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    • 14. 发明申请
    • MICROMACHINED VIBRATORY GYROSCOPE WITH ELECTROSTATIC COUPLING
    • 具有静电耦合的微型振动陀螺仪
    • WO2004081495A3
    • 2005-04-21
    • PCT/US2004006453
    • 2004-03-03
    • BEI TECHNOLOGIES INCCONTI TEMIC MICROELECTRONICCONTINENTAL TEVES AG & CO OHGYAN HAIBURGHARDT ROLANDHARTMANN BERNHARDKAPSER KONRADROSE MATTHIAS
    • YAN HAIBURGHARDT ROLANDHARTMANN BERNHARDKAPSER KONRADROSE MATTHIAS
    • G01C19/5712G01C19/56
    • G01C19/5719Y10T74/1275
    • Micromachined vibratory gyroscope having two or more coplanar movable masses suspended over a planar substrate. Two perpendicular axes (x and y) are defined within the substrate plane, while a third, the z-axis or input axis, is defined to be perpendicular to the substrate plane. The movements of the two masses along the x-axis are coupled through an electrostatic coupling means so that the natural resonant frequency of the in-phase mode and that of the anti-phase mode are separated from each other for the resonances along the x-axis. When the two masses are driven to vibrate along the x-axis in the anti-phase mode and the device experiences rotation about the z-axis, Coriolis forces act differentially on the masses in the Y­direction, causing the two masses to dither in an anti-phase motion along the y-axis. The anti-phase dithering along the y-axis can be sensed directly by a rate sensor to measure the rate of rotation about the z-axis. Alternatively, the anti-phase dithering of the first and second bodies along the y-axis can be transferred to other movable bodies (i.e., rate-sensing masses) whose movement is then sensed to measure the rate of rotation about the z-axis. The sensing bodies are preferably suspended in such manner that, in the absence of Coriolis forces, the x-axis motion of the vibrating masses does not affect the sensing bodies. That inhibits motion of the sensing bodies in response to linear acceleration within the plane of the substrate, but permits those bodies to respond readily to the Corollas-induced motion about an axis perpendicular to the substrate plane.
    • 微机械振动陀螺仪具有悬挂在平面基板上的两个或更多个共面可移动质量块。 两个垂直轴(x和y)被限定在衬底平面内,而第三个z轴或输入轴被定义为垂直于衬底平面。 沿着x轴的两个质量块的移动通过静电耦合装置耦合,使得同相模式和反相模式的固有谐振频率彼此分离,用于沿x轴的谐振, 轴。 当两个质量被驱动以反相模式沿着x轴振动并且该装置经历围绕z轴的旋转时,科里奥利力在Y方向上的质量作用差异地导致两个质量在反向 沿y轴的相位运动。 可以通过速率传感器直接感测沿y轴的反相抖动,以测量围绕z轴的旋转速率。 或者,沿着y轴的第一和第二主体的相位抖动可以传递到其它可移动体(即,速率感测质量),其移动然后被感测以测量围绕z轴的旋转速率。 感测体优选地以这样的方式悬挂,即在没有科里奥利力的情况下,振动块的x轴运动不影响感测体。 这可以抑制感测体响应于衬底平面内的线性加速度的运动,但是允许这些物体容易地响应于围绕垂直于衬底平面的轴的花冠诱发的运动。
    • 15. 发明申请
    • MULTI-AXIS MICROMACHINED ACCELEROMETER
    • 多轴微型加速度计
    • WO2007021399B1
    • 2008-01-10
    • PCT/US2006026732
    • 2006-07-11
    • BEI TECHNOLOGIES INCACAR CENK
    • ACAR CENK
    • G01P15/125
    • G01P15/18G01P15/0888G01P15/125G01P2015/082
    • Multi-axis micromachined accelerometer which, in some disclosed embodiments, has a proof mass suspended above a substrate for movement in response to acceleration along first and second axes, a first detection electrode connected to the proof mass and constrained for movement only along the first axis, and a second detection electrode connected to the proof mass and constrained for movement only along the second axis. In another embodiment, the proof mass is also movable in response to acceleration along a third axis which is perpendicular to the substrate, and a third detection electrode is mounted on the substrate beneath the proof mass for detecting movement of the proof mass in response to acceleration along the third axis. In other embodiments, two proof masses are mounted above a substrate for torsional movement about an axis perpendicular to the substrate in response to acceleration along a first axis and for rotational movement about a second axis parallel to the substrate in response to acceleration along second axis perpendicular to the substrate, a first detector having input electrodes connected to the proof masses and constrained for movement only along the first axis for detecting acceleration along the first axis, and detection electrodes mounted on the substrate beneath the proof masses for detecting rotational movement of the proof masses and acceleration along the second axis.
    • 在一些公开的实施例中,多轴微机械加速度计具有悬浮在基板上方的检测质量,用于响应于沿着第一和第二轴的加速度而运动;第一检测电极,连接到检验质量块并且仅限于沿第一轴线移动 以及第二检测电极,其连接到所述检验质量块并且仅限于仅沿着所述第二轴线移动。 在另一个实施例中,检测质量还可以响应于垂直于衬底的第三轴线的加速度而移动,并且第三检测电极安装在校准物质下面的衬底上,用于响应于加速度检测检测质量块的移动 沿着第三轴。 在其他实施例中,响应于沿着第一轴线的加速度,响应于平行于基板的第二轴线的响应于沿着第二轴线垂直的加速度的旋转运动,两个证明质量块安装在基板上方以围绕垂直于基板的轴线的扭转运动 第一检测器,其具有连接到检验质量块的输入电极,并且被限制为仅沿着第一轴线移动,用于检测沿着第一轴线的加速度,以及安装在基板下方的检测电极,用于检测证据的旋转运动 沿第二轴的质量和加速度。
    • 16. 发明申请
    • MULTI-AXIS MICROMACHINED ACCELEROMETER
    • 多轴微型加速度计
    • WO2007021399A2
    • 2007-02-22
    • PCT/US2006026732
    • 2006-07-11
    • BEI TECHNOLOGIES INCACAR CENK
    • ACAR CENK
    • G01P15/00
    • G01P15/18G01P15/0888G01P15/125G01P2015/082
    • Multi-axis micromachined accelerometer which, in some disclosed embodiments, has a proof mass suspended above a substrate for movement in response to acceleration along first and second axes, a first detection electrode connected to the proof mass and constrained for movement only along the first axis, and a second detection electrode connected to the proof mass and constrained for movement only along the second axis. In another embodiment, the proof mass is also movable in response to acceleration along a third axis which is perpendicular to the substrate, and a third detection electrode is mounted on the substrate beneath the proof mass for detecting movement of the proof mass in response to acceleration along the third axis. In other embodiments, two proof masses are mounted above a substrate for torsional movement about an axis perpendicular to the substrate in response to acceleration along a first axis and for rotational movement about a second axis parallel to the substrate in response to acceleration along second axis perpendicular to the substrate, a first detector having input electrodes connected to the proof masses and constrained for movement only along the first axis for detecting acceleration along the first axis, and detection electrodes mounted on the substrate beneath the proof masses for detecting rotational movement of the proof masses and acceleration along the second axis.
    • 在一些公开的实施例中,多轴微机械加速度计具有悬浮在基板上方的检测质量,用于响应于沿着第一和第二轴的加速度而运动;第一检测电极,连接到检验质量块并且仅限于沿第一轴线移动 以及第二检测电极,其连接到所述检验质量块并且仅限于仅沿着所述第二轴线移动。 在另一个实施例中,检测质量还可以响应于垂直于衬底的第三轴线的加速度而移动,并且第三检测电极安装在校准物质下面的衬底上,用于响应于加速度检测检测质量块的移动 沿着第三轴。 在其他实施例中,响应于沿着第一轴线的加速度,响应于平行于基板的第二轴线响应于沿着第二轴线垂直的加速度的旋转运动,两个证明质量块安装在基板上方以围绕垂直于基板的轴线的扭转运动 第一检测器,其具有连接到检验质量块的输入电极,并且被限制为仅沿着第一轴线移动,用于检测沿着第一轴线的加速度,以及安装在基板下方的检测电极,用于检测证据的旋转运动 沿第二轴的质量和加速度。
    • 18. 发明申请
    • TORSIONAL RATE SENSOR WITH MOMENTUM BALANCE AND MODE DECOUPLING
    • 扭矩传感器具有平衡和模式解耦功能
    • WO2006132773A2
    • 2006-12-14
    • PCT/US2006019241
    • 2006-05-18
    • BEI TECHNOLOGIES INCACAR CENKMAO MINYAO
    • ACAR CENKMAO MINYAO
    • G01C19/00
    • G01C19/5712
    • Rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, means constraining the two masses for anti-phase movement about both the drive axes and the sense axes, sensing frames coupled to the masses for movement in response to the torsional movement of the masses about the sense axes, and means responsive to movement of the sensing frames for monitoring rate of rotation about the input axis.
    • 速率传感器包括两个基本上平面的质量块,用于驱动质量体围绕质量平面中的平行驱动轴相对振荡的装置,垂直于驱动轴的输入轴,垂直于驱动轴的感测轴和输入轴 响应由质量围绕输入轴的旋转而产生的科里奥利力,围绕传感轴安装用于扭转运动的质量块,意味着约束两个质量以围绕驱动轴和感测轴进行反相运动,感测框架 耦合到质量块以响应于质量围绕感测轴线的扭转运动而移动,以及响应于感测框架的运动的装置,用于监测围绕输入轴线的旋转速率。
    • 20. 发明申请
    • LINEAR VOICE COIL ACTUATOR WITH PLANAR COILS
    • 线性语音线圈驱动器与平面线圈
    • WO2003060931A1
    • 2003-07-24
    • PCT/US2002/040796
    • 2002-12-20
    • BEI TECHNOLOGIES, INC.
    • GODKIN, Mikhail
    • H01F7/06
    • H01F7/066H02K11/00H02K41/0356
    • A linear voice coil actuator is disclosed which includes field subassemblies each including a field blank, and in which at least a one of the field subassemblies includes maghets of alternating polarity positioned on the field blank to form interleaved-magnetic circuits in a direction of motion of the linear voice coil actuator. The field subassemblies are positioned with respect to one another to form a gap between the field subassembly having the magnets, and another of the field subassemblies. Also included is a coil assembly that includes coils positioned in a plane within the gap, wherein the plane is substantially parallel to the direction of motion of the linear voice coil actuator. The field blanks include flux path sections which provide a flux path perpendicular to the direction of motion for each pair of magnets of opposite polarity that are separated by the gap, and which thereby results in the height of the actuator of the present invention being largely independent of the lengths of the magnets employed.
    • 公开了一种线性音圈致动器,其包括各自包括场空白的现场子组件,并且其中至少一个场组件包括位于场空白上的交替极性的磁极,以在运动方向上形成交错磁路 线性音圈执行器。 现场子组件相对于彼此定位,以在具有磁体的磁场子组件和另一个现场组件之间形成间隙。 还包括线圈组件,其包括定位在间隙内的平面中的线圈,其中平面基本上平行于线性音圈致动器的运动方向。 场空白包括磁通路径部分,其为由间隙分开的相反极性的每对磁体提供垂直于运动方向的磁通路径,并且由此导致本发明的致动器的高度在很大程度上独立 使用的磁体的长度。