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    • 8. 发明授权
    • Apparatus for removing ions from an electron beam
    • 用于从电子束去除离子的装置
    • US5616920A
    • 1997-04-01
    • US538865
    • 1995-10-04
    • Erich Plies
    • Erich Plies
    • H01J49/08H01J35/02H01J37/05H01J37/147H01J49/28H01J49/48
    • H01J37/1477H01J35/02H01J37/05H01J49/288H01J49/48
    • Purely electrical or magnetic deflection systems are usually utilized in the probe-shaping part of modern electron beam tomographs in order to remove the gas ions generated in the evacuated drift tube by electron impact from the beam. The known deflection systems, however, cause an offset of the electron beam, so that this enters extra-axially into the lens element following the deflection system. In the apparatus for removing ions from an electron beam disclosed herein, a deflection unit (Wien filter) generates an E.times.B field oriented perpendicular to the beam axis that exerts strong shearing forces only on the positively charged gas ions, but does not influence the electrons. The deflection unit is essentially composed of two tube electrodes lying at a constant potential, of an electrostatic octopole deflector, and two saddle coil pairs annularly surrounding the octopole deflector. The apparatus is useful for fast electron beam tomographs, including x-ray scanners.
    • 通常在现代电子束断层摄影机的探针成形部分中采用纯电气或磁偏转系统,以便通过电子束从电子束中去除真空漂移管中产生的气体离子。 然而,已知的偏转系统引起电子束的偏移,使得其在偏转系统之后进入到轴向进入透镜元件。 在用于从本文公开的电子束去除离子的装置中,偏转单元(维恩滤波器)产生垂直于光束轴线定向的ExB场,其仅在带正电荷的气体离子上施加强剪切力,但不影响电子。 偏转单元基本上由位于恒定电位的静电八极偏转器的两个管电极和环形围绕八极偏转器的两个鞍形线圈组成。 该装置适用于快速电子束断层扫描仪,包括x射线扫描仪。
    • 10. 发明授权
    • Beam guidance for electron beam tests, and electron impact spectrometer
having such beam guidance
    • 电子束测试的光束指导和具有这种光束引导的电子轰击光谱仪
    • US4300045A
    • 1981-11-10
    • US107592
    • 1979-12-27
    • Harald IbachHermann FroitzheimHeinz-Dieter BruchmannSieghard Lehwald
    • Harald IbachHermann FroitzheimHeinz-Dieter BruchmannSieghard Lehwald
    • H01J49/08G01N23/203G01Q30/02G01Q30/18G01Q70/18H01J49/06H01J49/14H01J49/44H01J49/48H01J40/00H01J47/00
    • H01J49/06H01J49/48
    • A beam guidance for electron beam tests, especially of solid bodies. The ctrons cathodically emitted and electron-optically bundled are subjected at least to an energy selection in a cylinder condenser deflection unit and are subsequently detected or indicated in a detector. The emission and bundling systems are arranged in such a way that the electrons, in the plane at right angles to the cylinder condenser axis, are focused upon the inlet shield or baffle of the condenser, yet are focused at right angles thereto upon the detector. Also disclosed is an electron impact spectrometer having such a beam guidance, and an emission system encompassing a cathode and a lens system for focusing an electron current or flow upon an inlet baffle of a monochromator, with such flow entering into the cylinder condenser monochromator for energy selection of the electrons, which emanate bundled from the monochromator and strike or fall upon the probe or test sample and after reflection thereon come by way of a lens system into the cylinder condenser analyzer and after energy selection and passage through the outlet baffle of the analyzer strike or impinge upon a detector.
    • 用于电子束测试的光束引导,特别是固体的测试。 阴极发射的电子和电子束的电子至少在气缸冷凝器偏转单元中进行能量选择,随后在检测器中检测或指示。 发射和捆扎系统被布置成使得在与圆柱形冷凝器轴线成直角的平面中的电子被聚焦在冷凝器的入口屏蔽或挡板上,但是在检测器上与其成直角聚焦。 还公开了具有这种光束引导的电子轰击光谱仪,以及包括阴极和透镜系统的发射系统,用于将电子流或流动聚焦在单色仪的入口挡板上,这样的流进入气缸电容器单色器以获得能量 从单色仪发射并发射或落在探针或测试样品上并在其上反射之后的电子的选择通过透镜系统进入气瓶冷凝器分析器,并且在能量选择和通过分析器的出口挡板之后 撞击或撞击检测器。