所述一个或多个第一区域内的材料的晶体形式 并且改变其折射率,从而修整一个或多个器件结构的至少一部分的材料的折射率,使得一个或多个器件结构提供一个或多个预定的器件输出。
    • 17. 发明申请
    • METHOD FOR REALIZING AN OPTICAL WAVEGUIDE IN A SUBSTRATE BY MEANS OF A FEMTOSECOND LASER
    • 通过FEMTOSECOND激光器在基板中实现光波导的方法
    • WO2014170872A1
    • 2014-10-23
    • PCT/IB2014/060825
    • 2014-04-18
    • CONSIGLIO NAZIONALE DELLE RICERCHESAPIENZA UNIVERSITA' DI ROMA
    • OSELLAME, RobertoCRESPI, AndreaCORRIELLI, GiacomoSCIARRINO, Fabio
    • G02B6/13G02B6/126G02B6/10
    • G02B6/13B23K26/0057G02B6/105G02B6/125G02B6/126G02B2006/12171
    • The invention regards a method for realizing a waveguide in a substrate by means of a femtosecond laser system, the waveguide having a birefringence axis at a predetermined angle for at least a segment, such method including: - preparing a substrate in which the waveguide has to be realized, such substrate including a free surface onto which the pulsed laser beam is impinging; - positioning an immersion lens (9) apt to focus the laser beam in the substrate (10); - introducing a first optical element (11); - making the laser beam impinge on the first optical element (11), which directs the laser beam towards the immersion lens (9); - focusing the femtosecond pulsed laser beam (F) at a given depth inside the substrate (10), in order to induce a refractive index change in a volume of said substrate around the focus, wherein the laser beam (F) propagates in the substrate along a direction, said focusing including making the laser beam impinge on said immersion lens (9) in a first position; - varying the propagation direction of the laser beam (F) in the substrate (10), maintaining the beam focused, translating or rotating the first optical element (11), in order to operate a translation of the laser beam, to modify the impinging position of the laser beam on the immersion lens (9), in order to reach a first propagation direction forming a first non-zero angle (Θt) with respect to the normal direction to the free surface of the substrate; - translating the laser beam focus with respect to the substrate (10) in order to create a first waveguide segment (GD), defined by adjacent volumes in which the refractive index has been modified, wherein the birefringence axis of the formed first waveguide segment (GD) is at said fixed angle, which is a function of the first angle (Θt) describing the reached first propagation direction of the laser beam in the substrate.
    • 本发明涉及一种通过飞秒激光系统实现基板中的波导的方法,该波导对于至少一个段具有预定角度的双折射轴,该方法包括:制备其中波导必须 可以实现这种衬底,其包括脉冲激光束撞击到其上的自由表面; - 将浸没透镜(9)定位成将激光束聚焦在基板(10)中; - 引入第一光学元件(11); - 使所述激光束照射在所述第一光学元件(11)上,所述第一光学元件将所述激光束引向所述浸没透镜(9); - 将飞秒脉冲激光束(F)聚焦在衬底(10)内的给定深度处,以便引起围绕焦点的所述衬底的体积的折射率变化,其中激光束(F)在衬底 沿着方向,所述聚焦包括使激光束在所述浸没透镜(9)处于第一位置; - 改变基板(10)中的激光束(F)的传播方向,保持光束聚焦,平移或旋转第一光学元件(11),以便操作激光束的平移,以改变撞击 激光束在浸没透镜(9)上的位置,以便达到相对于基板的自由表面的法线方向形成第一非零角度(θt)的第一传播方向; - 相对于基板(10)平移激光束聚焦,以便产生由折射率已被修改的相邻体积所限定的第一波导段(GD),其中所形成的第一波导段的双折射轴 GD)处于所述固定角度,其是描述基板中激光束到达的第一传播方向的第一角度(Θt)的函数。
    • 19. 发明申请
    • MULTIPULSE SYSTEM FOR WRITING WAVEGUIDES. GRATINGS, AND INTEGRATED OPTICAL CIRCUITS
    • 用于写波形的多重系统。 光栅和集成光电路
    • WO2008113165A1
    • 2008-09-25
    • PCT/CA2008/000507
    • 2008-03-14
    • HERMAN, Peter R.ZHANG, HaibinEATON, Shane Michael
    • HERMAN, Peter R.ZHANG, HaibinEATON, Shane Michael
    • G02B6/13G02B5/18
    • G02B6/34G02B5/1857G02B6/02147G02B6/124G02B6/13G02B2006/12164G02B2006/12171
    • The present invention provides a direct laser writing fabrication method and system for devices having periodic refractive index modulation structures, for example, Bragg gratings. By focusing a modulated pulsed laser beam into a transparent material substrate, a path of laser modified volumes can be formed with modified refractive index compared with the unprocessed material. Modulation of exposure conditions provides periodic or modified periodic waveguide structures such that the waveguide structures exhibit grating responses and can be used for a variety of optical applications, for example, as spectral filters, Bragg reflectors, grating couplers, grating sensors, or other devices. The method enables direct one-step fabrication and integration of periodic or modified periodic refractive-index modulation devices together with other optical waveguiding devices to enable low-cost, multifunctional one-dimensional, two- dimensional or three-dimensional optical circuit fabrication of simple and complex optical systems.
    • 本发明提供了一种用于具有周期性折射率调制结构的器件的直接激光写入制造方法和系统,例如布拉格光栅。 通过将调制的脉冲激光束聚焦到透明材料基板中,与未处理的材料相比,可以形成具有改进的折射率的激光修改体积的路径。 暴露条件的调制提供周期性或修改的周期性波导结构,使得波导结构呈现光栅响应,并且可以用于各种光学应用,例如作为光谱滤波器,布拉格反射器,光栅耦合器,光栅传感器或其它器件。 该方法能够将周期性或修改的周期性折射率调制器件与其他光波导器件直接一步制造和集成,以实现简单和简单的低成本,多功能一维,二维或三维光电路制造 复杂的光学系统。