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11. 发明申请

WO2010055441A3 IMPROVED SUBSTRATE TEMPERATURE CONTROL BY USING LIQUID CONTROLLED MULTIZONE SUBSTRATE SUPPORT 审中-公开
标题翻译：液体控制多区衬底支撑改善衬底温度控制
公开(公告)号：WO2010055441A3
公开(公告)日：2010-07-08
申请号：PCT/IB2009054876
申请日：2009-11-03
申请人： LAM RES CORP , LAM RES AG , SINGH HARMEET , COMENDANT KEITH
发明人： SINGH HARMEET , COMENDANT KEITH
IPC分类号： C23C14/50 , C23C16/46
CPC分类号： H01L21/67248 , C23C16/4586 , C23C16/46 , C23C16/463 , C23C16/50 , C23C16/52 , H01J2237/2001 , H01L21/67109 , H01L21/6831
摘要： A substrate support useful in a reaction chamber of a plasma processing apparatus is provided. The substrate support comprises a base member and a heat transfer member overlying the base member. The heat transfer member has multiple zones to individually heat and cool each zone of the heat transfer member. An electrostatic chuck overlies the heat transfer member. The electrostatic chuck has a support surface for supporting a substrate in a reaction chamber of the plasma processing apparatus. A source of cold liquid and a source of hot liquid are in fluid communication with flow passages in each zone. A valve arrangement is operable to independently control temperature of the liquid by adjusting a mixing ratio of the hot liquid to the cold liquid circulating in the flow passages. In another embodiment, heating elements along a supply line and transfer lines heat a liquid from a liquid source before circulating in the flow passages.
摘要翻译：提供可用于等离子体处理设备的反应室中的衬底支撑件。基板支撑件包括基座构件和覆盖基座构件的传热构件。传热构件具有多个区域以分别加热和冷却传热构件的每个区域。静电吸盘覆盖传热构件。静电吸盘具有用于支撑等离子体处理设备的反应室中的基板的支撑表面。冷液体源和热液体源与每个区域中的流动通道流体连通。阀装置可操作以通过调节热流体与在流动通道中循环的冷流体的混合比来独立地控制液体的温度。在另一个实施例中，沿供应管线和传输管线的加热元件在流动通道中循环之前加热来自液体源的液体。

12. 发明申请

WO2012039744A3 PLASMA CONFINEMENT RING ASSEMBLY FOR PLASMA PROCESSING CHAMBERS 审中-公开
标题翻译：用于等离子体加工釜的等离子体配料环组件
公开(公告)号：WO2012039744A3
公开(公告)日：2012-08-23
申请号：PCT/US2011001501
申请日：2011-08-25
申请人： LAM RES CORP , DE LA LLERA ANTHONY , CARMAN DAVID , TAYLOR TRAVIS R , ULLAL SAURABH J , SINGH HARMEET
发明人： DE LA LLERA ANTHONY , CARMAN DAVID , TAYLOR TRAVIS R , ULLAL SAURABH J , SINGH HARMEET
IPC分类号： H01L21/3065
CPC分类号： H01L21/67069
摘要： A plasma confinement ring assembly with a single movable lower ring can be used for controlling wafer area pressure in a capacitively coupled plasma reaction chamber wherein a wafer is supported on a lower electrode assembly and process gas is introduced into the chamber by an upper showerhead electrode assembly. The assembly includes an upper ring, the lower ring, hangers, hanger caps, spacer sleeves and washers. The lower ring is supported by the hangers and is movable towards the upper ring when the washers come into contact with the lower electrode assembly during adjustment of the gap between the upper and lower electrodes. The hanger caps engage upper ends of the hangers and fit in upper portions of hanger bores in the upper ring. The spacer sleeves surround lower sections of the hangers and fit within lower portions of the hanger bores. The washers fit between enlarged heads of the hangers and a lower surface of the lower ring. The spacer sleeves are dimensioned to avoid rubbing against the inner surfaces of the hanger bores during lifting of the lower ring.
摘要翻译：可以使用具有单个可移动下环的等离子体约束环组件来控制电容耦合等离子体反应室中的晶片面积压力，其中晶片被支撑在下部电极组件上，并且处理气体通过上部喷头电极组件。组件包括上环，下环，吊架，衣架盖，间隔套和垫圈。下环由吊架支撑，并且当在上下电极之间的间隙调节期间垫圈与下电极组件接触时，可以朝向上环移动。衣架帽接合衣架的上端，并安装在上环的衣架孔的上部。间隔套环绕悬挂架的下部并且安装在衣架孔的下部。垫圈安装在衣架的扩大头部和下环的下表面之间。间隔套的尺寸被设计成避免在提升下环期间摩擦挂钩孔的内表面。

13. 发明申请

WO2010062345A3 LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER 审中-公开
标题翻译：等离子体处理室的下电极组件
公开(公告)号：WO2010062345A3
公开(公告)日：2010-08-12
申请号：PCT/US2009005857
申请日：2009-10-29
申请人： LAM RES CORP , AUGUSTINO JASON , CHAU QUAN , GAFF KEITH WILLIAM , HA HANH TUONG , RICHARDSON BRETT C , SINGH HARMEET
发明人： AUGUSTINO JASON , CHAU QUAN , GAFF KEITH WILLIAM , HA HANH TUONG , RICHARDSON BRETT C , SINGH HARMEET
IPC分类号： H05H1/34 , H01L21/3065
CPC分类号： H01J37/20 , H01J37/32091 , H01J37/32541 , H01J37/3255 , H01J37/32642 , H01J37/32715
摘要： A lower electrode assembly for use in a plasma processing chamber comprises a metal base and upper and lower edge rings. The metal base comprises metal plates brazed together and forming a brazed line on a lower side surface of the base, an edge ring support surface extending horizontally inwardly from the lower side surface and an upper side surface above the edge ring support surface. The upper edge ring comprises a lower surface mounted on the edge ring support surface and the lower edge ring surrounds the lower side surface of the base with a gap between opposed surfaces of the upper and lower edge rings and between the lower edge ring and the outer periphery of the base. The gap has an aspect ratio of total gap length to average gap width sufficient to impede arcing at the location of the braze line.
摘要翻译：用于等离子体处理室的下电极组件包括金属基座和上下边缘环。金属基底包括钎焊在一起的金属板，在基座的下侧表面上形成钎焊线，从下侧表面向水平方向内延伸的边缘环支撑表面和在边缘环支撑表面上方的上侧表面。上边缘环包括安装在边缘环支撑表面上的下表面，并且下边缘环围绕底部的下侧表面，在上边缘环和下边缘环的相对表面之间以及下边缘环和外侧边缘环的相对表面之间具有间隙基地周边。间隙具有总间隙长度与平均间隙宽度的宽高比，足以阻止钎焊线位置处的电弧。

14. 发明申请

WO2004046780A9 INTEGRATED POLARIZATION COUPLER 审中-公开
标题翻译：集成极化耦合器
公开(公告)号：WO2004046780A9
公开(公告)日：2004-08-12
申请号：PCT/US0334222
申请日：2003-10-28
申请人： OPTOVIA CORP , SINGH HARMEET , KHAZAEI HAMID R
发明人： SINGH HARMEET , KHAZAEI HAMID R
IPC分类号： G02B6/12 , G02B6/124 , G02B6/126 , G02B6/34 , G02B6/42 , G02F1/01
CPC分类号： G02B6/126 , G02B6/12007 , G02B6/124 , G02B6/42 , G02F1/0134 , G02F2202/40 , G02F2203/06 , G02F2203/58
摘要： A polarization coupler includes a stress-inducing feature disposed to generate a stress-field in a substrate. First and second waveguides each a have a coupling portion that pass through the stress-field. First and second periodic-structures are in optical communication with the coupling portions of the first and second waveguides.
摘要翻译：偏振耦合器包括设置成在衬底中产生应力场的应力诱导特征。每个a的第一和第二波导具有穿过应力场的耦合部分。第一和第二周期性结构与第一和第二波导的耦合部分光学连通。

15. 发明申请

WO2011126968A3 GHOSTING ARTIFACT REDUCTION IN TEMPORAL NOISE FILTERING 审中-公开
标题翻译：在时间噪声过滤中减少死亡人数
公开(公告)号：WO2011126968A3
公开(公告)日：2012-01-19
申请号：PCT/US2011031068
申请日：2011-04-04
申请人： TEXAS INSTRUMENTS INC , TEXAS INSTRUMENTS JAPAN , HONG WEI , SINGH HARMEET
发明人： HONG WEI , SINGH HARMEET
IPC分类号： H04N5/21 , H04N5/217
CPC分类号： H04N5/2176
摘要： A method of noise filtering of a digital video sequence to reduce ghosting artifacts is disclosed. A described example of the method includes computing motion values for pixels in a frame of the digital video sequence based on a reference frame (302), computing blending factors for the pixels based on the motion values (304), generating filtered output pixel values by applying the blending factors to corresponding pixel values in the reference frame and the frame (306), wherein selected filtered output pixel values are converged (e.g., step-wise or instantly) toward corresponding pixel values in the frame to reduce ghosting artifacts (308), and outputting the filtered frame (310). A noise filter and a digital system for filtering a digital video sequence to reduce ghosting artifacts are also disclosed.
摘要翻译：公开了一种数字视频序列的噪声滤波方法以减少重影伪像。所描述的方法的示例包括基于参考帧（302）计算数字视频序列的帧中的像素的运动值，基于运动值计算像素的混合因子（304），通过将所述混合因子应用于所述参考帧和所述帧（306）中的相应像素值，其中所选择的滤波输出像素值朝向所述帧中的相应像素值收敛（例如，逐步或即时）以减少重影伪像（308），并输出滤波帧（310）。还公开了一种用于滤波数字视频序列以减少重影伪影的噪声滤波器和数字系统。

16. 发明申请

WO2004046764A9 OPTICAL MULTIPLEXER 审中-公开
标题翻译：光学多路复用器
公开(公告)号：WO2004046764A9
公开(公告)日：2004-09-16
申请号：PCT/US0334176
申请日：2003-10-28
申请人： OPTOVIA CORP , SINGH HARMEET , KHAZAEI HAMID R , LEWIS KIRK , SQUIRES EMILY
发明人： SINGH HARMEET , KHAZAEI HAMID R , LEWIS KIRK , SQUIRES EMILY
IPC分类号： G02B6/12 , G02B6/126 , G02B
CPC分类号： G02B6/12007 , G02B6/126 , G02B2006/12107 , G02B2006/12116
摘要： An optical multiplexer includes a substrate into which are integrated a polarization rotator and a polarization coupler. The polarization coupler and the polarization rotator are in optical communication with each other.
摘要翻译：光学多路复用器包括其中集成有偏振旋转器和偏振耦合器的衬底。偏振耦合器和偏振旋转器彼此光学连通。

17. 发明申请

WO2004046764A2 OPTICAL MULTIPLEXER 审中-公开
标题翻译：光学多路复用器
公开(公告)号：WO2004046764A2
公开(公告)日：2004-06-03
申请号：PCT/US0334176
申请日：2003-10-28
申请人： OPTOVIA CORP , SINGH HARMEET , KHAZAEI HAMID R , LEWIS KIRK , SQUIRES EMILY
发明人： SINGH HARMEET , KHAZAEI HAMID R , LEWIS KIRK , SQUIRES EMILY
IPC分类号： G02B6/12 , G02B6/126 , G02B
CPC分类号： G02B6/12007 , G02B6/126 , G02B2006/12107 , G02B2006/12116
摘要： An optical multiplexer includes a substrate into which are integrated a polarization rotator and a polarization coupler. The polarization coupler and the polarization rotator are in optical communication with each other.
摘要翻译：一种光学多路复用器包括其中集成有偏振旋转器和偏振耦合器的基板。偏振耦合器和偏振旋转器彼此光通信。

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