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    • 12. 发明申请
    • MICRO-FABRICATED ELECTROKINETIC PUMP
    • 微型电动泵
    • WO2004027262A2
    • 2004-04-01
    • PCT/US2003/030179
    • 2003-09-23
    • COOLIGY, INC.
    • CORBIN, DavidKENNETH, Goodson, E.KENNY, Thomas, William, Jr.ZENG, ShulinSANTIAGO, Juan, G.
    • F04B
    • F04B17/00F04B19/006
    • An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
    • 用于泵送液体的电动泵包括具有多个窄的,短的和直的孔隙的泵送体,用于将液体引导通过身体。 用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。 泵体形成在支撑结构上以保持泵体的机械完整性。 泵可以使用常规的半导体处理步骤制造。 优选使用等离子体蚀刻形成孔。 该结构被氧化以使结构绝缘并且还使孔变窄。 通过蚀刻衬底并除去界面氧化物层形成支撑结构。 形成电极以在泵体上施加电压电位。 制造电动泵的另一种方法包括提供蚀刻停止对准标记,使得蚀刻步骤自我终止。
    • 13. 发明申请
    • BOILING TEMPERATURE DESIGN IN PUMPED MICROCHANNEL COOLING LOOPS
    • 泵送微通道冷却机的沸腾温度设计
    • WO2004083742A2
    • 2004-09-30
    • PCT/US2004/006746
    • 2004-03-05
    • COOLIGY, INC.
    • ZHOU, PengZENG, ShulinKENNY, Thomas, W., Jr.MUNCH, MarkUPADHYA, GirishGOODSON, KennethSANTIAGO, Juan, G.
    • F25B
    • H01L23/473F28D15/0266F28D15/06H01L2924/0002H01L2924/00
    • A method of cooling at least one heat generating device using a cooling system is disclosed. The method comprises the steps of using at least one pump to cause a fluid to flow in at least on heat exchanger and adjusting a pressure of the fluid to correspondingly adjust a boiling point temperature of the fluid in the at least one heat exchanger. The method can also include the step of providing at least one heat rejector for rejecting heat from the system, the at least one heat rejector being situated downstream of the at least one heat exchanger. The step of adjusting a pressure of the fluid can comprise adjusting a pressure of the fluid during charging and sealing of the system. Further, the step of adjusting a pressure of the fluid can comprise adjusting a composition and volume of a gas and liquid introduced during charging of the system.
    • 公开了一种使用冷却系统来冷却至少一个发热装置的方法。 该方法包括以下步骤:使用至少一个泵来使流体至少在热交换器上流动并且调节流体的压力以相应地调节至少一个热交换器中的流体的沸点温度。 该方法还可以包括提供至少一个散热器以排除来自系统的热的步骤,所述至少一个热排出器位于至少一个热交换器的下游。 调节流体压力的步骤可以包括在系统充电和密封期间调节流体的压力。 此外,调节流体压力的步骤可以包括调节在系统充电期间引入的气体和液体的组成和体积。