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    • 97. 发明申请
    • PRESSURE SENSOR USING PIEZOELECTRIC BENDING RESONATORS
    • 压电传感器使用压电式弯曲谐振器
    • WO2016081915A1
    • 2016-05-26
    • PCT/US2015/062012
    • 2015-11-20
    • CALIFORNIA INSTITUTE OF TECHNOLOGY
    • BAO, XiaoqiSHERRIT, Stewart
    • G01L11/00G01L9/08G01L7/08
    • G01L1/167E21B47/06
    • A pressure sensor including an enclosure and a bending resonator housed in the enclosure. The bending resonator includes a diaphragm connected to the enclosure, a piezoelectric layer on the diaphragm, and an electrode on the piezoelectric layer. The pressure sensor also includes an electrical terminal coupled to the piezoelectric layer and extending out through the enclosure. The electrical terminal applies an input signal to the piezoelectric layer to resonate the bending resonator. A resonance frequency of the bending resonator changes according to a change in an external pressure applied to the pressure sensor and the resonance frequency of the bending resonator corresponds to the external pressure applied to the pressure sensor.
    • 压力传感器包括外壳和容纳在外壳中的弯曲谐振器。 弯曲谐振器包括连接到外壳的隔膜,隔膜上的压电层和压电层上的电极。 压力传感器还包括耦合到压电层并延伸穿过外壳的电端子。 电端子将输入信号施加到压电层以使弯曲谐振器谐振。 弯曲谐振器的谐振频率根据施加到压力传感器的外部压力的变化而变化,并且弯曲谐振器的谐振频率对应于施加到压力传感器的外部压力。