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    • 10. 发明授权
    • Apparatus for removing ions from an electron beam
    • 用于从电子束去除离子的装置
    • US5616920A
    • 1997-04-01
    • US538865
    • 1995-10-04
    • Erich Plies
    • Erich Plies
    • H01J49/08H01J35/02H01J37/05H01J37/147H01J49/28H01J49/48
    • H01J37/1477H01J35/02H01J37/05H01J49/288H01J49/48
    • Purely electrical or magnetic deflection systems are usually utilized in the probe-shaping part of modern electron beam tomographs in order to remove the gas ions generated in the evacuated drift tube by electron impact from the beam. The known deflection systems, however, cause an offset of the electron beam, so that this enters extra-axially into the lens element following the deflection system. In the apparatus for removing ions from an electron beam disclosed herein, a deflection unit (Wien filter) generates an E.times.B field oriented perpendicular to the beam axis that exerts strong shearing forces only on the positively charged gas ions, but does not influence the electrons. The deflection unit is essentially composed of two tube electrodes lying at a constant potential, of an electrostatic octopole deflector, and two saddle coil pairs annularly surrounding the octopole deflector. The apparatus is useful for fast electron beam tomographs, including x-ray scanners.
    • 通常在现代电子束断层摄影机的探针成形部分中采用纯电气或磁偏转系统,以便通过电子束从电子束中去除真空漂移管中产生的气体离子。 然而,已知的偏转系统引起电子束的偏移,使得其在偏转系统之后进入到轴向进入透镜元件。 在用于从本文公开的电子束去除离子的装置中,偏转单元(维恩滤波器)产生垂直于光束轴线定向的ExB场,其仅在带正电荷的气体离子上施加强剪切力,但不影响电子。 偏转单元基本上由位于恒定电位的静电八极偏转器的两个管电极和环形围绕八极偏转器的两个鞍形线圈组成。 该装置适用于快速电子束断层扫描仪,包括x射线扫描仪。